ATE466373T1 - Elektrothermisch betätigter mikroelektromechanischer schalter mit bistabilem knickbalken - Google Patents

Elektrothermisch betätigter mikroelektromechanischer schalter mit bistabilem knickbalken

Info

Publication number
ATE466373T1
ATE466373T1 AT03759192T AT03759192T ATE466373T1 AT E466373 T1 ATE466373 T1 AT E466373T1 AT 03759192 T AT03759192 T AT 03759192T AT 03759192 T AT03759192 T AT 03759192T AT E466373 T1 ATE466373 T1 AT E466373T1
Authority
AT
Austria
Prior art keywords
buckling beam
microelectromechanical switch
electro
actuated microelectromechanical
electrothermally actuated
Prior art date
Application number
AT03759192T
Other languages
English (en)
Inventor
Qing Ma
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of ATE466373T1 publication Critical patent/ATE466373T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H2037/008—Micromechanical switches operated thermally
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H37/02—Details
    • H01H37/32—Thermally-sensitive members
    • H01H37/52—Thermally-sensitive members actuated due to deflection of bimetallic element
    • H01H37/54—Thermally-sensitive members actuated due to deflection of bimetallic element wherein the bimetallic element is inherently snap acting
    • H01H37/5409—Bistable switches; Resetting means

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Thermally Actuated Switches (AREA)
  • Push-Button Switches (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Variable-Direction Aerials And Aerial Arrays (AREA)
AT03759192T 2002-08-14 2003-08-13 Elektrothermisch betätigter mikroelektromechanischer schalter mit bistabilem knickbalken ATE466373T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/218,290 US6753582B2 (en) 2002-08-14 2002-08-14 Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation
PCT/US2003/025632 WO2004017351A2 (en) 2002-08-14 2003-08-13 Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation

Publications (1)

Publication Number Publication Date
ATE466373T1 true ATE466373T1 (de) 2010-05-15

Family

ID=31714519

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03759192T ATE466373T1 (de) 2002-08-14 2003-08-13 Elektrothermisch betätigter mikroelektromechanischer schalter mit bistabilem knickbalken

Country Status (10)

Country Link
US (1) US6753582B2 (de)
EP (1) EP1529301B1 (de)
JP (1) JP4143066B2 (de)
CN (1) CN1675728B (de)
AT (1) ATE466373T1 (de)
AU (1) AU2003274912A1 (de)
DE (1) DE60332351D1 (de)
MY (1) MY135407A (de)
TW (1) TWI310953B (de)
WO (1) WO2004017351A2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100513723B1 (ko) * 2002-11-18 2005-09-08 삼성전자주식회사 Ｍｅｍｓ스위치
US6985650B2 (en) * 2003-08-05 2006-01-10 Xerox Corporation Thermal actuator and an optical waveguide switch including the same
US6985651B2 (en) * 2003-08-05 2006-01-10 Xerox Corporation Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same
US6983088B2 (en) * 2003-08-05 2006-01-03 Xerox Corporation Thermal actuator and an optical waveguide switch including the same
GB2410371B (en) * 2004-01-22 2007-04-04 Microsaic Systems Ltd Microengineered broadband electrical switches
US7362199B2 (en) 2004-03-31 2008-04-22 Intel Corporation Collapsible contact switch
US7221817B2 (en) 2004-08-13 2007-05-22 Xerox Corporation Beam switch structures and methods
US7046539B1 (en) * 2004-11-02 2006-05-16 Sandia Corporation Mechanical memory
US7312678B2 (en) * 2005-01-05 2007-12-25 Norcada Inc. Micro-electromechanical relay
KR100967210B1 (ko) 2005-09-27 2010-07-05 삼성전자주식회사 형상 메모리 소자
CN1923670B (zh) * 2006-09-21 2011-01-05 上海交通大学 用于直线推进的多弧结构的改性su8电热微执行器
JP2008103777A (ja) * 2006-10-17 2008-05-01 Ritsumeikan マイクロメカニカル共振器
KR100882148B1 (ko) 2007-06-22 2009-02-06 한국과학기술원 정전 구동기, 그 구동방법 및 이를 이용한 응용소자
US20090146773A1 (en) * 2007-12-07 2009-06-11 Honeywell International Inc. Lateral snap acting mems micro switch
US8232858B1 (en) * 2008-02-20 2012-07-31 Sandia Corporation Microelectromechanical (MEM) thermal actuator
TWI384518B (zh) * 2008-04-15 2013-02-01 Pei Zen Chang 低吸附電壓之射頻微機電開關及其製造方法
DE102009018365A1 (de) * 2009-04-23 2010-11-04 Albert-Ludwigs-Universität Freiburg Thermopneumatischer Aktor und Verfahren zum Herstellen eines solchen
CN101719575B (zh) * 2010-01-13 2012-08-29 上海交通大学 电热驱动的面内双稳态射频微开关
CN101814866B (zh) * 2010-04-16 2012-08-01 大连理工大学 一种电热驱动微结构的制作方法
US9438139B2 (en) 2012-08-06 2016-09-06 Board Of Trustees Of Michigan State University Energy harvesting devices for low frequency applications
US10018238B2 (en) * 2013-11-01 2018-07-10 Sabanci University Variable negative stiffness actuation
KR20170127404A (ko) * 2014-11-24 2017-11-21 제네시스 어드밴스드 테크놀러지 인크. 좌굴 부재를 구비한 제어 요소
US10014462B2 (en) * 2015-01-22 2018-07-03 Carnegie Mellon University Piezoelectric nanoelectromechanical relays
FR3043269B1 (fr) * 2015-10-29 2017-12-22 Sagemcom Energy & Telecom Sas Organe de coupure a commande thermique. compteur electrique equipe de l’organe de coupure.
CN109103708B (zh) * 2018-07-16 2024-04-05 河北科技大学 一种电插头可循环过热保护自动熔断器及其使用方法
CN116443805A (zh) * 2023-02-10 2023-07-18 北京燕东微电子股份有限公司 Mems器件及其制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5994816A (en) * 1996-12-16 1999-11-30 Mcnc Thermal arched beam microelectromechanical devices and associated fabrication methods
US6310419B1 (en) * 2000-04-05 2001-10-30 Jds Uniphase Inc. Resistor array devices including switch contacts operated by microelectromechanical actuators and methods for fabricating the same
US6407478B1 (en) * 2000-08-21 2002-06-18 Jds Uniphase Corporation Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature

Also Published As

Publication number Publication date
US20040032000A1 (en) 2004-02-19
TWI310953B (en) 2009-06-11
JP2005536031A (ja) 2005-11-24
TW200405379A (en) 2004-04-01
EP1529301A2 (de) 2005-05-11
EP1529301B1 (de) 2010-04-28
MY135407A (en) 2008-04-30
CN1675728A (zh) 2005-09-28
WO2004017351A3 (en) 2004-07-29
JP4143066B2 (ja) 2008-09-03
AU2003274912A1 (en) 2004-03-03
DE60332351D1 (de) 2010-06-10
CN1675728B (zh) 2010-12-08
US6753582B2 (en) 2004-06-22
WO2004017351A2 (en) 2004-02-26
AU2003274912A8 (en) 2004-03-03

Similar Documents

Publication Publication Date Title
ATE466373T1 (de) Elektrothermisch betätigter mikroelektromechanischer schalter mit bistabilem knickbalken
WO2007075445A3 (en) Systems, methods and devices for actuating a moveable miniature platform
WO2003079384A3 (en) Double-electret mems actuator
WO2005026801A3 (en) Apparatus for manipulation of an optical element
ATE284242T1 (de) Konnektor mit innerem verschiebeelement
DE60104085D1 (de) Faseroptische schalteranordnung
WO2007120886A3 (en) Microelectromechanical device and method utilizing a porous surface
PE20061237A1 (es) Interruptor de pulsador
WO2007009077A3 (en) Method and arrangement for actuation
MY136286A (en) Bump style mems switch
DE60104485D1 (de) Pyrotechnischer Aktuator mit verformbarer Membran
WO2010035030A3 (en) Actuation system
MX2007003577A (es) Conmutadores mems con membranas de deformacion.
ES1053389Y (es) Valvula de conmutacion.
FR2842346B1 (fr) Contacteur electromagnetique.
ATE394689T1 (de) Schaltbares optisches element
WO2005099410A3 (en) Single-pole, double-throw mems switch
WO2006131917A3 (en) Device, system and method of retro-modulating safety signs
IT1320448B1 (it) Dispositivo attuatore elettromeccanico.
BRPI0604444A (pt) dispositivo para acionamento de sistemas elétricos através de elemento codificado
ITVI20030090A1 (it) Interruttore di sicurezza con dispositivo di sblocco dell'azionatore.
ATE349762T1 (de) Mems-kontaktanordnung und mikro-relais
FI20012379L (fi) Mikrosähkömekaaniseen järjestelmään perustuva optinen kytkin
WO2006117401A3 (en) Braking system
DK1744335T3 (da) Koblingsindretning til elektriske husinstallationer

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties