ATE465798T1 - Gasbeseitigung - Google Patents

Gasbeseitigung

Info

Publication number
ATE465798T1
ATE465798T1 AT05768057T AT05768057T ATE465798T1 AT E465798 T1 ATE465798 T1 AT E465798T1 AT 05768057 T AT05768057 T AT 05768057T AT 05768057 T AT05768057 T AT 05768057T AT E465798 T1 ATE465798 T1 AT E465798T1
Authority
AT
Austria
Prior art keywords
effluent stream
combustion chamber
nozzle
effluent
stream
Prior art date
Application number
AT05768057T
Other languages
English (en)
Inventor
Gareth Stanton
Andrew James Seeley
James Robert Smith
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Application granted granted Critical
Publication of ATE465798T1 publication Critical patent/ATE465798T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/30—Controlling by gas-analysis apparatus
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B01D2257/2047—Hydrofluoric acid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Glass Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Gas Separation By Absorption (AREA)
AT05768057T 2004-08-04 2005-08-02 Gasbeseitigung ATE465798T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0417378.7A GB0417378D0 (en) 2004-08-04 2004-08-04 Gas abatement
PCT/GB2005/003033 WO2006013355A1 (en) 2004-08-04 2005-08-02 Gas abatement

Publications (1)

Publication Number Publication Date
ATE465798T1 true ATE465798T1 (de) 2010-05-15

Family

ID=32982521

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05768057T ATE465798T1 (de) 2004-08-04 2005-08-02 Gasbeseitigung

Country Status (10)

Country Link
US (1) US7494633B2 (de)
EP (1) EP1773474B1 (de)
JP (1) JP4885855B2 (de)
KR (1) KR101133812B1 (de)
CN (1) CN100548445C (de)
AT (1) ATE465798T1 (de)
DE (1) DE602005020938D1 (de)
GB (1) GB0417378D0 (de)
TW (1) TWI368534B (de)
WO (1) WO2006013355A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0706544D0 (en) 2007-04-04 2007-05-09 Boc Group Plc Combustive destruction of noxious substances
JP5660888B2 (ja) * 2007-05-25 2015-01-28 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 除害システムの効率的な運転のための方法及び装置
CN101835521A (zh) * 2007-10-26 2010-09-15 应用材料公司 利用改进燃料线路的用于智能减废的方法与设备
JP5659491B2 (ja) * 2009-01-30 2015-01-28 セントラル硝子株式会社 フッ素ガス発生装置を含む半導体製造設備
GB0902221D0 (en) * 2009-02-11 2009-03-25 Edwards Ltd Pilot
GB201106314D0 (en) * 2011-04-14 2011-06-01 Edwards Ltd Plasma torch
GB2504468B (en) * 2012-07-27 2017-03-22 Edwards Ltd Burner Nozzle Reciprocating Scraper Arrangement for Reducing Effluent Gas Deposits
GB2515017B (en) * 2013-06-10 2017-09-20 Edwards Ltd Process gas abatement
GB2516267B (en) * 2013-07-17 2016-08-17 Edwards Ltd Head assembly
US9259683B2 (en) 2014-01-22 2016-02-16 Micron Technology, Inc. Methods and apparatus for treating fluorinated greenhouse gases in gas streams
US10161628B2 (en) * 2014-03-14 2018-12-25 Edwards Limited Radiant burner
GB2540544B (en) * 2015-07-20 2020-04-15 Edwards Ltd Inlet assembly
CN110461437B (zh) * 2017-01-06 2022-09-13 阿尔泽塔公司 用于改善废气消减的系统和方法
JP7252718B2 (ja) * 2018-06-14 2023-04-05 エドワーズ株式会社 除害装置、及びインレットノズル
GB2579197B (en) * 2018-11-22 2021-06-09 Edwards Ltd Abatement method
GB2588775A (en) * 2019-11-05 2021-05-12 Edwards Ltd Optimising operating conditions in an abatement apparatus
GB2588906A (en) 2019-11-13 2021-05-19 Edwards Ltd Gas purged valve
GB2630723A (en) 2020-10-07 2024-12-04 Edwards Ltd Burner Liner
GB2600691A (en) 2020-11-02 2022-05-11 Edwards Ltd Plasma abatement
GB2605447A (en) 2021-04-01 2022-10-05 Edwards Ltd Plasma torch device component monitoring
GB2605448A (en) 2021-04-01 2022-10-05 Edwards Ltd Plasma torch device component monitoring
GB2608817A (en) * 2021-07-13 2023-01-18 Edwards Ltd Modular abatement apparatus
GB2629623B (en) 2023-05-04 2025-07-30 Edwards Ltd Plasma foreline

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES373703A1 (es) * 1968-11-27 1972-02-01 Sulzer Ag Mejoras introducidas en los mecheros de mufla, con chorro de remolino, con una alimentacion de aceite yno gas central.
JPH02126014A (ja) * 1988-07-29 1990-05-15 Chiyoda Corp 有毒性ガスの燃焼処理方法及び装置
JPH0277433A (ja) * 1988-09-14 1990-03-16 Nissan Motor Co Ltd 硬質保護膜を有する着色樹脂成形体
JPH0344993Y2 (de) * 1988-11-21 1991-09-24
US5123364A (en) * 1989-11-08 1992-06-23 American Combustion, Inc. Method and apparatus for co-processing hazardous wastes
US5510093A (en) * 1994-07-25 1996-04-23 Alzeta Corporation Combustive destruction of halogenated compounds
DE19539246A1 (de) * 1995-10-21 1997-04-24 Asea Brown Boveri Airblast-Zerstäuberdüse
GB9608061D0 (en) * 1996-04-16 1996-06-19 Boc Group Plc Removal of noxious substances from gas streams
JPH10110926A (ja) * 1996-08-14 1998-04-28 Nippon Sanso Kk 燃焼式除害装置
TW342436B (en) * 1996-08-14 1998-10-11 Nippon Oxygen Co Ltd Combustion type harm removal apparatus (1)
JP4066107B2 (ja) * 1997-11-21 2008-03-26 株式会社荏原製作所 排ガス処理用燃焼器
US6261524B1 (en) * 1999-01-12 2001-07-17 Advanced Technology Materials, Inc. Advanced apparatus for abatement of gaseous pollutants
US6126438A (en) * 1999-06-23 2000-10-03 American Air Liquide Preheated fuel and oxidant combustion burner
AU1451901A (en) * 1999-11-01 2001-05-14 James D. Getty Modular chemical abatement system and method for semiconductor manufacturing
AT408437B (de) * 2000-02-22 2001-11-26 Holderbank Financ Glarus Einrichtung zum zerstäuben von flüssigen schmelzen
GB0005231D0 (en) * 2000-03-03 2000-04-26 Boc Group Plc Abatement of semiconductor processing gases
JP4535558B2 (ja) * 2000-03-31 2010-09-01 大陽日酸株式会社 燃焼式排ガス処理装置
GB0026697D0 (en) * 2000-11-01 2000-12-20 Boc Group Plc Removal of noxious substances from gas streams
DE50105033D1 (de) 2001-08-30 2005-02-10 Das Duennschicht Anlagen Sys Verfahren und Einrichtung zur Reinigung insbesondere von fluorhaltigen Abgasen in einem Brenner mit räumlicher Trennung der Einspeisung von Gasen
US6910431B2 (en) 2002-12-30 2005-06-28 The Boc Group, Inc. Burner-lance and combustion method for heating surfaces susceptible to oxidation or reduction

Also Published As

Publication number Publication date
WO2006013355A1 (en) 2006-02-09
EP1773474B1 (de) 2010-04-28
DE602005020938D1 (de) 2010-06-10
US7494633B2 (en) 2009-02-24
GB0417378D0 (en) 2004-09-08
TWI368534B (en) 2012-07-21
TW200628214A (en) 2006-08-16
EP1773474A1 (de) 2007-04-18
CN100548445C (zh) 2009-10-14
JP4885855B2 (ja) 2012-02-29
CN1993170A (zh) 2007-07-04
JP2008509371A (ja) 2008-03-27
KR20070038139A (ko) 2007-04-09
KR101133812B1 (ko) 2012-04-20
US20070217983A1 (en) 2007-09-20

Similar Documents

Publication Publication Date Title
DE602005020938D1 (de) Gasbeseitigung
DE60311490D1 (de) Flüssigkeitsgekühltes brennstoffeinspritzventil und methode zum betrieb eines flüssigkeitsgekühlten brennstoffeinspritzventils
TW200613686A (en) Oxidant injection method
NO20090359L (no) Oksygeninjiseringsmetode
MX2008015177A (es) Metodo y aparato para reducir emisiones en motores diesel.
DE50312078D1 (de) Verfahren und einspritzdüse zum durchsetzen einer gasströmung mit flüssigkeitströpfchen
MX2009013347A (es) Proceso para la combustion de combustibles liquidos con poder calorifico inferior de alta viscosidad.
WO2006034130A3 (en) Apparatus and process for surface treatment of substrate using an activated reactive gas
UA106387C2 (ru) Камера сгорания для поэтапного изменения подачи топлива и узел, который содержит камеру сгорания
WO2001055470A3 (en) Modified low temperature case hardening processes
MXPA06000309A (es) Aparato y metodo de depuracion humeda para controlar emisiones de nox.
WO2006115880A3 (en) Combustion method and apparatus
MX2009006925A (es) Metodo y dispositivo de tratamiento de liquido.
ATE483898T1 (de) Fluiddosiervorrichtung
WO2009028909A3 (en) Tuyere for manufacturing molten iron and method for injecting gas using the same
WO2006124688A3 (en) Arc plasma jet and method of use for chemical scrubbing system
ATE485480T1 (de) Verfahren und vorrichtung zur sauerstoffanreicherung in brennstoff fördernden gasen
MY183535A (en) Fluid treatment apparatus
IN2012DN03830A (de)
ATE455956T1 (de) Kraftstoffinjektor
DE502006007811D1 (de) Brenner zur vormischartigen Verbrennung
EA201100141A1 (ru) Устройство для снижения уровня диоксида углерода в дымовых газах сгорания
RU2013147818A (ru) Способ и устройство для эксплуатации печи
WO2007038255A3 (en) Vapor generator with preheater and method of operating same
WO2012039750A3 (en) Chemical heat augmentation of a plasma process

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification

Ref document number: 1773474

Country of ref document: EP