ATE465402T1 - Streumesser und verfahren zur beobachtung einer oberfläche - Google Patents

Streumesser und verfahren zur beobachtung einer oberfläche

Info

Publication number
ATE465402T1
ATE465402T1 AT04712130T AT04712130T ATE465402T1 AT E465402 T1 ATE465402 T1 AT E465402T1 AT 04712130 T AT04712130 T AT 04712130T AT 04712130 T AT04712130 T AT 04712130T AT E465402 T1 ATE465402 T1 AT E465402T1
Authority
AT
Austria
Prior art keywords
sample
screen
light beam
incident light
observing
Prior art date
Application number
AT04712130T
Other languages
English (en)
Inventor
Sipke Wadman
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE465402T1 publication Critical patent/ATE465402T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Mathematical Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
AT04712130T 2003-02-28 2004-02-18 Streumesser und verfahren zur beobachtung einer oberfläche ATE465402T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03100512 2003-02-28
PCT/IB2004/050123 WO2004077032A1 (en) 2003-02-28 2004-02-18 A scatterometer and a method for observing a surface

Publications (1)

Publication Number Publication Date
ATE465402T1 true ATE465402T1 (de) 2010-05-15

Family

ID=32921622

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04712130T ATE465402T1 (de) 2003-02-28 2004-02-18 Streumesser und verfahren zur beobachtung einer oberfläche

Country Status (7)

Country Link
US (1) US7349096B2 (de)
EP (1) EP1611430B1 (de)
JP (1) JP4639179B2 (de)
CN (1) CN100567960C (de)
AT (1) ATE465402T1 (de)
DE (1) DE602004026705D1 (de)
WO (1) WO2004077032A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101311184B1 (ko) * 2005-08-15 2013-09-26 코닌클리케 필립스 일렉트로닉스 엔.브이. 산란 측정기를 위한 듀얼 빔 장치
KR20080090452A (ko) 2005-12-23 2008-10-08 코닌클리케 필립스 일렉트로닉스 엔.브이. 광학적 측정 장치
EP2010891A1 (de) 2006-04-18 2009-01-07 Koninklijke Philips Electronics N.V. Optische messvorrichtung
WO2007119202A1 (en) * 2006-04-18 2007-10-25 Koninklijke Philips Electronics N.V. Optical measurement device
US8077319B2 (en) 2006-10-05 2011-12-13 Koninklijke Philips Electronics N.V. Apparatus and a method for observing the surface of a sample
CN101977551B (zh) * 2008-03-18 2013-03-13 皇家飞利浦电子股份有限公司 用于皮肤成像的仪器、用于皮肤分析的系统
FI125320B (en) * 2012-01-05 2015-08-31 Helmee Imaging Oy ORGANIZATION AND SIMILAR METHOD FOR OPTICAL MEASUREMENTS
JP2014044157A (ja) * 2012-08-28 2014-03-13 Ricoh Co Ltd 光学センサ及び画像形成装置
US12153227B2 (en) 2018-03-12 2024-11-26 The University Of North Carolina At Chapel Hill Light disc microscopy for fluorescence microscopes
CN112020641B (zh) * 2018-03-12 2024-04-16 查珀尔希尔北卡罗来纳大学 用于增加收集的镜像显微术
CN112005100B (zh) 2018-03-12 2024-09-20 查珀尔希尔北卡罗来纳大学 用于荧光显微镜的光盘显微术

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3111274A (en) 1963-11-19 Cover for photoflash gun attachment
GB470755A (en) 1937-01-25 1937-08-23 Alchanan Cohen Improvements in lighting accessories for photographic purposes and the like
US4344709A (en) 1980-05-08 1982-08-17 Scm Corporation Method and apparatus for photogoniometric analysis of surfaces
JPS5979841A (ja) * 1982-10-29 1984-05-09 Shimadzu Corp 絶対反射率測定装置
SU1117496A1 (ru) 1983-05-20 1984-10-07 Предприятие П/Я Г-4671 Способ измерени коэффициентов рассе ни объектов
DE3731171A1 (de) 1987-09-17 1989-03-30 Gerd Prof Selbach Schartigkeitsmessgeraet
US5241369A (en) 1990-10-01 1993-08-31 Mcneil John R Two-dimensional optical scatterometer apparatus and process
JPH0676929U (ja) * 1993-03-31 1994-10-28 カシオ計算機株式会社 高分子分散型液晶表示素子の製造装置
US5745234A (en) * 1995-07-31 1998-04-28 The United States Of America As Represented By The Secretary Of The Navy Variable angle reflectometer employing an integrating sphere and a light concentrator
US5912741A (en) * 1997-10-10 1999-06-15 Northrop Grumman Corporation Imaging scatterometer
US6424413B1 (en) 1998-06-12 2002-07-23 Gretagmacbeth Llc Multi-channel integrating sphere
US5943127A (en) 1998-11-09 1999-08-24 General Electric Company Coined line analyzer
EP1058834A1 (de) * 1998-12-21 2000-12-13 Koninklijke Philips Electronics N.V. Streulichtmessgerät
DE19920184C2 (de) 1999-05-03 2001-06-07 Optosens Optische Spektroskopi Verfahren für die gleichzeitige Erfassung von diffuser und specularer Reflexion von Proben, insbesondere undurchsichtiger Proben, sowie Reflektanz-Meßsonde

Also Published As

Publication number Publication date
JP4639179B2 (ja) 2011-02-23
WO2004077032A1 (en) 2004-09-10
CN100567960C (zh) 2009-12-09
JP2006519379A (ja) 2006-08-24
US7349096B2 (en) 2008-03-25
US20060146343A1 (en) 2006-07-06
DE602004026705D1 (de) 2010-06-02
EP1611430A1 (de) 2006-01-04
EP1611430B1 (de) 2010-04-21
CN1754094A (zh) 2006-03-29

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