ATE465441T1 - Positionierungseinrichtung, einrichtung und verfahren zum ausgleich der schwerkraft - Google Patents

Positionierungseinrichtung, einrichtung und verfahren zum ausgleich der schwerkraft

Info

Publication number
ATE465441T1
ATE465441T1 AT04744678T AT04744678T ATE465441T1 AT E465441 T1 ATE465441 T1 AT E465441T1 AT 04744678 T AT04744678 T AT 04744678T AT 04744678 T AT04744678 T AT 04744678T AT E465441 T1 ATE465441 T1 AT E465441T1
Authority
AT
Austria
Prior art keywords
gravity compensation
controller
actuator
controlled device
positioning apparatus
Prior art date
Application number
AT04744678T
Other languages
English (en)
Inventor
Bernard Stommen
Robertus Tousain
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE465441T1 publication Critical patent/ATE465441T1/de

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/40—Robotics, robotics mapping to robotics vision
    • G05B2219/40255—End effector attached to cable for gravity balance suspension
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41114—Compensation for gravity, counter balance gravity

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
  • Automatic Control Of Machine Tools (AREA)
  • Paper (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Vehicle Body Suspensions (AREA)
AT04744678T 2003-08-07 2004-07-29 Positionierungseinrichtung, einrichtung und verfahren zum ausgleich der schwerkraft ATE465441T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03102466 2003-08-07
PCT/IB2004/051325 WO2005015334A1 (en) 2003-08-07 2004-07-29 Positioning apparatus, gravity compensation device and method for compensating gravitational forces

Publications (1)

Publication Number Publication Date
ATE465441T1 true ATE465441T1 (de) 2010-05-15

Family

ID=34130289

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04744678T ATE465441T1 (de) 2003-08-07 2004-07-29 Positionierungseinrichtung, einrichtung und verfahren zum ausgleich der schwerkraft

Country Status (7)

Country Link
US (1) US7551970B2 (de)
EP (1) EP1654604B1 (de)
JP (1) JP2007501972A (de)
CN (1) CN100565408C (de)
AT (1) ATE465441T1 (de)
DE (1) DE602004026736D1 (de)
WO (1) WO2005015334A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5517431B2 (ja) * 2008-09-29 2014-06-11 キヤノン株式会社 光学装置および撮像装置
US20100188034A1 (en) * 2009-01-23 2010-07-29 Derek Young Trainable Robot and Method of Training
DE102011006992A1 (de) * 2011-04-07 2013-05-08 Kuka Roboter Gmbh Verfahren und Handhabungssystem zum automatisierten Bewegen eines schwerkraftkompensierten Lastkörpers
DE102013022533B3 (de) 2013-06-28 2019-07-11 Ferrobotics Compliant Robot Technology Gmbh Verfahren zum robotergestützten Stapeln von Gegenständen
DE102013106819B4 (de) * 2013-06-28 2018-07-12 Ferrobotics Compliant Robot Technology Gmbh Verfahren zum robotergestützten Stapeln von Gegenständen
JP6387113B2 (ja) * 2014-12-25 2018-09-05 川崎重工業株式会社 自動物体搬送システム
CN114650751B (zh) 2019-10-28 2024-04-12 爱格升公司 用于提升力估计的系统和方法
CN114995525B (zh) * 2022-08-01 2022-12-13 上海隐冠半导体技术有限公司 运动台及蓄能状态调整方法
DE102023113815B3 (de) * 2023-05-25 2024-08-22 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren zum Steuern einer Robotereinrichtung

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3827333A (en) * 1973-06-29 1974-08-06 Ingersoll Milling Machine Co Gravity sag compensation system
US4591772A (en) * 1984-12-12 1986-05-27 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Load positioning system with gravity compensation
EP0211374B1 (de) * 1985-08-09 1989-04-26 Siemens Aktiengesellschaft Einrichtung zum Kompensieren des Schwerkrafteinflusses auf ein elektromotorisch heb- und senkbares Element einer Werkzeugmaschine oder eines Roboters und Verfahren zum Betrieb einer derartigen Einrichtung
US5136227A (en) 1985-09-10 1992-08-04 Agency Of Industrial Science & Technology, Ministry Of International Trade & Industry Active gravity compensation device for force control system
JPS63168709A (ja) * 1987-01-06 1988-07-12 Fujitsu Ltd 電動機駆動制御回路
JPS63243544A (ja) * 1987-03-27 1988-10-11 Nkk Corp 動吸振器の制御装置
DE3823042A1 (de) * 1988-07-07 1990-01-11 Zeiss Carl Fa Koordinatenmessgeraet
US5040613A (en) * 1990-04-27 1991-08-20 Sukup Manufacturing Company Counterbalanced sensing wand assembly
US5138800A (en) * 1991-04-30 1992-08-18 Compustrip Systems Ltd. Positioning apparatus for supporting and guiding a tool
JPH07115056A (ja) * 1993-10-15 1995-05-02 Canon Inc 縦型基板ステージ装置
EP0869340A3 (de) * 1994-03-07 1998-11-25 Kabushiki Kaisha Toshiba Vorrichtung zur Unterstützung und linearen Fortbewegung eines Stellgliedes
US7365513B1 (en) * 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
JPH07295649A (ja) * 1994-04-25 1995-11-10 Canon Inc ステージ制御装置
US5425237A (en) * 1994-05-13 1995-06-20 Cincinnati Milacron Inc. Counterbalance system
JP2964915B2 (ja) * 1995-04-28 1999-10-18 日本ビクター株式会社 レンズ駆動制御装置
TW318255B (de) * 1995-05-30 1997-10-21 Philips Electronics Nv
TW316874B (de) * 1995-05-30 1997-10-01 Philips Electronics Nv
US5812420A (en) * 1995-09-05 1998-09-22 Nikon Corporation Vibration-preventive apparatus and exposure apparatus
US5767648A (en) * 1996-04-19 1998-06-16 Massachusetts Institute Of Technology Base force/torque sensor apparatus for the precise control of manipulators with joint friction and a method of use thereof
JPH10141942A (ja) * 1996-11-08 1998-05-29 Ricoh Co Ltd 形状測定装置
JP3907252B2 (ja) * 1996-12-05 2007-04-18 キヤノン株式会社 露光装置およびデバイス製造方法ならびにステージ装置および原点出し方法
US6012216A (en) * 1997-04-30 2000-01-11 Ethicon, Inc. Stand alone swage apparatus
JPH11297613A (ja) * 1998-04-09 1999-10-29 Canon Inc ステージ装置およびこれを用いた露光装置ならびにデバイス製造方法
US6355994B1 (en) * 1999-11-05 2002-03-12 Multibeam Systems, Inc. Precision stage
JP2001322045A (ja) * 2000-05-12 2001-11-20 Canon Inc ステージ制御装置
JP2003084087A (ja) * 2001-09-17 2003-03-19 Ricoh Co Ltd 縦型ステージの自重補償装置
EP1321822A1 (de) * 2001-12-21 2003-06-25 ASML Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
ITBO20020012A1 (it) * 2002-01-11 2003-07-11 Consiglio Nazionale Ricerche Apparecchiatura per il rilevamento di radiazioni elettromagnetiche , in particolare per applicazioni radioastronomiche

Also Published As

Publication number Publication date
DE602004026736D1 (de) 2010-06-02
CN100565408C (zh) 2009-12-02
WO2005015334A1 (en) 2005-02-17
JP2007501972A (ja) 2007-02-01
CN1833208A (zh) 2006-09-13
US7551970B2 (en) 2009-06-23
EP1654604A1 (de) 2006-05-10
EP1654604B1 (de) 2010-04-21
US20060259165A1 (en) 2006-11-16

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties