ATE496772T1 - Verfahren zur herstellung eines piezoelektrischen aktors, tintenstrahlkopf und tintenstrahldrucker mit aerosolablagerungsverfahren, piezoelektrischer aktor, tintenstrahlkopf und tintenstrahldrucker - Google Patents

Verfahren zur herstellung eines piezoelektrischen aktors, tintenstrahlkopf und tintenstrahldrucker mit aerosolablagerungsverfahren, piezoelektrischer aktor, tintenstrahlkopf und tintenstrahldrucker

Info

Publication number
ATE496772T1
ATE496772T1 AT07004490T AT07004490T ATE496772T1 AT E496772 T1 ATE496772 T1 AT E496772T1 AT 07004490 T AT07004490 T AT 07004490T AT 07004490 T AT07004490 T AT 07004490T AT E496772 T1 ATE496772 T1 AT E496772T1
Authority
AT
Austria
Prior art keywords
piezoelectric actuator
inkjet
inkjet head
inkjet printer
producing
Prior art date
Application number
AT07004490T
Other languages
English (en)
Inventor
Hiroto Sugahara
Motohiro Yasui
Original Assignee
Brother Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Ind Ltd filed Critical Brother Ind Ltd
Application granted granted Critical
Publication of ATE496772T1 publication Critical patent/ATE496772T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14266—Sheet-like thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14459—Matrix arrangement of the pressure chambers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
AT07004490T 2006-03-20 2007-03-05 Verfahren zur herstellung eines piezoelektrischen aktors, tintenstrahlkopf und tintenstrahldrucker mit aerosolablagerungsverfahren, piezoelektrischer aktor, tintenstrahlkopf und tintenstrahldrucker ATE496772T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006075942 2006-03-20

Publications (1)

Publication Number Publication Date
ATE496772T1 true ATE496772T1 (de) 2011-02-15

Family

ID=38181235

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07004490T ATE496772T1 (de) 2006-03-20 2007-03-05 Verfahren zur herstellung eines piezoelektrischen aktors, tintenstrahlkopf und tintenstrahldrucker mit aerosolablagerungsverfahren, piezoelektrischer aktor, tintenstrahlkopf und tintenstrahldrucker

Country Status (5)

Country Link
US (1) US20070216234A1 (de)
EP (1) EP1837180B1 (de)
CN (1) CN101041292B (de)
AT (1) ATE496772T1 (de)
DE (1) DE602007012162D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1837181A3 (de) 2006-03-20 2009-04-29 Brother Kogyo Kabushiki Kaisha Verfahren zur Herstellung eines piezoelektrischen Aktors, Verfahren zur Herstellung eines Flüssigkeitstropfenausstoßgerätes, piezoelektrischer Aktor und Flüssigkeitstropfenausstoßgerät
US20100187667A1 (en) * 2009-01-28 2010-07-29 Fujifilm Dimatix, Inc. Bonded Microelectromechanical Assemblies
EP3463902A4 (de) * 2016-11-01 2020-06-03 Hewlett-Packard Development Company, L.P. Flüssigkeitsausstossvorrichtung
CN113665245B (zh) * 2020-05-14 2022-10-28 上海傲睿科技有限公司 一种液体喷射器件及封装结构
CN114536976B (zh) * 2022-02-11 2023-07-07 北京优利绚彩科技发展有限公司 一种用于办公设备的喷墨式打印机
CN116021889A (zh) * 2023-01-10 2023-04-28 北京大学 压电式打印喷头及压电式打印喷头组件

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3427323A1 (de) * 1984-07-25 1986-03-27 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur herstellung eines aerosolstromes
US6042223A (en) * 1996-07-26 2000-03-28 Seiko Epson Corporation Ink jet type recording head
JP3820589B2 (ja) * 2003-09-26 2006-09-13 富士写真フイルム株式会社 液体吐出ヘッドとその製造方法及びインクジェット記録装置
US7488389B2 (en) * 2004-03-26 2009-02-10 Fujifilm Corporation Nozzle device, film forming apparatus and method using the same, inorganic electroluminescence device, inkjet head, and ultrasonic transducer array
US7565723B2 (en) * 2004-03-30 2009-07-28 Brother Kogyo Kabushik Kaisha Piezoelectric actuator and method of fabricating piezoelectric actuator
JP2005317952A (ja) * 2004-03-30 2005-11-10 Brother Ind Ltd 圧電アクチュエータ、インクジェットヘッド及びそれらの製造方法
JP2006032485A (ja) * 2004-07-13 2006-02-02 Brother Ind Ltd 圧電膜形成方法

Also Published As

Publication number Publication date
DE602007012162D1 (de) 2011-03-10
EP1837180B1 (de) 2011-01-26
US20070216234A1 (en) 2007-09-20
CN101041292A (zh) 2007-09-26
EP1837180A1 (de) 2007-09-26
CN101041292B (zh) 2010-06-16

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