ATE464692T1 - Eine elektrische stromversorgung die besonders für gleichstromplasmabehandlung anwendbar ist - Google Patents
Eine elektrische stromversorgung die besonders für gleichstromplasmabehandlung anwendbar istInfo
- Publication number
- ATE464692T1 ATE464692T1 AT01202697T AT01202697T ATE464692T1 AT E464692 T1 ATE464692 T1 AT E464692T1 AT 01202697 T AT01202697 T AT 01202697T AT 01202697 T AT01202697 T AT 01202697T AT E464692 T1 ATE464692 T1 AT E464692T1
- Authority
- AT
- Austria
- Prior art keywords
- power supply
- direct current
- electrical power
- plasma treatment
- particularly applicable
- Prior art date
Links
- 238000009832 plasma treatment Methods 0.000 title 1
- 238000004804 winding Methods 0.000 abstract 3
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of DC power input into DC power output
- H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
- H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
- H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of DC power input into DC power output
- H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
- H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
- H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
- H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33569—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
- H02M3/33571—Half-bridge at primary side of an isolation transformer
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M3/00—Conversion of DC power input into DC power output
- H02M3/22—Conversion of DC power input into DC power output with intermediate conversion into AC
- H02M3/24—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters
- H02M3/28—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC
- H02M3/325—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal
- H02M3/335—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M3/33569—Conversion of DC power input into DC power output with intermediate conversion into AC by static converters using discharge tubes with control electrode or semiconductor devices with control electrode to produce the intermediate AC using devices of a triode or a transistor type requiring continuous application of a control signal using semiconductor devices only having several active switching elements
- H02M3/33573—Full-bridge at primary side of an isolation transformer
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Dc-Dc Converters (AREA)
- Plasma Technology (AREA)
- Arc Welding Control (AREA)
- Emergency Protection Circuit Devices (AREA)
- Generation Of Surge Voltage And Current (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP01202697A EP1278294B9 (de) | 2001-07-16 | 2001-07-16 | Eine elektrische Stromversorgung, die besonders für Gleichstromplasmabehandlung anwendbar ist |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE464692T1 true ATE464692T1 (de) | 2010-04-15 |
Family
ID=8180642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT01202697T ATE464692T1 (de) | 2001-07-16 | 2001-07-16 | Eine elektrische stromversorgung die besonders für gleichstromplasmabehandlung anwendbar ist |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6567278B2 (de) |
| EP (1) | EP1278294B9 (de) |
| AT (1) | ATE464692T1 (de) |
| DE (1) | DE60141822D1 (de) |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW591974B (en) * | 2002-11-14 | 2004-06-11 | Richtek Technology Corp | Two-phase H-bridge driving circuit and method |
| US7184146B2 (en) * | 2003-06-24 | 2007-02-27 | Cardinal Ig Company | Methods and apparatus for evaluating insulating glass units |
| DE10330473A1 (de) * | 2003-07-05 | 2005-01-27 | Alstom Technology Ltd | Frequenzumwandler für Hochgeschwindigkeitsgeneratoren |
| EP1501180A1 (de) * | 2003-07-23 | 2005-01-26 | ABB Schweiz AG | Umrichterschaltung |
| US20050288739A1 (en) * | 2004-06-24 | 2005-12-29 | Ethicon, Inc. | Medical implant having closed loop transcutaneous energy transfer (TET) power transfer regulation circuitry |
| US9997338B2 (en) * | 2005-03-24 | 2018-06-12 | Oerlikon Surface Solutions Ag, Pfäffikon | Method for operating a pulsed arc source |
| PL1864313T3 (pl) | 2005-03-24 | 2013-05-31 | Oerlikon Trading Ag | Próżniowy generator plazmowy |
| US20060262574A1 (en) * | 2005-05-20 | 2006-11-23 | David Kelly | DC high voltage to DC low voltage converter |
| JP4487199B2 (ja) * | 2005-05-27 | 2010-06-23 | Ｔｄｋ株式会社 | スイッチング電源装置 |
| FR2893788B1 (fr) * | 2005-11-21 | 2008-01-04 | Renault Sas | Alimentation electrique haute tension et reacteur a plasma |
| JP4797663B2 (ja) * | 2006-02-03 | 2011-10-19 | Ｔｄｋ株式会社 | スイッチング電源装置 |
| US7558092B2 (en) * | 2006-02-28 | 2009-07-07 | Tdk Corporation | Switching power supply unit |
| US8514601B2 (en) | 2009-08-17 | 2013-08-20 | Ideal Power Converters, Inc. | Power conversion with added pseudo-phase |
| EP2874297B1 (de) | 2006-06-06 | 2023-09-27 | Ideal Power Inc. | Buck-Boost Stromwandler |
| NZ550043A (en) * | 2006-09-21 | 2008-01-31 | Eaton Power Quality Company | A switched mode power supply and method of production |
| KR101030466B1 (ko) * | 2007-06-28 | 2011-04-25 | 신덴겐코교 가부시키가이샤 | 양방향 ｄｃ/ｄｃ 컨버터 |
| US9039871B2 (en) | 2007-11-16 | 2015-05-26 | Advanced Energy Industries, Inc. | Methods and apparatus for applying periodic voltage using direct current |
| US8133359B2 (en) | 2007-11-16 | 2012-03-13 | Advanced Energy Industries, Inc. | Methods and apparatus for sputtering deposition using direct current |
| CN102714465A (zh) | 2009-06-29 | 2012-10-03 | 理想能量转换器有限公司 | 带有旁路能量转移电抗的消弧开关的功率转移器件、方法和系统 |
| CA2808490C (en) * | 2009-08-17 | 2015-02-03 | Ce+T Energy Solutions Inc. | Power conversion with added pseudo-phase |
| KR101073598B1 (ko) | 2009-12-17 | 2011-10-14 | 부경대학교 산학협력단 | 다중 병렬형 영전압 스위치형 풀 브릿지 직류-직류 변환기 및 그 제어방법 |
| KR101140336B1 (ko) | 2010-09-28 | 2012-05-03 | 한국전기연구원 | 절연형 벅 부스트 ｄｃ?ｄｃ 컨버터 |
| MY161374A (en) | 2010-11-30 | 2017-04-14 | Ideal Power Converters Inc | Photovoltaic array systems, methods, and devices with bidirectional converter |
| US8531858B2 (en) | 2011-02-18 | 2013-09-10 | Ideal Power, Inc. | Power conversion with current sensing coupled through saturating element |
| US20140144517A1 (en) * | 2012-11-27 | 2014-05-29 | Board Of Regents, The University Of Texas System | Rail plasma actuator for high-authority flow control |
| CN103391005A (zh) * | 2013-07-24 | 2013-11-13 | 深圳市航天新源科技有限公司 | 一种功率可扩展的变结构变换器 |
| CN116633324A (zh) | 2013-11-14 | 2023-08-22 | 鹰港科技有限公司 | 高压纳秒脉冲发生器 |
| US11539352B2 (en) | 2013-11-14 | 2022-12-27 | Eagle Harbor Technologies, Inc. | Transformer resonant converter |
| US10020800B2 (en) | 2013-11-14 | 2018-07-10 | Eagle Harbor Technologies, Inc. | High voltage nanosecond pulser with variable pulse width and pulse repetition frequency |
| US10978955B2 (en) | 2014-02-28 | 2021-04-13 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
| US10892140B2 (en) | 2018-07-27 | 2021-01-12 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
| US10483089B2 (en) | 2014-02-28 | 2019-11-19 | Eagle Harbor Technologies, Inc. | High voltage resistive output stage circuit |
| US11004660B2 (en) | 2018-11-30 | 2021-05-11 | Eagle Harbor Technologies, Inc. | Variable output impedance RF generator |
| US11430635B2 (en) | 2018-07-27 | 2022-08-30 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
| EP4266579A3 (de) | 2017-02-07 | 2023-12-27 | Eagle Harbor Technologies, Inc. | Transformator-resonanzwandler |
| KR102466195B1 (ko) | 2017-08-25 | 2022-11-11 | 이글 하버 테크놀로지스, 인코포레이티드 | 나노초 펄스를 이용한 임의의 파형 발생 |
| CN109873571A (zh) * | 2017-12-04 | 2019-06-11 | 邹晓灵 | 一种通用逆变器及其控制方法 |
| US11302518B2 (en) | 2018-07-27 | 2022-04-12 | Eagle Harbor Technologies, Inc. | Efficient energy recovery in a nanosecond pulser circuit |
| US11810761B2 (en) | 2018-07-27 | 2023-11-07 | Eagle Harbor Technologies, Inc. | Nanosecond pulser ADC system |
| US11532457B2 (en) | 2018-07-27 | 2022-12-20 | Eagle Harbor Technologies, Inc. | Precise plasma control system |
| US11222767B2 (en) | 2018-07-27 | 2022-01-11 | Eagle Harbor Technologies, Inc. | Nanosecond pulser bias compensation |
| US10607814B2 (en) * | 2018-08-10 | 2020-03-31 | Eagle Harbor Technologies, Inc. | High voltage switch with isolated power |
| WO2020033931A1 (en) | 2018-08-10 | 2020-02-13 | Eagle Harbor Technologies, Inc. | Plasma sheath control for rf plasma reactors |
| US12456604B2 (en) | 2019-12-24 | 2025-10-28 | Eagle Harbor Technologies, Inc. | Nanosecond pulser RF isolation for plasma systems |
| WO2020146436A1 (en) | 2019-01-08 | 2020-07-16 | Eagle Harbor Technologies, Inc. | Efficient energy recovery in a nanosecond pulser circuit |
| CN110165896B (zh) * | 2019-04-30 | 2020-05-05 | 东南大学 | 一种基于集中式多绕组变压器的直流变压器及控制方法 |
| CN110233579A (zh) * | 2019-05-23 | 2019-09-13 | 北京动力源科技股份有限公司 | 一种并联整流拓扑结构和一种llc谐振电路 |
| TWI778449B (zh) | 2019-11-15 | 2022-09-21 | 美商鷹港科技股份有限公司 | 高電壓脈衝電路 |
| JP7285377B2 (ja) | 2019-12-24 | 2023-06-01 | イーグル ハーバー テクノロジーズ，インク． | プラズマシステム用ナノ秒パルサｒｆ絶縁 |
| JP7439302B2 (ja) | 2020-05-12 | 2024-02-27 | イーグル ハーバー テクノロジーズ，インク． | 高周波ｒｆ発生器及びｄｃパルシング |
| US11967484B2 (en) | 2020-07-09 | 2024-04-23 | Eagle Harbor Technologies, Inc. | Ion current droop compensation |
| EP3968353A1 (de) * | 2020-09-10 | 2022-03-16 | Impedans Ltd | Vorrichtung zur ionenenergieanalyse von plasmaprozessen |
| US11545943B2 (en) * | 2020-12-04 | 2023-01-03 | Mks Instruments, Inc. | Switched capacitor modulator |
| CN114285285A (zh) * | 2021-05-10 | 2022-04-05 | 华北电力大学（保定） | 一种基于t型桥及双变压器的新型宽电压增益直流变压器 |
| CN114244121A (zh) * | 2021-11-18 | 2022-03-25 | 北京动力源科技股份有限公司 | 一种dc-dc串并联拓扑结构 |
| CN114244122A (zh) * | 2021-11-24 | 2022-03-25 | 北京动力源科技股份有限公司 | 一种半桥llc恒功率宽范围变换器拓扑和电路 |
| CN114244123A (zh) * | 2021-11-24 | 2022-03-25 | 北京动力源科技股份有限公司 | 一种全桥llc恒功率宽范围变换器拓扑和电路 |
| US11824542B1 (en) | 2022-06-29 | 2023-11-21 | Eagle Harbor Technologies, Inc. | Bipolar high voltage pulser |
| WO2024073582A2 (en) | 2022-09-29 | 2024-04-04 | Eagle Harbor Technologies, Inc. | High voltage plasma control |
| CN118473224A (zh) * | 2024-04-26 | 2024-08-09 | 上海军陶科技股份有限公司 | 一种低波纹双半桥电路及其控制方法、变换方法 |
| TWI905747B (zh) * | 2024-05-09 | 2025-11-21 | 國立高雄科技大學 | 具寬輸出電壓範圍交錯式半橋相移llc諧振轉換器 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2179477B (en) * | 1985-08-23 | 1989-03-30 | Ferranti Plc | Power supply circuit |
| US4686617A (en) * | 1986-06-06 | 1987-08-11 | Rca Corporation | Current limited constant frequency dc converter |
| US4761722A (en) * | 1987-04-09 | 1988-08-02 | Rca Corporation | Switching regulator with rapid transient response |
| US5448467A (en) * | 1992-04-13 | 1995-09-05 | Ferreira; Jan A. | Electrical power converter circuit |
| US5461297A (en) * | 1993-05-24 | 1995-10-24 | Analog Modules, Inc. | Series-parallel switchable capacitor charging system |
| US5451962A (en) * | 1994-08-26 | 1995-09-19 | Martin Marietta Corporation | Boost regulated capacitor multiplier for pulse load |
| US5541827A (en) * | 1995-05-17 | 1996-07-30 | Doble Engineering Company | Reducing switching losses in a phase-modulated switch-mode amplifier |
| JP3288281B2 (ja) * | 1997-09-17 | 2002-06-04 | 株式会社三社電機製作所 | 直流電源装置 |
| US6310785B1 (en) | 1999-09-01 | 2001-10-30 | Regents Of The University Of Minnesota | Zero voltage switching DC-DC converter |
-
2001
- 2001-07-16 EP EP01202697A patent/EP1278294B9/de not_active Expired - Lifetime
- 2001-07-16 DE DE60141822T patent/DE60141822D1/de not_active Expired - Lifetime
- 2001-07-16 AT AT01202697T patent/ATE464692T1/de not_active IP Right Cessation
-
2002
- 2002-06-27 US US10/185,822 patent/US6567278B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US20030021125A1 (en) | 2003-01-30 |
| EP1278294A1 (de) | 2003-01-22 |
| US6567278B2 (en) | 2003-05-20 |
| EP1278294B9 (de) | 2010-09-01 |
| DE60141822D1 (de) | 2010-05-27 |
| EP1278294B1 (de) | 2010-04-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |