ATE479084T1 - Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen - Google Patents

Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen

Info

Publication number
ATE479084T1
ATE479084T1 AT01273372T AT01273372T ATE479084T1 AT E479084 T1 ATE479084 T1 AT E479084T1 AT 01273372 T AT01273372 T AT 01273372T AT 01273372 T AT01273372 T AT 01273372T AT E479084 T1 ATE479084 T1 AT E479084T1
Authority
AT
Austria
Prior art keywords
tines
base region
force transducer
double resonance
resonance beam
Prior art date
Application number
AT01273372T
Other languages
English (en)
Inventor
Graeme Blake
Original Assignee
Honeywell Int Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc filed Critical Honeywell Int Inc
Application granted granted Critical
Publication of ATE479084T1 publication Critical patent/ATE479084T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2473—Double-Ended Tuning Fork [DETF] resonators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/10—Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
    • G01L1/106—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Exhaust Silencers (AREA)
  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT01273372T 2001-01-17 2001-07-17 Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen ATE479084T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26247001P 2001-01-17 2001-01-17
PCT/US2001/022581 WO2002057728A1 (en) 2001-01-17 2001-07-17 Double resonating beam force transducer with reduced longitudinal pumping

Publications (1)

Publication Number Publication Date
ATE479084T1 true ATE479084T1 (de) 2010-09-15

Family

ID=22997656

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01273372T ATE479084T1 (de) 2001-01-17 2001-07-17 Doppelresonanzbalkenkraftwandler mit verringertem longitudinalem pumpen

Country Status (5)

Country Link
US (1) US6553834B2 (de)
EP (1) EP1352222B1 (de)
AT (1) ATE479084T1 (de)
DE (1) DE60142930D1 (de)
WO (1) WO2002057728A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2864226B1 (fr) 2003-12-19 2006-06-09 Commissariat Energie Atomique Structure vibrante micro-usinee et microgyrometre associe
FR2953025B1 (fr) * 2009-11-23 2012-06-08 Commissariat Energie Atomique Capteur de force resonant sensible a des micro-forces
US11119115B2 (en) 2018-08-27 2021-09-14 Honeywell International Inc. Vibrating beam accelerometer
FR3126777B1 (fr) * 2021-09-09 2023-09-08 Commissariat Energie Atomique Capteur microélectromécanique résonant a fonctionnement amelioré

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856425B2 (ja) * 1978-10-11 1983-12-14 横河電機株式会社 力変換機構
US4321500A (en) 1979-12-17 1982-03-23 Paroscientific, Inc. Longitudinal isolation system for flexurally vibrating force transducers
US4658174A (en) * 1986-03-20 1987-04-14 The Singer Company-Kearfott Division Vibrating beam force transducer with angled isolator springs
DE3776911D1 (de) * 1986-07-01 1992-04-02 Sensor Int Vibrationskraftsensor.
JPH02262874A (ja) * 1988-11-30 1990-10-25 Rion Co Ltd 超音波モータ
IL113556A (en) 1994-05-11 1998-04-05 Allied Signal Inc A double-ended collar

Also Published As

Publication number Publication date
WO2002057728A1 (en) 2002-07-25
EP1352222A1 (de) 2003-10-15
US6553834B2 (en) 2003-04-29
US20020125791A1 (en) 2002-09-12
EP1352222B1 (de) 2010-08-25
DE60142930D1 (de) 2010-10-07

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Legal Events

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