ATE486042T1 - Verfahren zur schaffung eines artikels mit einer nadel eines mikroarrayspotters - Google Patents

Verfahren zur schaffung eines artikels mit einer nadel eines mikroarrayspotters

Info

Publication number
ATE486042T1
ATE486042T1 AT06726950T AT06726950T ATE486042T1 AT E486042 T1 ATE486042 T1 AT E486042T1 AT 06726950 T AT06726950 T AT 06726950T AT 06726950 T AT06726950 T AT 06726950T AT E486042 T1 ATE486042 T1 AT E486042T1
Authority
AT
Austria
Prior art keywords
layer
sub
article
top layer
exposed
Prior art date
Application number
AT06726950T
Other languages
English (en)
Inventor
Jas Pal Singh Badyal
James Mcgettrick
L G Harris
Original Assignee
Surface Innovations Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surface Innovations Ltd filed Critical Surface Innovations Ltd
Application granted granted Critical
Publication of ATE486042T1 publication Critical patent/ATE486042T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2049—Exposure; Apparatus therefor using a cantilever
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Materials Engineering (AREA)
  • Composite Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Printing Methods (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
AT06726950T 2005-05-04 2006-04-28 Verfahren zur schaffung eines artikels mit einer nadel eines mikroarrayspotters ATE486042T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0509213.5A GB0509213D0 (en) 2005-05-04 2005-05-04 A method for creating a chemically patterned surface
PCT/GB2006/001570 WO2006117527A2 (en) 2005-05-04 2006-04-28 An article, and a method for creating the article, with a chemically patterned surface

Publications (1)

Publication Number Publication Date
ATE486042T1 true ATE486042T1 (de) 2010-11-15

Family

ID=34685149

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06726950T ATE486042T1 (de) 2005-05-04 2006-04-28 Verfahren zur schaffung eines artikels mit einer nadel eines mikroarrayspotters

Country Status (10)

Country Link
US (1) US20100055413A1 (de)
EP (1) EP1888455B1 (de)
AT (1) ATE486042T1 (de)
DE (1) DE602006017832D1 (de)
DK (1) DK1888455T3 (de)
ES (1) ES2353246T3 (de)
GB (2) GB0509213D0 (de)
PL (1) PL1888455T3 (de)
PT (1) PT1888455E (de)
WO (1) WO2006117527A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4991310B2 (ja) * 2003-12-16 2012-08-01 サン・ケミカル・コーポレーション 放射硬化型コーティングの製造方法とコーティングされた物品
KR20110119665A (ko) * 2009-01-26 2011-11-02 나노잉크, 인크. 조절된 팁 로딩 증착을 포함하는 넓은 면적의 균일한 어레이 제작
GB2535988A (en) * 2015-02-26 2016-09-07 Surface Innovations Ltd Patterned functional surface
CN207396531U (zh) * 2017-01-31 2018-05-22 杭州探真纳米科技有限公司 一种悬臂末端纳米探针
CN109776842B (zh) * 2019-01-11 2020-06-09 西南交通大学 区域选择性可控化固定双分子薄膜及其制备方法
US11705535B2 (en) * 2019-08-05 2023-07-18 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Nano-indent process for creating single photon emitters in a two-dimensional materials platform

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4252848A (en) * 1977-04-11 1981-02-24 Rca Corporation Perfluorinated polymer thin films
JPS5916779A (ja) * 1982-07-20 1984-01-27 Jeol Ltd カラ−印字又は印刷方式及び装置
US5002794A (en) * 1989-08-31 1991-03-26 The Board Of Regents Of The University Of Washington Method of controlling the chemical structure of polymeric films by plasma
EP0814116A1 (de) * 1996-06-19 1997-12-29 Hüls Aktiengesellschaft Hydrophile Beschichtung von Oberflächen polymerer Substrate
JP4208305B2 (ja) * 1998-09-17 2009-01-14 株式会社東芝 マスクパターンの形成方法
US6827979B2 (en) * 1999-01-07 2004-12-07 Northwestern University Methods utilizing scanning probe microscope tips and products therefor or produced thereby
US6489102B2 (en) * 1999-08-05 2002-12-03 Wisconsin Alumni Research Foundation Biomolecule and/or cellular arrays on metal surfaces and product produced thereby
US6696008B2 (en) * 2000-05-25 2004-02-24 Westar Photonics Inc. Maskless laser beam patterning ablation of multilayered structures with continuous monitoring of ablation
US6841663B2 (en) * 2001-10-18 2005-01-11 Agilent Technologies, Inc. Chemical arrays
US6984485B2 (en) * 2002-04-23 2006-01-10 Beckman Coulter, Inc. Polymer-coated substrates for immobilization of biomolecules and cells
AU2002952384A0 (en) * 2002-10-31 2002-11-14 Swinburne University Of Technology Structures
US20050008851A1 (en) * 2003-02-18 2005-01-13 Fuji Photo Film Co., Ltd. Biosensor

Also Published As

Publication number Publication date
GB0509213D0 (en) 2005-06-15
DK1888455T3 (da) 2011-01-10
WO2006117527A2 (en) 2006-11-09
GB2437688A (en) 2007-10-31
US20100055413A1 (en) 2010-03-04
EP1888455A2 (de) 2008-02-20
PT1888455E (pt) 2010-12-21
GB0716244D0 (en) 2007-09-26
ES2353246T3 (es) 2011-02-28
EP1888455B1 (de) 2010-10-27
DE602006017832D1 (de) 2010-12-09
WO2006117527A3 (en) 2007-04-05
PL1888455T3 (pl) 2011-04-29

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