ATE485498T1 - Mehrachsige kraftsensorchip - Google Patents

Mehrachsige kraftsensorchip

Info

Publication number
ATE485498T1
ATE485498T1 AT07008878T AT07008878T ATE485498T1 AT E485498 T1 ATE485498 T1 AT E485498T1 AT 07008878 T AT07008878 T AT 07008878T AT 07008878 T AT07008878 T AT 07008878T AT E485498 T1 ATE485498 T1 AT E485498T1
Authority
AT
Austria
Prior art keywords
sensor chip
operating part
force sensor
connecting parts
supporting
Prior art date
Application number
AT07008878T
Other languages
English (en)
Inventor
Yusuke Hirabayashi
Nobuhiro Sakurai
Takeshi Ohsato
Original Assignee
Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Application granted granted Critical
Publication of ATE485498T1 publication Critical patent/ATE485498T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
  • Steering Control In Accordance With Driving Conditions (AREA)
AT07008878T 2006-05-02 2007-05-02 Mehrachsige kraftsensorchip ATE485498T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006128384A JP5303101B2 (ja) 2006-05-02 2006-05-02 力覚センサ用チップ

Publications (1)

Publication Number Publication Date
ATE485498T1 true ATE485498T1 (de) 2010-11-15

Family

ID=38330496

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07008878T ATE485498T1 (de) 2006-05-02 2007-05-02 Mehrachsige kraftsensorchip

Country Status (5)

Country Link
US (1) US7536923B2 (de)
EP (1) EP1852688B1 (de)
JP (1) JP5303101B2 (de)
AT (1) ATE485498T1 (de)
DE (1) DE602007009893D1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5243704B2 (ja) * 2006-08-24 2013-07-24 本田技研工業株式会社 力覚センサ
JP4909104B2 (ja) * 2007-01-31 2012-04-04 本田技研工業株式会社 力覚センサ
US8476005B2 (en) * 2008-02-05 2013-07-02 California Institute Of Technology Microfluidic embedded polymer NEMS force sensors
DE102008061769A1 (de) * 2008-12-11 2010-06-17 Bayerische Motoren Werke Aktiengesellschaft Verbrennungskraftmaschine und Verfahren zur Kompressionszündverbrennung
JP5024358B2 (ja) * 2009-01-08 2012-09-12 株式会社日本自動車部品総合研究所 作用力検出装置
JP5243988B2 (ja) * 2009-02-10 2013-07-24 本田技研工業株式会社 多軸力覚センサおよび加速度センサ
US8857275B2 (en) 2011-05-02 2014-10-14 California Institute Of Technology NEMS sensors for cell force application and measurement
USD671433S1 (en) * 2011-05-23 2012-11-27 Gilad Yaron Strain gage design
USD673065S1 (en) * 2011-05-26 2012-12-25 Tedea Huntleigh International Ltd. Strain gage
USD673064S1 (en) * 2011-05-26 2012-12-25 Tedea Huntleigh International Ltd. Strain gage design
USD673063S1 (en) * 2011-05-26 2012-12-25 Tedea Huntleigh International Ltd. Strain gage
DE102011112935B4 (de) 2011-09-13 2015-02-12 Micronas Gmbh Kraftsensor
CN102944339A (zh) * 2012-10-22 2013-02-27 北京大学 一种mems压阻式压力传感器及其制备方法
WO2018066557A1 (ja) * 2016-10-07 2018-04-12 ミツミ電機株式会社 センサチップ、起歪体、力覚センサ装置
JP6760575B2 (ja) * 2016-10-07 2020-09-23 ミネベアミツミ株式会社 センサチップ、起歪体、力覚センサ装置
JP6794293B2 (ja) * 2017-02-24 2020-12-02 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
US10634695B2 (en) * 2017-04-26 2020-04-28 Minebea Mitsumi Inc. Force sensor
JP6940037B2 (ja) * 2017-04-26 2021-09-22 ミネベアミツミ株式会社 力覚センサ装置
JP7592957B2 (ja) * 2020-12-24 2024-12-03 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
JP2022142117A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
JP2022142116A (ja) * 2021-03-16 2022-09-30 ミネベアミツミ株式会社 起歪体、力覚センサ装置
CN121141015B (zh) * 2025-11-14 2026-02-24 常州坤维传感科技有限公司 一种微型六维力传感器、冗余输出方法及机器人灵巧手

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57169643A (en) * 1981-04-13 1982-10-19 Yamato Scale Co Ltd Load cell for multiple components of force
JPH0821721B2 (ja) * 1986-10-09 1996-03-04 株式会社リコー 力検出装置
US5263375A (en) * 1987-09-18 1993-11-23 Wacoh Corporation Contact detector using resistance elements and its application
US6864677B1 (en) * 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
JP3171970B2 (ja) * 1992-12-10 2001-06-04 株式会社ワコー 力／加速度の検出装置
KR100199691B1 (ko) * 1997-05-19 1999-06-15 김동진 6분력 로드셀
JPH11333765A (ja) * 1998-05-26 1999-12-07 Tokai Rika Co Ltd 力センサ付きマイクロマニピュレータ
JP2001264198A (ja) 2000-03-16 2001-09-26 Olympus Optical Co Ltd 多軸力覚センサ及び力覚センサの製造方法
US6823744B2 (en) * 2002-01-11 2004-11-30 Honda Giken Kogyo Kabushiki Kaisha Six-axis force sensor
JP4011345B2 (ja) * 2002-01-11 2007-11-21 本田技研工業株式会社 多軸力センサチップ
JP2005049320A (ja) * 2003-07-30 2005-02-24 Microstone Corp 加速度センサ
JP4680566B2 (ja) * 2004-10-26 2011-05-11 本田技研工業株式会社 多軸力センサチップとこれを用いた多軸力センサ
JP4203051B2 (ja) * 2005-06-28 2008-12-24 本田技研工業株式会社 力覚センサ
JP5007083B2 (ja) * 2006-08-08 2012-08-22 本田技研工業株式会社 力覚センサ用チップ
JP4210296B2 (ja) * 2006-08-24 2009-01-14 本田技研工業株式会社 力覚センサの製造方法
JP2008058110A (ja) * 2006-08-30 2008-03-13 Honda Motor Co Ltd 力覚センサ用チップおよび力覚センサ
JP4958501B2 (ja) * 2006-08-30 2012-06-20 本田技研工業株式会社 力覚センサ用チップ及び外力伝達機構

Also Published As

Publication number Publication date
US20070266797A1 (en) 2007-11-22
DE602007009893D1 (de) 2010-12-02
EP1852688B1 (de) 2010-10-20
EP1852688A3 (de) 2008-03-12
JP5303101B2 (ja) 2013-10-02
JP2007298471A (ja) 2007-11-15
EP1852688A2 (de) 2007-11-07
US7536923B2 (en) 2009-05-26

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