ATE460072T1 - Leiterplattenmerkmale mit reduzierter parasitärer kapazität und deren herstellungsverfahren - Google Patents

Leiterplattenmerkmale mit reduzierter parasitärer kapazität und deren herstellungsverfahren

Info

Publication number
ATE460072T1
ATE460072T1 AT99964046T AT99964046T ATE460072T1 AT E460072 T1 ATE460072 T1 AT E460072T1 AT 99964046 T AT99964046 T AT 99964046T AT 99964046 T AT99964046 T AT 99964046T AT E460072 T1 ATE460072 T1 AT E460072T1
Authority
AT
Austria
Prior art keywords
layer
photodielectric
traces
region
photodielectric layer
Prior art date
Application number
AT99964046T
Other languages
English (en)
Inventor
Gregory Dunn
Larry Lach
Jovica Savic
Allyson Beuhler
Everett Simons
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of ATE460072T1 publication Critical patent/ATE460072T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistors, capacitors or inductors
    • H05K1/165—Printed circuits incorporating printed electric components, e.g. printed resistors, capacitors or inductors incorporating printed inductors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0023—Etching of the substrate by chemical or physical means by exposure and development of a photosensitive insulating layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances
    • H01F17/0013—Printed inductances with stacked layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01—Dielectrics
    • H05K2201/0183—Dielectric layers
    • H05K2201/0187—Dielectric layers with regions of different dielectrics in the same layer, e.g. in a printed capacitor for locally changing the dielectric properties
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0355—Metal foils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/08—Magnetic details
    • H05K2201/083—Magnetic materials
    • H05K2201/086—Magnetic materials for inductive purposes, e.g. printed inductor with ferrite core
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/09218—Conductive traces
    • H05K2201/09236—Parallel layout
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/0551—Exposure mask directly printed on the PCB
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
AT99964046T 1998-12-31 1999-12-02 Leiterplattenmerkmale mit reduzierter parasitärer kapazität und deren herstellungsverfahren ATE460072T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/224,011 US6103134A (en) 1998-12-31 1998-12-31 Circuit board features with reduced parasitic capacitance and method therefor
PCT/US1999/028534 WO2000041446A1 (en) 1998-12-31 1999-12-02 Circuit board features with reduced parasitic capacitance and method therefor

Publications (1)

Publication Number Publication Date
ATE460072T1 true ATE460072T1 (de) 2010-03-15

Family

ID=22838924

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99964046T ATE460072T1 (de) 1998-12-31 1999-12-02 Leiterplattenmerkmale mit reduzierter parasitärer kapazität und deren herstellungsverfahren

Country Status (7)

Country Link
US (1) US6103134A (de)
EP (1) EP1062849B1 (de)
JP (1) JP2002534816A (de)
AT (1) ATE460072T1 (de)
DE (1) DE69942090D1 (de)
TW (1) TW465265B (de)
WO (1) WO2000041446A1 (de)

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* Cited by examiner, † Cited by third party
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JP2001156408A (ja) * 1999-11-30 2001-06-08 Fujitsu Ltd プリント回路基板および配線形成方法
EP2315510A3 (de) * 2001-06-05 2012-05-02 Dai Nippon Printing Co., Ltd. Leiterplatte mit passiven Elementen
DE60232452D1 (de) * 2001-08-15 2009-07-09 Ciba Holding Inc Flammwidrige zusammensetzungen
US6751113B2 (en) * 2002-03-07 2004-06-15 Netlist, Inc. Arrangement of integrated circuits in a memory module
US6891190B2 (en) * 2002-05-23 2005-05-10 Motorola, Inc. Organic semiconductor device and method
US6760208B1 (en) * 2002-12-30 2004-07-06 Motorola, Inc. Distributive capacitor for high density applications
WO2005024862A1 (en) * 2003-09-04 2005-03-17 Philips Intellectual Property & Standards Gmbh Fractional turns transformers with ferrite polymer core
US20050086037A1 (en) * 2003-09-29 2005-04-21 Pauley Robert S. Memory device load simulator
US20050018495A1 (en) * 2004-01-29 2005-01-27 Netlist, Inc. Arrangement of integrated circuits in a memory module
JP2006019441A (ja) * 2004-06-30 2006-01-19 Shinko Electric Ind Co Ltd 電子部品内蔵基板の製造方法
US7323897B2 (en) * 2004-12-16 2008-01-29 Verigy (Singapore) Pte. Ltd. Mock wafer, system calibrated using mock wafer, and method for calibrating automated test equipment
KR100716815B1 (ko) * 2005-02-28 2007-05-09 삼성전기주식회사 칩 내장형 인쇄회로기판 및 그 제조방법
KR100716810B1 (ko) * 2005-03-18 2007-05-09 삼성전기주식회사 블라인드 비아홀을 구비한 커패시터 내장형 인쇄회로기판및 그 제조 방법
KR100716824B1 (ko) * 2005-04-28 2007-05-09 삼성전기주식회사 하이브리드 재료를 이용한 커패시터 내장형 인쇄회로기판및 그 제조방법
US7444727B2 (en) * 2006-03-10 2008-11-04 Motorola, Inc. Method for forming multi-layer embedded capacitors on a printed circuit board
JP4957951B2 (ja) * 2006-03-30 2012-06-20 日本電気株式会社 半導体装置及びその製造方法
US7451540B2 (en) * 2006-10-24 2008-11-18 Motorola, Inc. Method for fabricating a printed circuit board
US20080169555A1 (en) * 2007-01-16 2008-07-17 Ati Technologies Ulc Anchor structure for an integrated circuit
JP6326803B2 (ja) * 2013-12-17 2018-05-23 Tdk株式会社 コイル基板、巻線部品及び電源装置
US10690836B2 (en) * 2015-06-24 2020-06-23 Intel Corporation Display carrier attached light bar for backlit displays

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3778900A (en) * 1970-09-04 1973-12-18 Ibm Method for forming interconnections between circuit layers of a multi-layer package
US4899439A (en) * 1989-06-15 1990-02-13 Microelectronics And Computer Technology Corporation Method of fabricating a high density electrical interconnect
US5281769A (en) * 1990-11-05 1994-01-25 Nippon Telegraph And Telephone Corporation Dewall plating technique
CA2090099C (en) * 1992-05-15 1997-01-14 James Rath Method of forming a multilayer printed circuit board and product thereof
US5310700A (en) * 1993-03-26 1994-05-10 Integrated Device Technology, Inc. Conductor capacitance reduction in integrated circuits
US5370766A (en) * 1993-08-16 1994-12-06 California Micro Devices Methods for fabrication of thin film inductors, inductor networks and integration with other passive and active devices
WO1995031886A1 (en) * 1994-05-13 1995-11-23 Dai Nippon Printing Co., Ltd. Multilayer printed wiring board and its manufacture, and transferring plate and its manufacture
JPH0818228A (ja) * 1994-06-27 1996-01-19 Yamamoto Seisakusho:Kk 多層プリント配線板の製造方法
GB2290913B (en) * 1994-06-30 1998-03-11 Plessey Semiconductors Ltd Multi-chip module inductor structure
US5709979A (en) * 1994-10-21 1998-01-20 Sheldahl, Inc. Printed wiring board with photoimageable dielectric base substrate and method of manufacture therefor
JPH0935927A (ja) * 1995-07-20 1997-02-07 Tokin Corp 複合磁性体及びそれを用いた電磁干渉抑制体
US5806177A (en) * 1995-10-31 1998-09-15 Sumitomo Bakelite Company Limited Process for producing multilayer printed circuit board
CA2246405A1 (en) * 1996-12-17 1998-06-25 Yozo Ohara Circuit board having electric component and its manufacturing method
WO1998047332A1 (en) * 1997-04-16 1998-10-22 Alliedsignal Inc. Positive working photodefinable resin coated metal for mass production of microvias in multilayer printed wiring boards
JPH1140915A (ja) * 1997-05-22 1999-02-12 Nec Corp プリント配線板
US6008102A (en) * 1998-04-09 1999-12-28 Motorola, Inc. Method of forming a three-dimensional integrated inductor
TW400633B (en) * 1999-03-19 2000-08-01 United Microelectronics Corp The manufacture method of interconnects
US8018228B2 (en) * 2008-06-13 2011-09-13 Olympus Ndt High resolution and flexible eddy current array probe

Also Published As

Publication number Publication date
JP2002534816A (ja) 2002-10-15
EP1062849A1 (de) 2000-12-27
US6103134A (en) 2000-08-15
EP1062849B1 (de) 2010-03-03
DE69942090D1 (de) 2010-04-15
EP1062849A4 (de) 2004-08-25
WO2000041446A1 (en) 2000-07-13
TW465265B (en) 2001-11-21

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Legal Events

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