ATE486098T1 - Siloxanharzbeschichtung - Google Patents

Siloxanharzbeschichtung

Info

Publication number
ATE486098T1
ATE486098T1 AT05798899T AT05798899T ATE486098T1 AT E486098 T1 ATE486098 T1 AT E486098T1 AT 05798899 T AT05798899 T AT 05798899T AT 05798899 T AT05798899 T AT 05798899T AT E486098 T1 ATE486098 T1 AT E486098T1
Authority
AT
Austria
Prior art keywords
siloxane resin
value
resin coating
siloxane
hsio3
Prior art date
Application number
AT05798899T
Other languages
English (en)
Inventor
Bianxiao Zhong
Original Assignee
Dow Corning
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning filed Critical Dow Corning
Application granted granted Critical
Publication of ATE486098T1 publication Critical patent/ATE486098T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/12—Polysiloxanes containing silicon bound to hydrogen
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/20—Polysiloxanes containing silicon bound to unsaturated aliphatic groups
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0752—Silicon-containing compounds in non photosensitive layers or as additives, e.g. for dry lithography

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Silicon Polymers (AREA)
  • Paints Or Removers (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Traffic Control Systems (AREA)
  • Catching Or Destruction (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)
AT05798899T 2004-12-17 2005-09-23 Siloxanharzbeschichtung ATE486098T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US63700104P 2004-12-17 2004-12-17
PCT/US2005/034236 WO2006065310A2 (en) 2004-12-17 2005-09-23 Siloxane resin coating

Publications (1)

Publication Number Publication Date
ATE486098T1 true ATE486098T1 (de) 2010-11-15

Family

ID=36588304

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05798899T ATE486098T1 (de) 2004-12-17 2005-09-23 Siloxanharzbeschichtung

Country Status (9)

Country Link
US (2) US7838615B2 (de)
EP (1) EP1846479B1 (de)
JP (1) JP5412037B2 (de)
KR (1) KR101191098B1 (de)
CN (1) CN101072813B (de)
AT (1) ATE486098T1 (de)
DE (1) DE602005024447D1 (de)
TW (1) TWI384016B (de)
WO (1) WO2006065310A2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7756384B2 (en) 2004-11-08 2010-07-13 Dow Corning Corporation Method for forming anti-reflective coating
CN101073038B (zh) 2004-12-17 2010-05-05 陶氏康宁公司 形成抗反射涂层的方法
DE602005008100D1 (de) 2004-12-17 2008-08-21 Dow Corning Verfahren zur ausbildung einer antireflexionsbeschichtung
EP1846479B1 (de) * 2004-12-17 2010-10-27 Dow Corning Corporation Siloxanharzbeschichtung
JP4692415B2 (ja) 2005-09-15 2011-06-01 カシオ計算機株式会社 エレクトロルミネッセンス素子の製造方法
CN101371196B (zh) 2006-02-13 2012-07-04 陶氏康宁公司 抗反射涂料
US7704670B2 (en) 2006-06-22 2010-04-27 Az Electronic Materials Usa Corp. High silicon-content thin film thermosets
US8026040B2 (en) 2007-02-20 2011-09-27 Az Electronic Materials Usa Corp. Silicone coating composition
CN101622296B (zh) 2007-02-27 2013-10-16 Az电子材料美国公司 硅基抗反射涂料组合物
US8653217B2 (en) 2007-05-01 2014-02-18 Dow Corning Corporation Method for forming anti-reflective coating
EP2071400A1 (de) * 2007-11-12 2009-06-17 Rohm and Haas Electronic Materials LLC Beschichtungszusammensetzungen zur Verwendung mit einem beschichteten Fotolack
CN101910253B (zh) 2008-01-15 2013-04-10 陶氏康宁公司 倍半硅氧烷树脂
US9808345B2 (en) 2008-07-24 2017-11-07 Iorthopedics, Inc. Resilient arthroplasty device
EP2376584B1 (de) * 2008-12-10 2014-07-16 Dow Corning Corporation Nassätzbare antireflexbeschichtungen
EP2373722A4 (de) 2008-12-10 2013-01-23 Dow Corning Silsesquioxanharze
KR20110035924A (ko) * 2009-09-29 2011-04-06 제이에스알 가부시끼가이샤 광반도체 소자의 제조 방법 및 광반도체 소자 보호층 형성용 조성물
JP2011097024A (ja) * 2009-09-29 2011-05-12 Jsr Corp 光半導体素子の製造方法、及び、光半導体素子保護層形成用組成物
JP5062352B2 (ja) 2010-09-09 2012-10-31 Ｊｓｒ株式会社 レジストパターン形成方法
TW201300459A (zh) * 2011-03-10 2013-01-01 Dow Corning 用於抗反射塗層的聚矽烷矽氧烷（ｐｏｌｙｓｉｌａｎｅｓｉｌｏｘａｎｅ）樹脂
JP2015511325A (ja) * 2012-01-18 2015-04-16 ダウ コーニング コーポレーションＤｏｗ Ｃｏｒｎｉｎｇ Ｃｏｒｐｏｒａｔｉｏｎ シリコンリッチ反射防止コーティグ材料及びそれらの作製方法
US9348228B2 (en) 2013-01-03 2016-05-24 Globalfoundries Inc. Acid-strippable silicon-containing antireflective coating
WO2016052413A1 (ja) * 2014-09-30 2016-04-07 株式会社カネカ シロキサン樹脂の製造方法
SG11201703196WA (en) * 2014-10-24 2017-05-30 Versum Materials Us Llc Compositions and methods using same for deposition of silicon-containing films
US10886477B2 (en) * 2018-03-23 2021-01-05 Feng-wen Yen Iridium complex and organic electroluminescence device using the same
CN116496500B (zh) * 2022-01-18 2026-02-24 上海艾深斯科技有限公司 用于KrF显微光刻法的单层组合物中组合的硬掩模和ARC

Family Cites Families (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4587138A (en) * 1984-11-09 1986-05-06 Intel Corporation MOS rear end processing
CA2015806A1 (en) * 1989-05-02 1990-11-02 Thomas C. Williams Ambient temperature curable polyorganosiloxanes
US5100503A (en) * 1990-09-14 1992-03-31 Ncr Corporation Silica-based anti-reflective planarizing layer
DE69300616T2 (de) * 1992-04-30 1996-05-30 Ibm Silikon enthaltendes positives Photoresistmaterial und dessen Verwendung in Dünnfilm-Verpackung-Technologie.
EP0686680A4 (de) * 1993-12-27 1996-07-24 Kawasaki Steel Co Isolationsfilm für halbleiteranordnung, beschichtungsflüssigkeit für solchen film und verfahren zur herstellung desselben
JP3324360B2 (ja) * 1995-09-25 2002-09-17 信越化学工業株式会社 ポリシロキサン化合物及びポジ型レジスト材料
JPH10158407A (ja) * 1996-11-28 1998-06-16 Toray Dow Corning Silicone Co Ltd オルガノポリシロキサンおよびその製造方法
US6143855A (en) * 1997-04-21 2000-11-07 Alliedsignal Inc. Organohydridosiloxane resins with high organic content
US6218497B1 (en) * 1997-04-21 2001-04-17 Alliedsignal Inc. Organohydridosiloxane resins with low organic content
US6057239A (en) * 1997-12-17 2000-05-02 Advanced Micro Devices, Inc. Dual damascene process using sacrificial spin-on materials
US6344284B1 (en) * 1998-04-10 2002-02-05 Organic Display Technology Organic electroluminescent materials and devices made from such materials
US6087064A (en) * 1998-09-03 2000-07-11 International Business Machines Corporation Silsesquioxane polymers, method of synthesis, photoresist composition, and multilayer lithographic method
US6509259B1 (en) * 1999-06-09 2003-01-21 Alliedsignal Inc. Process of using siloxane dielectric films in the integration of organic dielectric films in electronic devices
WO2000077575A1 (en) 1999-06-10 2000-12-21 Alliedsignal Inc. Spin-on-glass anti-reflective coatings for photolithography
US6824879B2 (en) * 1999-06-10 2004-11-30 Honeywell International Inc. Spin-on-glass anti-reflective coatings for photolithography
US6268457B1 (en) * 1999-06-10 2001-07-31 Allied Signal, Inc. Spin-on glass anti-reflective coatings for photolithography
US6359096B1 (en) * 1999-10-25 2002-03-19 Dow Corning Corporation Silicone resin compositions having good solution solubility and stability
KR100683428B1 (ko) * 1999-10-25 2007-02-20 다우 코닝 코포레이션 용액 용해도와 안정성이 우수한 실리콘 수지 조성물
KR100384810B1 (ko) * 2000-02-16 2003-05-22 금호석유화학 주식회사 저분자 화합물 첨가제를 포함하는 화학증폭형 레지스트조성물
JP3795333B2 (ja) * 2000-03-30 2006-07-12 東京応化工業株式会社 反射防止膜形成用組成物
JP4117437B2 (ja) * 2000-05-29 2008-07-16 Ｊｓｒ株式会社 膜形成用組成物、絶縁膜形成用材料およびシリカ系膜
US6420088B1 (en) * 2000-06-23 2002-07-16 International Business Machines Corporation Antireflective silicon-containing compositions as hardmask layer
US6368400B1 (en) 2000-07-17 2002-04-09 Honeywell International Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography
JP4141625B2 (ja) * 2000-08-09 2008-08-27 東京応化工業株式会社 ポジ型レジスト組成物およびそのレジスト層を設けた基材
EP1197998A3 (de) * 2000-10-10 2005-12-21 Shipley Company LLC Antireflektiver Schaumstoff
TW538319B (en) 2000-10-10 2003-06-21 Shipley Co Llc Antireflective composition, method for forming antireflective coating layer, and method for manufacturing electronic device
JP3865048B2 (ja) * 2000-11-01 2007-01-10 信越化学工業株式会社 レジスト材料及びパターン形成方法
GB0108274D0 (en) * 2001-04-03 2001-05-23 Dow Corning preparation of silicone resins
US6589711B1 (en) * 2001-04-04 2003-07-08 Advanced Micro Devices, Inc. Dual inlaid process using a bilayer resist
US6596404B1 (en) * 2001-07-26 2003-07-22 Dow Corning Corporation Siloxane resins
CN1535301A (zh) * 2001-07-26 2004-10-06 硅氧烷树脂
US6746530B2 (en) * 2001-08-02 2004-06-08 Chunghwa Pictures Tubes, Ltd. High contrast, moisture resistant antistatic/antireflective coating for CRT display screen
US6596834B2 (en) * 2001-09-12 2003-07-22 Dow Corning Corporation Silicone resins and porous materials produced therefrom
US20030096090A1 (en) * 2001-10-22 2003-05-22 Boisvert Ronald Paul Etch-stop resins
AU2002359387A1 (en) 2001-11-15 2003-06-10 Honeywell International Inc. Anti-reflective coatings for photolithography and methods of preparation thereof
AU2002227106A1 (en) 2001-11-15 2003-06-10 Honeywell International Inc. Spin-on anti-reflective coatings for photolithography
WO2003044077A1 (en) 2001-11-16 2003-05-30 Honeywell International Inc. Spin-on-glass anti-reflective coatings for photolithography
JP4373082B2 (ja) * 2001-12-28 2009-11-25 富士通株式会社 アルカリ可溶性シロキサン重合体、ポジ型レジスト組成物、レジストパターン及びその製造方法、並びに、電子回路装置及びその製造方法
US6730454B2 (en) 2002-04-16 2004-05-04 International Business Machines Corporation Antireflective SiO-containing compositions for hardmask layer
DE10227807A1 (de) * 2002-06-21 2004-01-22 Honeywell Specialty Chemicals Seelze Gmbh Silylalkylester von Anthracen- und Phenanthrencarbonsäuren
US20040042020A1 (en) * 2002-08-29 2004-03-04 Vondran Gary L. Color space conversion
AU2003295517A1 (en) 2002-11-12 2004-06-03 Honeywell International Inc Anti-reflective coatings for photolithography and methods of preparation thereof
WO2004051376A1 (ja) 2002-12-02 2004-06-17 Tokyo Ohka Kogyo Co., Ltd. 反射防止膜形成用組成物
JP2004277463A (ja) * 2003-03-12 2004-10-07 Fujitsu Ltd 低誘電率膜用組成物
TW200505966A (en) * 2003-04-02 2005-02-16 Dow Global Technologies Inc Organosilicate resin formulation for use in microelectronic devices
JP4796498B2 (ja) 2003-05-23 2011-10-19 ダウ コーニング コーポレーション 高い湿式エッチング速度を持つシロキサン樹脂系反射防止被覆組成物
EP1846479B1 (de) * 2004-12-17 2010-10-27 Dow Corning Corporation Siloxanharzbeschichtung
CN101073039B (zh) 2004-12-17 2011-12-14 陶氏康宁公司 形成抗反射涂层的方法
CN101073038B (zh) 2004-12-17 2010-05-05 陶氏康宁公司 形成抗反射涂层的方法

Also Published As

Publication number Publication date
KR101191098B1 (ko) 2012-10-15
US8129491B2 (en) 2012-03-06
WO2006065310A2 (en) 2006-06-22
CN101072813A (zh) 2007-11-14
JP2008524374A (ja) 2008-07-10
KR20070089160A (ko) 2007-08-30
US20070261600A1 (en) 2007-11-15
DE602005024447D1 (de) 2010-12-09
EP1846479B1 (de) 2010-10-27
WO2006065310A3 (en) 2007-01-04
US20110034629A1 (en) 2011-02-10
EP1846479A2 (de) 2007-10-24
JP5412037B2 (ja) 2014-02-12
TWI384016B (zh) 2013-02-01
TW200626638A (en) 2006-08-01
US7838615B2 (en) 2010-11-23
CN101072813B (zh) 2011-06-08

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