ATE491325T1 - Mikrowellenplasmavorrichtung mit strudelförmigem gasfluss - Google Patents

Mikrowellenplasmavorrichtung mit strudelförmigem gasfluss

Info

Publication number
ATE491325T1
ATE491325T1 AT05791477T AT05791477T ATE491325T1 AT E491325 T1 ATE491325 T1 AT E491325T1 AT 05791477 T AT05791477 T AT 05791477T AT 05791477 T AT05791477 T AT 05791477T AT E491325 T1 ATE491325 T1 AT E491325T1
Authority
AT
Austria
Prior art keywords
plasma
reaction tube
swirl
gas flow
microwave plasma
Prior art date
Application number
AT05791477T
Other languages
English (en)
Inventor
Neil Philip Wright
Xiaoming Duan
Ba Phan
Original Assignee
C Tech Innovation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by C Tech Innovation Ltd filed Critical C Tech Innovation Ltd
Application granted granted Critical
Publication of ATE491325T1 publication Critical patent/ATE491325T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/339—Synthesising components

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
AT05791477T 2004-10-04 2005-10-03 Mikrowellenplasmavorrichtung mit strudelförmigem gasfluss ATE491325T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0421998A GB2442990A (en) 2004-10-04 2004-10-04 Microwave plasma apparatus
PCT/GB2005/003811 WO2006037991A2 (en) 2004-10-04 2005-10-03 Microwave plasma apparatus with vorticular gas flow

Publications (1)

Publication Number Publication Date
ATE491325T1 true ATE491325T1 (de) 2010-12-15

Family

ID=33428032

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05791477T ATE491325T1 (de) 2004-10-04 2005-10-03 Mikrowellenplasmavorrichtung mit strudelförmigem gasfluss

Country Status (7)

Country Link
US (1) US20070274893A1 (de)
EP (1) EP1797746B1 (de)
AT (1) ATE491325T1 (de)
DE (1) DE602005025235D1 (de)
ES (1) ES2355250T3 (de)
GB (1) GB2442990A (de)
WO (1) WO2006037991A2 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006020291A1 (de) * 2006-04-27 2007-10-31 Ipt Ionen- Und Plasmatechnik Gmbh Plasmaquelle
US9275839B2 (en) 2007-10-19 2016-03-01 Mks Instruments, Inc. Toroidal plasma chamber for high gas flow rate process
US9011647B2 (en) * 2009-06-05 2015-04-21 General Electric Company Plasma-assisted treatment of coal
ES2402609B1 (es) * 2010-11-04 2014-03-14 Universidad De Cordoba Dispositivo, sistema y método de introducción de muestras gaseosas en plasmas contenidos en tubos dieléctricos
GB2490355B (en) * 2011-04-28 2015-10-14 Gasplas As Method for processing a gas and a device for performing the method
RU2474094C1 (ru) * 2011-06-23 2013-01-27 Государственное образовательное учреждение высшего профессионального образования "Казанский государственный технологический университет" Устройство для получения высокочастотного емкостного газового разряда
US20130161266A1 (en) * 2011-12-22 2013-06-27 General Electric Company System and method for treating effluent with microwave generated multi-bubble plasma
EP3578254B1 (de) * 2013-03-14 2021-08-04 Shoei Chemical Inc. Segmentierter durchflussverfahren zur synthese von nanopartikeln
USRE48454E1 (en) * 2013-03-14 2021-03-02 Shoei Electronic Materials, Inc. Continuous flow reactor for the synthesis of nanoparticles
GB2531233A (en) * 2014-02-27 2016-04-20 C Tech Innovation Ltd Plasma enhanced catalytic conversion method and apparatus
FR3035657B1 (fr) 2015-04-30 2021-12-03 Cabot Corp Particules enrobees de carbone
US12281013B2 (en) 2016-10-06 2025-04-22 Lyten, Inc. Microwave reactor system enclosing a self-igniting plasma
EP3523013A4 (de) 2016-10-06 2020-05-27 Lyten, Inc. Mikrowellenreaktorsystem mit trennung von gas und feststoffen
US9997334B1 (en) 2017-02-09 2018-06-12 Lyten, Inc. Seedless particles with carbon allotropes
US9767992B1 (en) * 2017-02-09 2017-09-19 Lyten, Inc. Microwave chemical processing reactor
WO2018169889A1 (en) 2017-03-16 2018-09-20 Lyten, Inc. Carbon and elastomer integration
US10920035B2 (en) 2017-03-16 2021-02-16 Lyten, Inc. Tuning deformation hysteresis in tires using graphene
US10756334B2 (en) 2017-12-22 2020-08-25 Lyten, Inc. Structured composite materials
KR102861875B1 (ko) 2018-01-04 2025-09-19 라이텐, 인코포레이티드 공진 가스 센서
KR102697703B1 (ko) 2018-06-14 2024-08-23 엠케이에스 인스트루먼츠 인코포레이티드 원격 플라즈마 공급원을 위한 라디칼 출력 모니터 및 사용 방법
US11633710B2 (en) 2018-08-23 2023-04-25 Transform Materials Llc Systems and methods for processing gases
EP3841079A4 (de) 2018-08-23 2022-05-25 Transform Materials LLC System und verfahren zur verarbeitung von gasen
US11261522B2 (en) * 2018-10-18 2022-03-01 Diamond Foundry Inc. Axisymmetric material deposition from plasma assisted by angled gas flow
GB201819684D0 (en) * 2018-12-03 2019-01-16 C Tech Innovation Ltd Production of nitrogen oxides
US12159768B2 (en) * 2019-03-25 2024-12-03 Recarbon, Inc. Controlling exhaust gas pressure of a plasma reactor for plasma stability
JP7519388B2 (ja) 2019-06-25 2024-07-19 ピコサン オーワイ 基板処理装置におけるプラズマ
US11690162B2 (en) 2020-04-13 2023-06-27 Kla Corporation Laser-sustained plasma light source with gas vortex flow
WO2023042228A1 (en) * 2021-09-19 2023-03-23 Fertis India Pvt Ltd A system and process for the production of nitric acid
KR102887338B1 (ko) * 2022-06-22 2025-11-14 나이스 스타 코퍼레이션 스월 모션 사이드 가스 피드가 구비된 플라즈마 챔버

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1205209B (de) * 1964-09-24 1965-11-18 Siemens Ag Vorrichtung zum Gluehen bzw. Schmelzen von hochtemperaturfesten korn- oder pulverfoermigen Werkstoffen
US3431074A (en) * 1966-11-15 1969-03-04 Cabot Corp Process for the production of highly amorphous carbon black
DE2051218A1 (de) * 1969-10-22 1971-04-29 United States Borax Chem Plasmabrenner
CA937397A (en) * 1970-05-20 1973-11-27 United States Borax And Chemical Corporation Separable plasma torch apparatus
US4777336A (en) * 1987-04-22 1988-10-11 Michigan State University Method for treating a material using radiofrequency waves
US5083004A (en) * 1989-05-09 1992-01-21 Varian Associates, Inc. Spectroscopic plasma torch for microwave induced plasmas
JPH03214600A (ja) * 1990-01-17 1991-09-19 Nippon Koshuha Kk マイクロ波熱プラズマ反応装置
US5349154A (en) * 1991-10-16 1994-09-20 Rockwell International Corporation Diamond growth by microwave generated plasma flame
GB9414561D0 (en) * 1994-07-19 1994-09-07 Ea Tech Ltd Method of and apparatus for microwave-plasma production
TW285746B (de) * 1994-10-26 1996-09-11 Matsushita Electric Industrial Co Ltd
DE19513250C2 (de) * 1995-04-07 1999-06-10 Dornier Gmbh Verfahren und Vorrichtung zur kontinuierlichen Entfernung von Stickoxiden in Abgasen von Verbrennungsmaschinen
JPH09299786A (ja) * 1996-05-17 1997-11-25 Komatsu Ltd 表面処理装置
FR2757082B1 (fr) * 1996-12-13 1999-01-15 Air Liquide Procede d'epuration d'un gaz plasmagene et installation pour la mise en oeuvre d'un tel procede
US6388226B1 (en) * 1997-06-26 2002-05-14 Applied Science And Technology, Inc. Toroidal low-field reactive gas source
US6696662B2 (en) * 2000-05-25 2004-02-24 Advanced Energy Industries, Inc. Methods and apparatus for plasma processing
DE10112494C2 (de) * 2001-03-15 2003-12-11 Mtu Aero Engines Gmbh Verfahren zum Plasmaschweißen

Also Published As

Publication number Publication date
ES2355250T3 (es) 2011-03-24
DE602005025235D1 (de) 2011-01-20
GB0421998D0 (en) 2004-11-03
US20070274893A1 (en) 2007-11-29
EP1797746B1 (de) 2010-12-08
WO2006037991A2 (en) 2006-04-13
GB2442990A (en) 2008-04-23
EP1797746A2 (de) 2007-06-20
WO2006037991A3 (en) 2006-06-08

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