ATE488747T1 - Automatischer test einer elektronischen schaltungsanordnung eines kapazitiven sensors, und elektronische schaltungsanordnung zur ausführung des testes - Google Patents

Automatischer test einer elektronischen schaltungsanordnung eines kapazitiven sensors, und elektronische schaltungsanordnung zur ausführung des testes

Info

Publication number
ATE488747T1
ATE488747T1 AT07102811T AT07102811T ATE488747T1 AT E488747 T1 ATE488747 T1 AT E488747T1 AT 07102811 T AT07102811 T AT 07102811T AT 07102811 T AT07102811 T AT 07102811T AT E488747 T1 ATE488747 T1 AT E488747T1
Authority
AT
Austria
Prior art keywords
electronic circuit
circuit arrangement
test
automatic test
capacitive sensor
Prior art date
Application number
AT07102811T
Other languages
English (en)
Inventor
Sylvain Grosjean
Michel M Willemin
Original Assignee
Em Microelectronic Marin Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Em Microelectronic Marin Sa filed Critical Em Microelectronic Marin Sa
Application granted granted Critical
Publication of ATE488747T1 publication Critical patent/ATE488747T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D18/00—Testing or calibrating apparatus or arrangements provided for in groups G01D1/00 - G01D15/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/2403—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by moving plates, not forming part of the capacitor itself, e.g. shields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Burglar Alarm Systems (AREA)
AT07102811T 2007-02-21 2007-02-21 Automatischer test einer elektronischen schaltungsanordnung eines kapazitiven sensors, und elektronische schaltungsanordnung zur ausführung des testes ATE488747T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07102811A EP1962063B1 (de) 2007-02-21 2007-02-21 Automatischer Test einer elektronischen Schaltungsanordnung eines kapazitiven Sensors, und elektronische Schaltungsanordnung zur Ausführung des Testes

Publications (1)

Publication Number Publication Date
ATE488747T1 true ATE488747T1 (de) 2010-12-15

Family

ID=38659746

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07102811T ATE488747T1 (de) 2007-02-21 2007-02-21 Automatischer test einer elektronischen schaltungsanordnung eines kapazitiven sensors, und elektronische schaltungsanordnung zur ausführung des testes

Country Status (4)

Country Link
US (1) US7724000B2 (de)
EP (1) EP1962063B1 (de)
AT (1) ATE488747T1 (de)
DE (1) DE602007010581D1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE526559T1 (de) * 2009-03-10 2011-10-15 Em Microelectronic Marin Sa Elektronischer schaltkreis mit kapazitivem sensor zur messung eines physikalischen parameters und verfahren zur ingangsetzung des elektronischen schaltkreises
US8018238B2 (en) 2009-03-27 2011-09-13 Texas Instruments Incorporated Embedded sar based active gain capacitance measurement system and method
US8228076B2 (en) * 2009-03-27 2012-07-24 Texas Instruments Incorporated Deconvolution-based capacitive touch detection circuit and method
EP2343507B1 (de) * 2009-12-24 2012-11-28 EM Microelectronic-Marin SA Verfahren zum kapazitiven Messen eines physikalischen Parameters und elektronischer Schnittstellenschaltkreis für einen kapazitiven Sensor
US8599623B1 (en) * 2011-12-23 2013-12-03 Suvolta, Inc. Circuits and methods for measuring circuit elements in an integrated circuit device
EP2618163B1 (de) * 2012-01-20 2014-09-17 EM Microelectronic-Marin SA Verfahren zum Messen eines physikalischen Parameters, und elektronischer Schnittstellenschaltkreis eines kapazitiven Sensors zur Umsetzung dieses Verfahrens
EP2618164B1 (de) * 2012-01-20 2014-07-16 EM Microelectronic-Marin SA Verfahren zum Messen eines physikalischen Parameters, und elektronischer Schnittstellenschaltkreis eines kapazitiven Sensors zur Umsetzung dieses Verfahrens
EP2662667B1 (de) * 2012-05-10 2016-01-06 EM Microelectronic-Marin SA Verfahren zur Messung einer physikalischen Größe und elektronischer Schnittstellenschaltkreis für einen kapazitiven Sensor zu dessen Durchführung
DE102013110243A1 (de) * 2013-09-17 2015-04-02 Endress + Hauser Flowtec Ag Verfahren zur Überwachung eines Messgerätes der Automatisierungstechnik
EP2887014B1 (de) * 2013-12-19 2020-02-05 EM Microelectronic-Marin SA Elektronischer Schaltkreis zur Drehgeschwindigkeitsmessung in einem MEMS Kreisel und Verfahren zu seiner Ausführung
FI127101B (en) 2014-10-13 2017-11-15 Murata Manufacturing Co Capacitive microelectromechanical sensor with self-testing capability
US20170003315A1 (en) * 2015-06-30 2017-01-05 Freescale Semiconductor, Inc. Mems sensor devices having a self-test mode
FR3043786B1 (fr) 2015-11-16 2017-12-01 Sagem Defense Securite Capteur acceletometrique pendulaire de type mems a deux plages de mesure
US10323957B2 (en) 2015-11-23 2019-06-18 Murata Manufacturing Co., Ltd. Circuitry and method for generating a discrete-time high voltage
EP3324192B1 (de) 2016-11-22 2019-04-10 NXP USA, Inc. Mikroelektromechanische systeme, vorrichtungen und verfahren
US10712360B2 (en) 2017-09-27 2020-07-14 Azoteq (Pty) Ltd Differential charge transfer based accelerometer
CN114296508B (zh) * 2021-12-30 2024-04-23 长沙巨杉智能科技有限公司 岩矿石标本阻抗测量信号源生成装置
US12553957B2 (en) 2024-01-05 2026-02-17 BorgWarner US Technologies LLC Systems and methods for testing a capacitor in a circuit
CN119936500B (zh) * 2025-04-08 2025-09-02 唐智科技湖南发展有限公司 一种间隙检测设备及其电容检测装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03134552A (ja) * 1989-10-20 1991-06-07 Hitachi Ltd 自己較正機能付検出装置
DE4133426A1 (de) 1991-10-09 1993-04-15 Bosch Gmbh Robert Schaltungsanordnung zur auswertung und zum test eines kapazitiven sensors
FR2720510B1 (fr) * 1994-05-26 1996-08-02 Suisse Electronique Microtech Dispositif de mesure d'une force.
WO2006002301A1 (en) * 2004-06-21 2006-01-05 Kele, Inc. Measuring the capacitance of a capacitive sensor with a microprocessor
EP1779521B1 (de) * 2004-07-17 2018-03-28 Robert Bosch Gmbh Sigma-delta-modulator

Also Published As

Publication number Publication date
EP1962063A1 (de) 2008-08-27
EP1962063B1 (de) 2010-11-17
DE602007010581D1 (de) 2010-12-30
US7724000B2 (en) 2010-05-25
US20080197861A1 (en) 2008-08-21

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