ATE498117T1 - Durchflussmesser mit siliziumströmungsrohr - Google Patents

Durchflussmesser mit siliziumströmungsrohr

Info

Publication number
ATE498117T1
ATE498117T1 AT08075910T AT08075910T ATE498117T1 AT E498117 T1 ATE498117 T1 AT E498117T1 AT 08075910 T AT08075910 T AT 08075910T AT 08075910 T AT08075910 T AT 08075910T AT E498117 T1 ATE498117 T1 AT E498117T1
Authority
AT
Austria
Prior art keywords
flow
silicon
tube
carrier
flow tube
Prior art date
Application number
AT08075910T
Other languages
English (en)
Inventor
Theodorus Simon Josef Lammerink
Marcel Dijkstra
Jeroen Haneveld
Remco John Wiegerink
Original Assignee
Berkin Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkin Bv filed Critical Berkin Bv
Application granted granted Critical
Publication of ATE498117T1 publication Critical patent/ATE498117T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/845—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits
    • G01F1/8468—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits
    • G01F1/8472—Coriolis or gyroscopic mass flowmeters arrangements of measuring means, e.g., of measuring conduits vibrating measuring conduits having curved measuring conduits, i.e. whereby the measuring conduits' curved center line lies within a plane
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
    • G01F1/78—Direct mass flowmeters
    • G01F1/80—Direct mass flowmeters operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted
    • G01F1/84—Coriolis or gyroscopic mass flowmeters
    • G01F1/8409—Coriolis or gyroscopic mass flowmeters constructional details
    • G01F1/844—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters
    • G01F1/8445—Coriolis or gyroscopic mass flowmeters constructional details microfluidic or miniaturised flowmeters micromachined flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Measuring Volume Flow (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Silicon Compounds (AREA)
AT08075910T 2008-01-11 2008-12-02 Durchflussmesser mit siliziumströmungsrohr ATE498117T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1034905A NL1034905C2 (nl) 2008-01-11 2008-01-11 Stromingsmeetapparaat.

Publications (1)

Publication Number Publication Date
ATE498117T1 true ATE498117T1 (de) 2011-02-15

Family

ID=39638767

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08075910T ATE498117T1 (de) 2008-01-11 2008-12-02 Durchflussmesser mit siliziumströmungsrohr

Country Status (8)

Country Link
US (1) US7895905B2 (de)
EP (1) EP2078936B1 (de)
JP (1) JP5537025B2 (de)
AT (1) ATE498117T1 (de)
DE (1) DE602008004881D1 (de)
DK (1) DK2078936T3 (de)
ES (1) ES2358161T3 (de)
NL (1) NL1034905C2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006029443B3 (de) * 2006-06-21 2008-01-31 Siemens Ag Sensor in mikromechanischer Bauweise zum Messen des Massendurchflusses nach dem Coriolis-Prinzip
US9072464B2 (en) * 2009-07-22 2015-07-07 Koninklijke Philips N.V. Thermal flow sensor integrated circuit with low response time and high sensitivity
DE102009046839A1 (de) * 2009-11-18 2011-05-19 Endress + Hauser Flowtec Ag Meßsystem mit einer zwei parallel durchströmte Meßrohre aufweisenden Rohranordnung sowie Verfahren zu deren Überwachung
JP2012247372A (ja) * 2011-05-30 2012-12-13 Nippon Mektron Ltd 圧力センサ及びその製造方法並びに圧力検出モジュール
NL2006895C2 (nl) * 2011-06-03 2012-12-04 Berkin Bv Stromingsmeetapparaat en gebruik daarvan voor het bepalen van een stroming van een medium, alsmede werkwijze daarvoor.
DE102011114506A1 (de) * 2011-09-22 2013-03-28 Technische Universität Ilmenau Verfahren und Vorrichtung zur berührungslosen Messung eines Massen- oder Volumenstromes eines elektrisch leitfähigen Fluids
NL2010064C2 (nl) 2012-12-27 2014-06-30 Berkin Bv Inrichting en werkwijze voor het bepalen van de verbrandingswaarde van een brandstof.
NL2010798C2 (nl) 2013-05-14 2014-11-24 Berkin Bv Stromingsmeetapparaat voor het meten van een stroming van een medium.
US9151652B2 (en) 2013-09-20 2015-10-06 Teledyne Instruments, Inc. Coriolis flow sensor fabricated with laminated films processes
US20160202101A1 (en) * 2015-01-12 2016-07-14 Douglas Ray Sparks Sensor structures and methods of forming using three-dimensional printing techniques
US10247385B2 (en) * 2015-05-20 2019-04-02 Philips Lighting Holding B.V. Lighting device, lens and method, having a mixing structure with a variable blurring strength
NL2016092B1 (en) * 2016-01-14 2017-07-24 Berkin Bv Coriolis flowsensor.
DE102016104551B4 (de) * 2016-03-11 2025-04-03 Krohne AG Verfahren zur Ausstattung eines Coriolis-Massedurchflussmessgeräts mit elektrischen Verbindungen
US10409295B2 (en) * 2016-12-31 2019-09-10 Applied Materials, Inc. Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
NL2019560B1 (en) 2017-09-15 2019-03-28 Berkin Bv Method of fabricating a micro machined channel
NL2020298B1 (en) * 2018-01-19 2019-07-29 Berkin Bv Coriolis flowsensor
WO2019143239A1 (en) 2018-01-18 2019-07-25 Berkin B.V. Coriolis flow sensor
DE102018119332A1 (de) * 2018-08-08 2020-02-13 Endress+Hauser Flowtec Ag Messaufnehmer und Messgerät
DE102019105736B3 (de) * 2019-03-07 2020-06-25 Endress+Hauser Flowtec Ag Coriolis-Messaufnehmer und Coriolis-Messgerät mit Coriolis-Messaufnehmer
US11280651B2 (en) * 2019-03-25 2022-03-22 Flo Technologies, Inc. Thin film thermal mass flow sensor in fluid applications
NL2023872B1 (en) 2019-09-20 2021-05-27 Berkin Bv Microelectromechanical system component comprising a free-hanging or free-standing microchannel
US11262226B2 (en) * 2020-02-17 2022-03-01 GWU Design Hybrid mass flow sensor including a thermal and coriolis principle measurement arrangements
NL2028203B1 (en) * 2021-05-12 2022-12-08 Berkin Bv Device for controlling or measuring a fluid

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58165623U (ja) * 1982-04-13 1983-11-04 横河電機株式会社 質量流量計
JPS59105522A (ja) * 1982-12-08 1984-06-18 Horiba Ltd 流量センサ−及びその製造方法
US5233213A (en) * 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
NL1001674C2 (nl) 1995-11-17 1997-05-21 Berkin Bv Debietmeter.
US6477901B1 (en) * 1999-12-21 2002-11-12 Integrated Sensing Systems, Inc. Micromachined fluidic apparatus
KR100447378B1 (ko) * 2000-05-19 2004-09-04 미쓰비시덴키 가부시키가이샤 감열식 유량 검출 소자 및 그 홀더
US7351603B2 (en) * 2004-08-20 2008-04-01 Integrated Sensing Systems, Inc. Process of making a microtube and microfluidic devices formed therewith
NL1028939C2 (nl) * 2005-05-02 2006-11-03 Berkin Bv Massa flowmeter van het Coriolistype.
NL1028938C2 (nl) * 2005-05-02 2006-11-03 Berkin Bv Massa flowmeter van het Coriolistype.
JPWO2007136069A1 (ja) * 2006-05-22 2009-10-01 大西　一正 コリオリ流量計
DE102006029443B3 (de) * 2006-06-21 2008-01-31 Siemens Ag Sensor in mikromechanischer Bauweise zum Messen des Massendurchflusses nach dem Coriolis-Prinzip

Also Published As

Publication number Publication date
EP2078936A1 (de) 2009-07-15
JP5537025B2 (ja) 2014-07-02
NL1034905C2 (nl) 2009-07-14
DE602008004881D1 (de) 2011-03-24
DK2078936T3 (da) 2011-04-18
EP2078936B1 (de) 2011-02-09
JP2009168805A (ja) 2009-07-30
US7895905B2 (en) 2011-03-01
US20090308177A1 (en) 2009-12-17
ES2358161T3 (es) 2011-05-06

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