ATE496395T1 - Elektrostatisches halteelement - Google Patents

Elektrostatisches halteelement

Info

Publication number
ATE496395T1
ATE496395T1 AT03013693T AT03013693T ATE496395T1 AT E496395 T1 ATE496395 T1 AT E496395T1 AT 03013693 T AT03013693 T AT 03013693T AT 03013693 T AT03013693 T AT 03013693T AT E496395 T1 ATE496395 T1 AT E496395T1
Authority
AT
Austria
Prior art keywords
holding element
electrostatic holding
less
structured surface
electrostatic
Prior art date
Application number
AT03013693T
Other languages
English (en)
Inventor
Gerhard Kalkowski
Stefan Risse
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Application granted granted Critical
Publication of ATE496395T1 publication Critical patent/ATE496395T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Inorganic Insulating Materials (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
AT03013693T 2002-07-01 2003-06-17 Elektrostatisches halteelement ATE496395T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10230660 2002-07-01
DE10240356A DE10240356B4 (de) 2002-07-01 2002-08-27 Elektrostatisches Halteelement

Publications (1)

Publication Number Publication Date
ATE496395T1 true ATE496395T1 (de) 2011-02-15

Family

ID=29761729

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03013693T ATE496395T1 (de) 2002-07-01 2003-06-17 Elektrostatisches halteelement

Country Status (2)

Country Link
AT (1) ATE496395T1 (de)
DE (2) DE10240356B4 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021206512A1 (de) 2021-06-24 2022-12-29 Carl Zeiss Smt Gmbh Verfahren zum Ausbilden einer Noppenstruktur, Haltevorrichtung zur elektrostatischen Halterung eines Bauteils, sowie EUV-Lithographiesystem

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0680075B1 (de) * 1993-11-18 2001-11-28 Ngk Insulators, Ltd. Elektrode zur herstellung von plasma und verfahren zur herstellung der elektrode
US5886863A (en) * 1995-05-09 1999-03-23 Kyocera Corporation Wafer support member
JPH09172055A (ja) * 1995-12-19 1997-06-30 Fujitsu Ltd 静電チャック及びウエハの吸着方法
US5764471A (en) * 1996-05-08 1998-06-09 Applied Materials, Inc. Method and apparatus for balancing an electrostatic force produced by an electrostatic chuck

Also Published As

Publication number Publication date
DE10240356A1 (de) 2004-01-22
DE10240356B4 (de) 2007-08-30
DE50313419D1 (de) 2011-03-03

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