ATE472165T1 - Mems schalter und herstellungsverfahren - Google Patents

Mems schalter und herstellungsverfahren

Info

Publication number
ATE472165T1
ATE472165T1 AT06253784T AT06253784T ATE472165T1 AT E472165 T1 ATE472165 T1 AT E472165T1 AT 06253784 T AT06253784 T AT 06253784T AT 06253784 T AT06253784 T AT 06253784T AT E472165 T1 ATE472165 T1 AT E472165T1
Authority
AT
Austria
Prior art keywords
substrate
mems switch
electrode
manufacturing
movable electrode
Prior art date
Application number
AT06253784T
Other languages
English (en)
Inventor
Hee-Moon Jeong
Sang-Wook Kwon
Che-Heung Kim
Jong-Seok Kim
Jun-O Kim
Young-Tack Hong
In-Sang Song
Sang-Hun Lee
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Application granted granted Critical
Publication of ATE472165T1 publication Critical patent/ATE472165T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0054—Rocking contacts or actuating members
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Manufacture Of Switches (AREA)
AT06253784T 2005-07-25 2006-07-19 Mems schalter und herstellungsverfahren ATE472165T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050067333A KR100631204B1 (ko) 2005-07-25 2005-07-25 Ｍｅｍｓ 스위치 및 그 제조방법

Publications (1)

Publication Number Publication Date
ATE472165T1 true ATE472165T1 (de) 2010-07-15

Family

ID=37179073

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06253784T ATE472165T1 (de) 2005-07-25 2006-07-19 Mems schalter und herstellungsverfahren

Country Status (6)

Country Link
US (1) US7446634B2 (de)
EP (1) EP1748457B1 (de)
JP (1) JP4332542B2 (de)
KR (1) KR100631204B1 (de)
AT (1) ATE472165T1 (de)
DE (1) DE602006015019D1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006077987A1 (ja) * 2005-01-21 2006-07-27 Matsushita Electric Industrial Co., Ltd. 電気機械スイッチ
FR2907258A1 (fr) * 2006-10-12 2008-04-18 Schneider Electric Ind Sas Dispositif de commutation incluant des micro-interrupteurs magnetiques organises en matrice
US8138859B2 (en) * 2008-04-21 2012-03-20 Formfactor, Inc. Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same
JP4924618B2 (ja) * 2009-01-05 2012-04-25 ソニー株式会社 表示制御装置、表示制御方法及びプログラム
JP4816762B2 (ja) * 2009-05-20 2011-11-16 オムロン株式会社 バネの構造および当該バネを用いたアクチュエータ
US8581679B2 (en) * 2010-02-26 2013-11-12 Stmicroelectronics Asia Pacific Pte. Ltd. Switch with increased magnetic sensitivity
JP5263203B2 (ja) * 2010-03-12 2013-08-14 オムロン株式会社 静電リレー
US8704408B2 (en) 2011-04-14 2014-04-22 National Instruments Corporation Switch matrix modeling system and method
US9097757B2 (en) 2011-04-14 2015-08-04 National Instruments Corporation Switching element system and method
US9157952B2 (en) 2011-04-14 2015-10-13 National Instruments Corporation Switch matrix system and method
US9287062B2 (en) 2012-05-02 2016-03-15 National Instruments Corporation Magnetic switching system
US9558903B2 (en) 2012-05-02 2017-01-31 National Instruments Corporation MEMS-based switching system
US9758366B2 (en) 2015-12-15 2017-09-12 International Business Machines Corporation Small wafer area MEMS switch
JP6038362B2 (ja) * 2016-01-06 2016-12-07 パイオニア株式会社 静電アクチュエーターおよび可変容量デバイス

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19823690C1 (de) 1998-05-27 2000-01-05 Siemens Ag Mikromechanisches elektrostatisches Relais
US6040611A (en) 1998-09-10 2000-03-21 Hughes Electonics Corporation Microelectromechanical device
US6069540A (en) 1999-04-23 2000-05-30 Trw Inc. Micro-electro system (MEMS) switch
JP2001076605A (ja) 1999-07-01 2001-03-23 Advantest Corp 集積型マイクロスイッチおよびその製造方法
SE0101182D0 (sv) * 2001-04-02 2001-04-02 Ericsson Telefon Ab L M Micro electromechanical switches
US6876282B2 (en) 2002-05-17 2005-04-05 International Business Machines Corporation Micro-electro-mechanical RF switch
US6657525B1 (en) 2002-05-31 2003-12-02 Northrop Grumman Corporation Microelectromechanical RF switch
US7053736B2 (en) * 2002-09-30 2006-05-30 Teravicta Technologies, Inc. Microelectromechanical device having an active opening switch

Also Published As

Publication number Publication date
EP1748457B1 (de) 2010-06-23
EP1748457A1 (de) 2007-01-31
US7446634B2 (en) 2008-11-04
DE602006015019D1 (de) 2010-08-05
JP2007035635A (ja) 2007-02-08
US20070018760A1 (en) 2007-01-25
KR100631204B1 (ko) 2006-10-04
JP4332542B2 (ja) 2009-09-16

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties