ATE497588T1 - Chip-transfervorrichtung mit einrichtung zum ausgleich der schwerkraft - Google Patents

Chip-transfervorrichtung mit einrichtung zum ausgleich der schwerkraft

Info

Publication number
ATE497588T1
ATE497588T1 AT05739841T AT05739841T ATE497588T1 AT E497588 T1 ATE497588 T1 AT E497588T1 AT 05739841 T AT05739841 T AT 05739841T AT 05739841 T AT05739841 T AT 05739841T AT E497588 T1 ATE497588 T1 AT E497588T1
Authority
AT
Austria
Prior art keywords
gravity compensation
distance
chip transfer
compensation device
transfer device
Prior art date
Application number
AT05739841T
Other languages
English (en)
Inventor
Joep Stokkermans
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE497588T1 publication Critical patent/ATE497588T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0446—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/001—Arrangements compensating weight or flexion on parts of the machine
    • B23Q11/0017—Arrangements compensating weight or flexion on parts of the machine compensating the weight of vertically moving elements, e.g. by balancing liftable machine parts
    • B23Q11/0025—Arrangements compensating weight or flexion on parts of the machine compensating the weight of vertically moving elements, e.g. by balancing liftable machine parts using resilient means, e.g. springs, hydraulic dampers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/28—Counterweights, i.e. additional weights counterbalancing inertia forces induced by the reciprocating movement of masses in the system, e.g. of pistons attached to an engine crankshaft; Attaching or mounting same
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00—Purpose; Design features
    • F16F2230/0052—Physically guiding or influencing
    • F16F2230/0064—Physically guiding or influencing using a cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H19/00—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion
    • F16H19/02—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion
    • F16H19/06—Gearings comprising essentially only toothed gears or friction members and not capable of conveying indefinitely-continuing rotary motion for interconverting rotary or oscillating motion and reciprocating motion comprising flexible members, e.g. an endless flexible member

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Manipulator (AREA)
  • Golf Clubs (AREA)
  • Networks Using Active Elements (AREA)
  • Disintegrating Or Milling (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Die Bonding (AREA)
  • Ink Jet (AREA)
AT05739841T 2004-05-28 2005-05-23 Chip-transfervorrichtung mit einrichtung zum ausgleich der schwerkraft ATE497588T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04102403 2004-05-28
PCT/IB2005/051666 WO2005116487A1 (en) 2004-05-28 2005-05-23 Gravity compensation device

Publications (1)

Publication Number Publication Date
ATE497588T1 true ATE497588T1 (de) 2011-02-15

Family

ID=34967680

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05739841T ATE497588T1 (de) 2004-05-28 2005-05-23 Chip-transfervorrichtung mit einrichtung zum ausgleich der schwerkraft

Country Status (8)

Country Link
US (1) US7677523B2 (de)
EP (1) EP1753977B1 (de)
JP (1) JP2008501595A (de)
CN (1) CN1961167B (de)
AT (1) ATE497588T1 (de)
DE (1) DE602005026211D1 (de)
TW (1) TW200607746A (de)
WO (1) WO2005116487A1 (de)

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US20060185563A1 (en) * 2004-07-30 2006-08-24 Sweere Harry C Lift mechanism systems and methods
DE102008039981B3 (de) * 2008-08-27 2010-04-08 Deutsches Zentrum für Luft- und Raumfahrt e.V. Vorrichtung zur anteiligen Kompensation der Schwerkraft auf ein Testobjekt
CN102537206B (zh) * 2010-12-07 2014-10-22 萧柏森 重力补偿装置
MX2013007433A (es) * 2010-12-24 2014-02-03 Power Plants Dmcc G Tecnologia para planta de energia electrica gravitacional.
US8517321B2 (en) 2010-12-28 2013-08-27 Po-Sen Hsiao Gravity compensation apparatus
US8960632B2 (en) 2011-07-05 2015-02-24 Mediamounts, Ltd. Dual bar linkage monitor support with adustment feature
CN104220801B (zh) 2012-03-30 2017-07-21 爱格升有限公司 平衡提升机构及其方法
JP5622976B2 (ja) * 2012-07-18 2014-11-12 パナソニック株式会社 気体バネ装置、それを用いたバランサー装置及びアクチュエータ
CN102963852B (zh) * 2012-08-24 2015-05-13 深圳市海亚科技发展有限公司 重力平衡机构
US9297719B2 (en) * 2013-04-26 2016-03-29 Honda Patents & Technologies North America, Llc Flight control system loading test apparatus and method
CN105531637B (zh) * 2013-07-30 2018-12-18 惠普发展公司，有限责任合伙企业 用于设备的支撑组件
CN104422598B (zh) * 2013-08-19 2019-03-08 徕卡显微系统(上海)有限公司 质量平衡装置和采用该装置的切片机
US10199254B2 (en) * 2015-05-12 2019-02-05 Nexperia B.V. Method and system for transferring semiconductor devices from a wafer to a carrier structure
US9994407B2 (en) 2015-11-06 2018-06-12 Nxp B.V. System and method for processing a flexible substrate
US10104784B2 (en) 2015-11-06 2018-10-16 Nxp B.V. Method for making an electronic product with flexible substrate
CN105485281B (zh) * 2016-01-06 2018-08-28 清华大学 一种非线性凸轮弹簧组合机构
CN105619449B (zh) * 2016-01-18 2018-08-24 南昌大学 一种基于力反馈设备的零自由长度弹簧重力补偿方法
CZ306684B6 (cs) * 2016-02-24 2017-05-03 EKOTES TRADE spol. s r.o. Mechanismus k optimalizaci ovládací síly s plynulou automatickou změnou převodového poměru
US10192773B2 (en) 2016-06-20 2019-01-29 Nexperia B.V. Semiconductor device positioning system and method for semiconductor device positioning
CN106763484B (zh) * 2016-12-09 2019-12-31 博众精工科技股份有限公司 一种高速大行程重力补偿机构
CN108731967B (zh) * 2017-04-13 2022-05-24 徕卡显微系统(上海)有限公司 质量平衡装置及具有其的旋转式切片机
CN109540492A (zh) * 2018-12-20 2019-03-29 上海泽楷机电设备有限公司 一种耐久性试验机
CN112196961B (zh) * 2020-09-02 2021-10-19 成都开图医疗系统科技有限公司 一种力矩平衡器
CN112643357B (zh) * 2020-09-09 2022-08-19 安徽裕隆重工装备制造有限公司 一种龙门式cnc加工中心用移动装置
CN116324011B (zh) * 2020-10-19 2025-10-17 应用材料公司 供应布置、真空处理系统和在真空处理系统中向移动装置进行供应的方法
JP7643300B2 (ja) * 2021-07-26 2025-03-11 三菱自動車工業株式会社 吊り上げ機
WO2026077613A1 (en) * 2024-10-10 2026-04-16 Asml Netherlands B.V. Bonding tool
CN121345937A (zh) * 2025-11-24 2026-01-16 大连理工大学 一种控制大跨桥梁低频竖弯涡振的调谐质量阻尼装置

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Also Published As

Publication number Publication date
CN1961167B (zh) 2011-05-11
TW200607746A (en) 2006-03-01
DE602005026211D1 (de) 2011-03-17
EP1753977B1 (de) 2011-02-02
CN1961167A (zh) 2007-05-09
JP2008501595A (ja) 2008-01-24
WO2005116487A1 (en) 2005-12-08
US20080061275A1 (en) 2008-03-13
EP1753977A1 (de) 2007-02-21
US7677523B2 (en) 2010-03-16

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