ATE490450T1 - Verbessertes interferometer - Google Patents

Verbessertes interferometer

Info

Publication number: ATE490450T1
Authority: AT; Austria
Prior art keywords: light beam; reflector; mirror; path; formula
Prior art date: 2007-07-18

Application number

AT08775968T

Other languages

English (en)

Inventor

Clive Speake

Stuart Aston

Arellano Fabian Pena

Timothy Copland

Original Assignee

Univ Birmingham

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-07-18

Filing date

2008-07-17

Publication date

2010-12-15

2008-07-17 Application filed by Univ Birmingham filed Critical Univ Birmingham

2010-12-15 Application granted granted Critical

2010-12-15 Publication of ATE490450T1 publication Critical patent/ATE490450T1/de

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02018—Multipass interferometers, e.g. double-pass
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02056—Passive reduction of errors
- G01B9/02061—Reduction or prevention of effects of tilts or misalignment
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)
Length Measuring Devices By Optical Means (AREA)

AT08775968T 2007-07-18 2008-07-17 Verbessertes interferometer ATE490450T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
GBGB0713982.7A GB0713982D0 (en)	2007-07-18	2007-07-18	Improved interferometer
PCT/GB2008/002437 WO2009010750A1 (en)	2007-07-18	2008-07-17	Improved interferometer

Publications (1)

Publication Number	Publication Date
ATE490450T1 true ATE490450T1 (de)	2010-12-15

Family

ID=38476533

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT08775968T ATE490450T1 (de)	2007-07-18	2008-07-17	Verbessertes interferometer

Country Status (7)

Country	Link
US (1)	US8253943B2 (de)
EP (1)	EP2167908B1 (de)
JP (1)	JP2011501108A (de)
AT (1)	ATE490450T1 (de)
DE (1)	DE602008003821D1 (de)
GB (1)	GB0713982D0 (de)
WO (1)	WO2009010750A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB0920520D0 (en)	2009-11-23	2010-01-06	Univ Birmingham	Innovative laser interferometric angular read-out device
WO2019009402A1 (ja)	2017-07-06	2019-01-10	浜松ホトニクス株式会社	光学デバイス
CN109211826A (zh) *	2018-10-18	2019-01-15	安徽达致环保科技有限公司	一种分光装置和跨波段机动车排放遥测仪
CN112857207B (zh) *	2021-03-09	2022-12-16	哈尔滨工业大学	基于阵列式探测器的单光束三自由度零差激光干涉仪
DE112022006951T5 (de) *	2022-06-02	2025-02-20	Mitsubishi Electric Corporation	Werkzeugmaschine

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3832063A (en) *	1972-02-01	1974-08-27	Canon Kk	Lens axis detection using an interferometer
US4534649A (en) *	1981-10-30	1985-08-13	Downs Michael J	Surface profile interferometer
JP3003964B2 (ja) *	1991-09-20	2000-01-31	オリンパス光学工業株式会社	測長用干渉計
JP4198929B2 (ja) *	2002-03-27	2008-12-17	パイオニア株式会社	レーザ測長器及びレーザ測長方法
JP4514209B2 (ja) *	2004-10-15	2010-07-28	キヤノン株式会社	位置検出装置及び方法
JP2006349534A (ja) *	2005-06-16	2006-12-28	Fujinon Corp	動体測定用干渉計装置および動体測定用光干渉計測方法
US7532330B2 (en) *	2005-08-16	2009-05-12	Zygo Corporation	Angle interferometers

2007
- 2007-07-18 GB GBGB0713982.7A patent/GB0713982D0/en not_active Ceased
2008
- 2008-07-17 US US12/669,006 patent/US8253943B2/en not_active Expired - Fee Related
- 2008-07-17 WO PCT/GB2008/002437 patent/WO2009010750A1/en not_active Ceased
- 2008-07-17 DE DE602008003821T patent/DE602008003821D1/de active Active
- 2008-07-17 AT AT08775968T patent/ATE490450T1/de not_active IP Right Cessation
- 2008-07-17 JP JP2010516569A patent/JP2011501108A/ja active Pending
- 2008-07-17 EP EP08775968A patent/EP2167908B1/de not_active Not-in-force

Also Published As

Publication number	Publication date
US8253943B2 (en)	2012-08-28
EP2167908A1 (de)	2010-03-31
JP2011501108A (ja)	2011-01-06
US20100238456A1 (en)	2010-09-23
WO2009010750A1 (en)	2009-01-22
EP2167908B1 (de)	2010-12-01
DE602008003821D1 (de)	2011-01-13
GB0713982D0 (en)	2007-08-29

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Legal Events

Date	Code	Title	Description
2011-06-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties