ATE489839T1 - Verfahren zur erhöhung der umwandlungseffizienz einer euv- und/oder weichen röntgenstrahlenlampe und entsprechendes gerät - Google Patents

Verfahren zur erhöhung der umwandlungseffizienz einer euv- und/oder weichen röntgenstrahlenlampe und entsprechendes gerät

Info

Publication number
ATE489839T1
ATE489839T1 AT07735799T AT07735799T ATE489839T1 AT E489839 T1 ATE489839 T1 AT E489839T1 AT 07735799 T AT07735799 T AT 07735799T AT 07735799 T AT07735799 T AT 07735799T AT E489839 T1 ATE489839 T1 AT E489839T1
Authority
AT
Austria
Prior art keywords
soft
liquid material
discharge space
conversion efficiency
corresponding apparatus
Prior art date
Application number
AT07735799T
Other languages
English (en)
Inventor
Jeroen Jonkers
Dominik Vaudrevange
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE489839T1 publication Critical patent/ATE489839T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/008—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation
    • H05G2/0082—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam
    • H05G2/0088—Production of X-ray radiation generated from plasma involving an energy-carrying beam in the process of plasma generation the energy-carrying beam being a laser beam for preconditioning the plasma generating material

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Luminescent Compositions (AREA)
AT07735799T 2006-05-16 2007-05-08 Verfahren zur erhöhung der umwandlungseffizienz einer euv- und/oder weichen röntgenstrahlenlampe und entsprechendes gerät ATE489839T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06113972 2006-05-16
PCT/IB2007/051716 WO2007135587A2 (en) 2006-05-16 2007-05-08 A method of increasing the conversion efficiency of an euv and/or soft x-ray lamp and a corresponding apparatus

Publications (1)

Publication Number Publication Date
ATE489839T1 true ATE489839T1 (de) 2010-12-15

Family

ID=38578629

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07735799T ATE489839T1 (de) 2006-05-16 2007-05-08 Verfahren zur erhöhung der umwandlungseffizienz einer euv- und/oder weichen röntgenstrahlenlampe und entsprechendes gerät

Country Status (9)

Country Link
US (1) US8040030B2 (de)
EP (1) EP2020165B1 (de)
JP (1) JP5574705B2 (de)
KR (1) KR101396158B1 (de)
CN (1) CN101444148B (de)
AT (1) ATE489839T1 (de)
DE (1) DE602007010765D1 (de)
TW (1) TWI420976B (de)
WO (1) WO2007135587A2 (de)

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US20080239262A1 (en) * 2007-03-29 2008-10-02 Asml Netherlands B.V. Radiation source for generating electromagnetic radiation and method for generating electromagnetic radiation
JP5386799B2 (ja) * 2007-07-06 2014-01-15 株式会社ニコン Ｅｕｖ光源、ｅｕｖ露光装置、ｅｕｖ光放射方法、ｅｕｖ露光方法および電子デバイスの製造方法
DE102007060807B4 (de) * 2007-12-18 2009-11-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasentladungsquelle, insbesondere für EUV-Strahlung
JP2011508442A (ja) * 2007-12-27 2011-03-10 エーエスエムエル ネザーランズ ビー．ブイ． 極端紫外線放射源および極端紫外線放射を生成する方法
NL2002890A1 (nl) * 2008-06-16 2009-12-17 Asml Netherlands Bv Lithographic apparatus.
US8519368B2 (en) * 2008-07-28 2013-08-27 Koninklijke Philips N.V. Method and device for generating EUV radiation or soft X-rays
JP4623192B2 (ja) * 2008-09-29 2011-02-02 ウシオ電機株式会社 極端紫外光光源装置および極端紫外光発生方法
WO2010070540A1 (en) 2008-12-16 2010-06-24 Philips Intellectual Property & Standards Gmbh Method and device for generating euv radiation or soft x-rays with enhanced efficiency
JP5245857B2 (ja) * 2009-01-21 2013-07-24 ウシオ電機株式会社 極端紫外光光源装置
JP5504673B2 (ja) * 2009-03-30 2014-05-28 ウシオ電機株式会社 極端紫外光光源装置
CN103281855B (zh) * 2013-05-16 2015-10-14 中国科学院光电研究院 一种用于激光光源的液态金属靶产生装置
CN104394642B (zh) * 2014-12-07 2017-03-08 湖南科技大学 激光等离子体共振x光源
CN105376919B (zh) * 2015-11-06 2017-08-01 华中科技大学 一种激光诱导液滴靶放电产生等离子体的装置
RU2670273C2 (ru) * 2017-11-24 2018-10-22 Общество с ограниченной ответственностью "РнД-ИСАН" Устройство и способ для генерации излучения из лазерной плазмы
JP7156331B2 (ja) * 2020-05-15 2022-10-19 ウシオ電機株式会社 極端紫外光光源装置
KR102979725B1 (ko) 2024-01-09 2026-06-18 한국표준과학연구원 레이저 생성 플라즈마를 사용하는 극자외선 발생 장치 및 방법

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US6031241A (en) * 1997-03-11 2000-02-29 University Of Central Florida Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications
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US6972421B2 (en) * 2000-06-09 2005-12-06 Cymer, Inc. Extreme ultraviolet light source
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WO2002102122A1 (en) * 2001-06-07 2002-12-19 Plex Llc Star pinch x-ray and extreme ultraviolet photon source
DE10219173A1 (de) * 2002-04-30 2003-11-20 Philips Intellectual Property Verfahren zur Erzeugung von Extrem-Ultraviolett-Strahlung
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EP1401248B1 (de) 2002-09-19 2012-07-25 ASML Netherlands B.V. Strahlungsquelle, Lithographiegerät und Methode zur Herstellung von Bauelementen
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DE10359464A1 (de) 2003-12-17 2005-07-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Erzeugen von insbesondere EUV-Strahlung und/oder weicher Röntgenstrahlung
US7075096B2 (en) * 2004-02-13 2006-07-11 Plex Llc Injection pinch discharge extreme ultraviolet source

Also Published As

Publication number Publication date
DE602007010765D1 (de) 2011-01-05
KR20090021168A (ko) 2009-02-27
CN101444148A (zh) 2009-05-27
EP2020165A2 (de) 2009-02-04
JP5574705B2 (ja) 2014-08-20
WO2007135587A3 (en) 2008-04-24
EP2020165B1 (de) 2010-11-24
US8040030B2 (en) 2011-10-18
JP2009537943A (ja) 2009-10-29
US20090206268A1 (en) 2009-08-20
CN101444148B (zh) 2013-03-27
TWI420976B (zh) 2013-12-21
KR101396158B1 (ko) 2014-05-19
TW200814858A (en) 2008-03-16
WO2007135587A2 (en) 2007-11-29

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