ATE482607T1 - Vorrichtung zur erzeugung von strahlung, lithographiegerät, verfahren zur herstellung eines bauteils und dieses - Google Patents

Vorrichtung zur erzeugung von strahlung, lithographiegerät, verfahren zur herstellung eines bauteils und dieses

Info

Publication number
ATE482607T1
ATE482607T1 AT05106446T AT05106446T ATE482607T1 AT E482607 T1 ATE482607 T1 AT E482607T1 AT 05106446 T AT05106446 T AT 05106446T AT 05106446 T AT05106446 T AT 05106446T AT E482607 T1 ATE482607 T1 AT E482607T1
Authority
AT
Austria
Prior art keywords
cathode
anode
generating radiation
producing
component
Prior art date
Application number
AT05106446T
Other languages
English (en)
Inventor
Konstantin Nikolaevitch Koshelev
Vladimir Vitalevitch Ivanov
Evgenii Dmitreevitch Korob
Givi Georgievitch Zukavishvili
Robert Rafilevitch Gayazov
Vladimir Mihailovitch Krivtsun
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Application granted granted Critical
Publication of ATE482607T1 publication Critical patent/ATE482607T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
    • H05G2/0035—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state the material containing metals as principal radiation-generating components

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Bakery Products And Manufacturing Methods Therefor (AREA)
  • Plasma Technology (AREA)
AT05106446T 2004-07-14 2005-07-14 Vorrichtung zur erzeugung von strahlung, lithographiegerät, verfahren zur herstellung eines bauteils und dieses ATE482607T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/890,381 US7208746B2 (en) 2004-07-14 2004-07-14 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby

Publications (1)

Publication Number Publication Date
ATE482607T1 true ATE482607T1 (de) 2010-10-15

Family

ID=34940299

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05106446T ATE482607T1 (de) 2004-07-14 2005-07-14 Vorrichtung zur erzeugung von strahlung, lithographiegerät, verfahren zur herstellung eines bauteils und dieses

Country Status (9)

Country Link
US (2) US7208746B2 (de)
EP (1) EP1633171B1 (de)
JP (1) JP4351657B2 (de)
KR (1) KR100777414B1 (de)
CN (1) CN1721999B (de)
AT (1) ATE482607T1 (de)
DE (1) DE602005023696D1 (de)
SG (1) SG119308A1 (de)
TW (1) TWI295821B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG153664A1 (en) * 2002-09-19 2009-07-29 Asml Netherlands Bv Radiation source, lithographic apparatus, and device manufacturing method
US7208746B2 (en) * 2004-07-14 2007-04-24 Asml Netherlands B.V. Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
JP4429302B2 (ja) * 2005-09-23 2010-03-10 エーエスエムエル ネザーランズ ビー．ブイ． 電磁放射線源、リソグラフィ装置、デバイス製造方法、および該製造方法によって製造されたデバイス
DE102006015641B4 (de) * 2006-03-31 2017-02-23 Ushio Denki Kabushiki Kaisha Vorrichtung zur Erzeugung von extrem ultravioletter Strahlung mittels einer elektrisch betriebenen Gasentladung
US7557366B2 (en) 2006-05-04 2009-07-07 Asml Netherlands B.V. Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
US7696492B2 (en) * 2006-12-13 2010-04-13 Asml Netherlands B.V. Radiation system and lithographic apparatus
US7696493B2 (en) * 2006-12-13 2010-04-13 Asml Netherlands B.V. Radiation system and lithographic apparatus
US7518135B2 (en) * 2006-12-20 2009-04-14 Asml Netherlands B.V. Reducing fast ions in a plasma radiation source
US20080237498A1 (en) * 2007-01-29 2008-10-02 Macfarlane Joseph J High-efficiency, low-debris short-wavelength light sources
US20110122387A1 (en) * 2008-05-13 2011-05-26 The Regents Of The University Of California System and method for light source employing laser-produced plasma
WO2011082891A1 (en) * 2010-01-07 2011-07-14 Asml Netherlands B.V. Euv radiation source comprising a droplet accelerator and lithographic apparatus
WO2011100577A2 (en) * 2010-02-12 2011-08-18 Procure Treatment Centers, Inc. Robotic mobile anesthesia system
CN105830432B (zh) * 2013-12-09 2019-05-10 浜松光子学株式会社 二维光子计数元件
EP3493239A1 (de) * 2017-12-01 2019-06-05 Excillum AB Röntgenquelle und verfahren zum erzeugen von röntgenstrahlung
US11550233B2 (en) 2018-08-14 2023-01-10 Taiwan Semiconductor Manufacturing Co., Ltd. Lithography system and operation method thereof

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE528473C (de) 1925-11-26 1931-06-29 Hans Richter Dr Ultraviolettstrahler fuer medizinische Zwecke
US4953191A (en) * 1989-07-24 1990-08-28 The United States Of America As Represented By The United States Department Of Energy High intensity x-ray source using liquid gallium target
SE510133C2 (sv) * 1996-04-25 1999-04-19 Jettec Ab Laser-plasma röntgenkälla utnyttjande vätskor som strålmål
TWI246872B (en) * 1999-12-17 2006-01-01 Asml Netherlands Bv Radiation source for use in lithographic projection apparatus
US6667484B2 (en) * 2000-07-03 2003-12-23 Asml Netherlands B.V. Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
US6711233B2 (en) * 2000-07-28 2004-03-23 Jettec Ab Method and apparatus for generating X-ray or EUV radiation
TW548524B (en) * 2000-09-04 2003-08-21 Asm Lithography Bv Lithographic projection apparatus, device manufacturing method and device manufactured thereby
TW591342B (en) * 2000-11-30 2004-06-11 Asml Netherlands Bv Lithographic projection apparatus and integrated circuit manufacturing method using a lithographic projection apparatus
JP2002248344A (ja) * 2001-02-26 2002-09-03 Nikon Corp 極端紫外光発生装置並びにそれを用いた露光装置及び半導体製造方法
TW589924B (en) * 2001-04-06 2004-06-01 Fraunhofer Ges Forschung Process and device for producing extreme ultraviolet ray/weak x-ray
US6567499B2 (en) * 2001-06-07 2003-05-20 Plex Llc Star pinch X-ray and extreme ultraviolet photon source
CN1314300C (zh) 2001-06-07 2007-05-02 普莱克斯有限责任公司 星形箍缩的x射线和远紫外线光子源
US6714624B2 (en) * 2001-09-18 2004-03-30 Euv Llc Discharge source with gas curtain for protecting optics from particles
EP1345082A1 (de) * 2002-03-15 2003-09-17 ASML Netherlands BV Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung
EP1401248B1 (de) * 2002-09-19 2012-07-25 ASML Netherlands B.V. Strahlungsquelle, Lithographiegerät und Methode zur Herstellung von Bauelementen
US7002168B2 (en) * 2002-10-15 2006-02-21 Cymer, Inc. Dense plasma focus radiation source
US7075096B2 (en) * 2004-02-13 2006-07-11 Plex Llc Injection pinch discharge extreme ultraviolet source
US7208746B2 (en) * 2004-07-14 2007-04-24 Asml Netherlands B.V. Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby

Also Published As

Publication number Publication date
US7335900B2 (en) 2008-02-26
SG119308A1 (en) 2006-02-28
EP1633171A2 (de) 2006-03-08
KR20060050155A (ko) 2006-05-19
CN1721999A (zh) 2006-01-18
JP2006032340A (ja) 2006-02-02
EP1633171B1 (de) 2010-09-22
US20060011864A1 (en) 2006-01-19
DE602005023696D1 (de) 2010-11-04
KR100777414B1 (ko) 2007-11-20
EP1633171A3 (de) 2008-12-03
JP4351657B2 (ja) 2009-10-28
CN1721999B (zh) 2011-01-12
US20060071180A1 (en) 2006-04-06
TW200616078A (en) 2006-05-16
TWI295821B (en) 2008-04-11
US7208746B2 (en) 2007-04-24

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