ATE465137T1 - Verfahren zur herstellung eines beschichteten artikels mit ionenbehandelter unterschicht - Google Patents

Verfahren zur herstellung eines beschichteten artikels mit ionenbehandelter unterschicht

Info

Publication number
ATE465137T1
ATE465137T1 AT05762609T AT05762609T ATE465137T1 AT E465137 T1 ATE465137 T1 AT E465137T1 AT 05762609 T AT05762609 T AT 05762609T AT 05762609 T AT05762609 T AT 05762609T AT E465137 T1 ATE465137 T1 AT E465137T1
Authority
AT
Austria
Prior art keywords
coated article
ion
producing
ion beam
back layer
Prior art date
Application number
AT05762609T
Other languages
English (en)
Inventor
Vijayen Veerasamy
Original Assignee
Guardian Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34981127&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE465137(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Guardian Industries filed Critical Guardian Industries
Application granted granted Critical
Publication of ATE465137T1 publication Critical patent/ATE465137T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0055—Other surface treatment of glass not in the form of fibres or filaments by irradiation by ion implantation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/326—Nitriding
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31—Surface property or characteristic of web, sheet or block
    • Y10T428/315—Surface modified glass [e.g., tempered, strengthened, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
AT05762609T 2004-06-25 2005-06-22 Verfahren zur herstellung eines beschichteten artikels mit ionenbehandelter unterschicht ATE465137T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/875,497 US7550067B2 (en) 2004-06-25 2004-06-25 Coated article with ion treated underlayer and corresponding method
PCT/US2005/022198 WO2006012185A1 (en) 2004-06-25 2005-06-22 Coated article with ion treated underlayer and corresponding method

Publications (1)

Publication Number Publication Date
ATE465137T1 true ATE465137T1 (de) 2010-05-15

Family

ID=34981127

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05762609T ATE465137T1 (de) 2004-06-25 2005-06-22 Verfahren zur herstellung eines beschichteten artikels mit ionenbehandelter unterschicht

Country Status (8)

Country Link
US (2) US7550067B2 (de)
EP (1) EP1758829B1 (de)
AT (1) ATE465137T1 (de)
CA (1) CA2567048C (de)
DE (1) DE602005020784D1 (de)
ES (1) ES2344851T3 (de)
PL (1) PL1758829T3 (de)
WO (1) WO2006012185A1 (de)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7311975B2 (en) 2004-06-25 2007-12-25 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method
US7563347B2 (en) 2004-06-25 2009-07-21 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus
US7550067B2 (en) * 2004-06-25 2009-06-23 Guardian Industries Corp. Coated article with ion treated underlayer and corresponding method
CA2608172C (en) 2005-05-12 2014-01-14 Agc Flat Glass North America, Inc. Low emissivity coating with low solar heat gain coefficient, enhanced chemical and mechanical properties and method of making the same
US7964238B2 (en) * 2007-01-29 2011-06-21 Guardian Industries Corp. Method of making coated article including ion beam treatment of metal oxide protective film
US7901781B2 (en) 2007-11-23 2011-03-08 Agc Flat Glass North America, Inc. Low emissivity coating with low solar heat gain coefficient, enhanced chemical and mechanical properties and method of making the same
FR2933394B1 (fr) * 2008-07-03 2011-04-01 Saint Gobain Procede de depot de couche mince et produit obtenu
US10586689B2 (en) 2009-07-31 2020-03-10 Guardian Europe S.A.R.L. Sputtering apparatus including cathode with rotatable targets, and related methods
US20110127628A1 (en) * 2009-11-30 2011-06-02 Aptina Imaging Corporation Ion implantation to change the optical properties of the passivation films in cmos imager devices
US10000965B2 (en) 2010-01-16 2018-06-19 Cardinal Cg Company Insulating glass unit transparent conductive coating technology
US8658262B2 (en) 2010-01-16 2014-02-25 Cardinal Cg Company High quality emission control coatings, emission control glazings, and production methods
US11155493B2 (en) 2010-01-16 2021-10-26 Cardinal Cg Company Alloy oxide overcoat indium tin oxide coatings, coated glazings, and production methods
US10000411B2 (en) 2010-01-16 2018-06-19 Cardinal Cg Company Insulating glass unit transparent conductivity and low emissivity coating technology
US10060180B2 (en) 2010-01-16 2018-08-28 Cardinal Cg Company Flash-treated indium tin oxide coatings, production methods, and insulating glass unit transparent conductive coating technology
US9862640B2 (en) 2010-01-16 2018-01-09 Cardinal Cg Company Tin oxide overcoat indium tin oxide coatings, coated glazings, and production methods
US8541792B2 (en) 2010-10-15 2013-09-24 Guardian Industries Corp. Method of treating the surface of a soda lime silica glass substrate, surface-treated glass substrate, and device incorporating the same
US20120137971A1 (en) * 2010-12-03 2012-06-07 Vanrian Semiconductor Equipment Associates, Inc. Hydrophobic property alteration using ion implantation
US8559100B2 (en) 2011-10-12 2013-10-15 Guardian Industries Corp. Coated article with low-E coating having absorbing layer over functional layer designed to increase outside reflectance
US8592328B2 (en) 2012-01-20 2013-11-26 Novellus Systems, Inc. Method for depositing a chlorine-free conformal sin film
US9038419B2 (en) 2012-06-08 2015-05-26 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Method of making heat treated coated article using carbon based coating and protective film
KR102047017B1 (ko) * 2012-10-03 2019-11-20 코닝 인코포레이티드 표면-개질 유리 기판
US9434640B2 (en) 2012-12-04 2016-09-06 Guardian Industries Corp. Method of making heat treated coated article with carbon based coating and protective film
US9499899B2 (en) 2013-03-13 2016-11-22 Intermolecular, Inc. Systems, methods, and apparatus for production coatings of low-emissivity glass including a ternary alloy
US9110230B2 (en) 2013-05-07 2015-08-18 Corning Incorporated Scratch-resistant articles with retained optical properties
CN103265182A (zh) * 2013-06-07 2013-08-28 林嘉佑 一种低辐射Low-E玻璃的制造方法
CN105336783A (zh) * 2014-08-12 2016-02-17 联华电子股份有限公司 Mos晶体管及用以形成外延结构的半导体制作工艺
US9214333B1 (en) * 2014-09-24 2015-12-15 Lam Research Corporation Methods and apparatuses for uniform reduction of the in-feature wet etch rate of a silicon nitride film formed by ALD
US9589790B2 (en) 2014-11-24 2017-03-07 Lam Research Corporation Method of depositing ammonia free and chlorine free conformal silicon nitride film
US9564312B2 (en) 2014-11-24 2017-02-07 Lam Research Corporation Selective inhibition in atomic layer deposition of silicon-containing films
US9502238B2 (en) 2015-04-03 2016-11-22 Lam Research Corporation Deposition of conformal films by atomic layer deposition and atomic layer etch
US9850570B2 (en) * 2015-07-06 2017-12-26 Intevac, Inc. Ion implantation for modification of thin film coatings on glass
US9601693B1 (en) 2015-09-24 2017-03-21 Lam Research Corporation Method for encapsulating a chalcogenide material
US10629435B2 (en) 2016-07-29 2020-04-21 Lam Research Corporation Doped ALD films for semiconductor patterning applications
US10074543B2 (en) 2016-08-31 2018-09-11 Lam Research Corporation High dry etch rate materials for semiconductor patterning applications
US9865455B1 (en) 2016-09-07 2018-01-09 Lam Research Corporation Nitride film formed by plasma-enhanced and thermal atomic layer deposition process
US10454029B2 (en) 2016-11-11 2019-10-22 Lam Research Corporation Method for reducing the wet etch rate of a sin film without damaging the underlying substrate
US10832908B2 (en) 2016-11-11 2020-11-10 Lam Research Corporation Self-aligned multi-patterning process flow with ALD gapfill spacer mask
US10134579B2 (en) 2016-11-14 2018-11-20 Lam Research Corporation Method for high modulus ALD SiO2 spacer
KR102505252B1 (ko) * 2016-12-30 2023-03-03 코닝 인코포레이티드 잔류 압축 응력을 갖는 광학 코팅(optical coating)이 있는 코팅된 제품
FR3065211A1 (fr) * 2017-04-12 2018-10-19 Saint-Gobain Glass France Vitrage reflechissant comprenant une couche mince de nitrure de silicium riche en silicium
US10269559B2 (en) 2017-09-13 2019-04-23 Lam Research Corporation Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer
TWI821234B (zh) 2018-01-09 2023-11-11 美商康寧公司 具光改變特徵之塗覆製品及用於製造彼等之方法
US11404275B2 (en) 2018-03-02 2022-08-02 Lam Research Corporation Selective deposition using hydrolysis
US11028012B2 (en) 2018-10-31 2021-06-08 Cardinal Cg Company Low solar heat gain coatings, laminated glass assemblies, and methods of producing same
US11885009B2 (en) 2019-02-12 2024-01-30 Uchicago Argonne, Llc Method of making thin films
WO2020247977A1 (en) 2019-06-04 2020-12-10 Lam Research Corporation Polymerization protective liner for reactive ion etch in patterning
WO2021025874A1 (en) 2019-08-06 2021-02-11 Lam Research Corporation Thermal atomic layer deposition of silicon-containing films
US12386101B2 (en) 2020-07-09 2025-08-12 Corning Incorporated Textured region of a substrate to reduce specular reflectance incorporating surface features with an elliptical perimeter or segments thereof, and method of making the same
CN115803474A (zh) 2020-07-23 2023-03-14 朗姆研究公司 具有受控膜性质和高沉积速率的保形热cvd
KR20230043795A (ko) 2020-07-28 2023-03-31 램 리써치 코포레이션 실리콘-함유 막들의 불순물 감소
WO2023283144A1 (en) 2021-07-09 2023-01-12 Lam Research Corporation Plasma enhanced atomic layer deposition of silicon-containing films
CN116180075B (zh) * 2023-02-17 2024-02-23 西南交通大学 一种低应力强结合高温绝缘涂层的制备方法

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3549411A (en) * 1967-06-27 1970-12-22 Texas Instruments Inc Method of preparing silicon nitride films
US4737379A (en) * 1982-09-24 1988-04-12 Energy Conversion Devices, Inc. Plasma deposited coatings, and low temperature plasma method of making same
US5015353A (en) 1987-09-30 1991-05-14 The United States Of America As Represented By The Secretary Of The Navy Method for producing substoichiometric silicon nitride of preselected proportions
US4851095A (en) 1988-02-08 1989-07-25 Optical Coating Laboratory, Inc. Magnetron sputtering apparatus and process
US5268217A (en) * 1990-09-27 1993-12-07 Diamonex, Incorporated Abrasion wear resistant coated substrate product
US5344718A (en) 1992-04-30 1994-09-06 Guardian Industries Corp. High performance, durable, low-E glass
FR2695117B1 (fr) 1992-08-28 1994-12-02 Saint Gobain Vitrage Int Procédé de traitement de couches minces à propriétés de conduction électrique et/ou de réflexion dans l'infra-rouge.
FR2699164B1 (fr) 1992-12-11 1995-02-24 Saint Gobain Vitrage Int Procédé de traitement de couches minces à base d'oxyde ou de nitrure métallique.
DE69431573T2 (de) 1993-07-28 2003-06-12 Asahi Glass Co., Ltd. Verfahren zur Herstellung von Schichten
US5514476A (en) 1994-12-15 1996-05-07 Guardian Industries Corp. Low-E glass coating system and insulating glass units made therefrom
JP3299451B2 (ja) * 1996-09-30 2002-07-08 新日本製鐵株式会社 竪型電解装置
US6495251B1 (en) 1997-06-20 2002-12-17 Ppg Industries Ohio, Inc. Silicon oxynitride protective coatings
FR2766174B1 (fr) 1997-07-21 1999-08-20 Saint Gobain Vitrage Substrat transparent revetu d'au moins une couche mince
US5968611A (en) * 1997-11-26 1999-10-19 The Research Foundation Of State University Of New York Silicon nitrogen-based films and method of making the same
US6350397B1 (en) * 1999-03-10 2002-02-26 Aspen Research Corporation Optical member with layer having a coating geometry and composition that enhance cleaning properties
US6461731B1 (en) 1999-05-03 2002-10-08 Guardian Industries Corp. Solar management coating system including protective DLC
US6338901B1 (en) 1999-05-03 2002-01-15 Guardian Industries Corporation Hydrophobic coating including DLC on substrate
US6303225B1 (en) 2000-05-24 2001-10-16 Guardian Industries Corporation Hydrophilic coating including DLC on substrate
US6261693B1 (en) 1999-05-03 2001-07-17 Guardian Industries Corporation Highly tetrahedral amorphous carbon coating on glass
US6447891B1 (en) 1999-05-03 2002-09-10 Guardian Industries Corp. Low-E coating system including protective DLC
TW442672B (en) 1999-11-25 2001-06-23 Nat Science Council The technique for deposition multilayer interference thin films by using only one coating material (pure silicon)
US6660340B1 (en) 2000-02-08 2003-12-09 Epion Corporation Diamond-like carbon film with enhanced adhesion
WO2001066483A1 (en) 2000-03-06 2001-09-13 Guardian Industries, Inc. Low-emissivity glass coatings having a layer of nitrided nichrome and methods of making same
US6576349B2 (en) 2000-07-10 2003-06-10 Guardian Industries Corp. Heat treatable low-E coated articles and methods of making same
US6359388B1 (en) 2000-08-28 2002-03-19 Guardian Industries Corp. Cold cathode ion beam deposition apparatus with segregated gas flow
US6665033B2 (en) 2000-11-30 2003-12-16 International Business Machines Corporation Method for forming alignment layer by ion beam surface modification
US6596399B2 (en) 2000-12-04 2003-07-22 Guardian Industries Corp. UV absorbing/reflecting silver oxide layer, and method of making same
JP4072321B2 (ja) 2001-02-02 2008-04-09 株式会社日立グローバルストレージテクノロジーズ 磁気記録媒体およびその製造方法、これを用いた磁気記録装置
US6602371B2 (en) 2001-02-27 2003-08-05 Guardian Industries Corp. Method of making a curved vehicle windshield
US6667121B2 (en) 2001-05-17 2003-12-23 Guardian Industries Corp. Heat treatable coated article with anti-migration barrier between dielectric and solar control layer portion, and methods of making same
US6627317B2 (en) 2001-05-17 2003-09-30 Guardian Industries Corp. Heat treatable coated articles with anti-migration barrier layer between dielectric and solar control layers, and methods of making same
US6689476B2 (en) 2001-06-27 2004-02-10 Guardian Industries Corp. Hydrophobic coating including oxide of Ni and/or Cr
EP1273558A1 (de) 2001-07-02 2003-01-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung eines wärmereflektierenden Schichtsystems für transparente Substrate und danach hergestelltes Schichtsystem
JP2003127056A (ja) * 2001-08-16 2003-05-08 Seiko Instruments Inc 端面研磨装置及び研磨方法
US6936347B2 (en) 2001-10-17 2005-08-30 Guardian Industries Corp. Coated article with high visible transmission and low emissivity
US6589658B1 (en) 2001-11-29 2003-07-08 Guardian Industries Corp. Coated article with anti-reflective layer(s) system
US6878403B2 (en) 2002-10-04 2005-04-12 Guardian Industries Corp. Method of ion beam treatment of DLC in order to reduce contact angle
US6878405B2 (en) 2002-10-04 2005-04-12 Guardian Industries Corp. Method of treating DLC on substrate with oxygen and/or hot water
TWI370700B (en) * 2003-03-31 2012-08-11 Dainippon Printing Co Ltd Protective coat and method for manufacturing thereof
US7550067B2 (en) 2004-06-25 2009-06-23 Guardian Industries Corp. Coated article with ion treated underlayer and corresponding method

Also Published As

Publication number Publication date
CA2567048A1 (en) 2006-02-02
US7550067B2 (en) 2009-06-23
EP1758829A1 (de) 2007-03-07
CA2567048C (en) 2010-12-07
PL1758829T3 (pl) 2010-09-30
US20090226714A1 (en) 2009-09-10
US8147972B2 (en) 2012-04-03
EP1758829B1 (de) 2010-04-21
ES2344851T3 (es) 2010-09-08
WO2006012185A1 (en) 2006-02-02
US20050287309A1 (en) 2005-12-29
DE602005020784D1 (de) 2010-06-02

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