ATE498120T1 - Flüssigkeitsdrucksensor mit ein system zum fernhalten von verunreinigungen - Google Patents

Flüssigkeitsdrucksensor mit ein system zum fernhalten von verunreinigungen

Info

Publication number
ATE498120T1
ATE498120T1 AT97951558T AT97951558T ATE498120T1 AT E498120 T1 ATE498120 T1 AT E498120T1 AT 97951558 T AT97951558 T AT 97951558T AT 97951558 T AT97951558 T AT 97951558T AT E498120 T1 ATE498120 T1 AT E498120T1
Authority
AT
Austria
Prior art keywords
deflectable member
fluid
pressure sensor
fluid pressure
solid
Prior art date
Application number
AT97951558T
Other languages
English (en)
Inventor
Christopher Grudzien
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Application granted granted Critical
Publication of ATE498120T1 publication Critical patent/ATE498120T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0654—Protection against aggressive medium in general against moisture or humidity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
AT97951558T 1996-12-11 1997-12-05 Flüssigkeitsdrucksensor mit ein system zum fernhalten von verunreinigungen ATE498120T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/763,020 US5811685A (en) 1996-12-11 1996-12-11 Fluid pressure sensor with contaminant exclusion system
PCT/US1997/022291 WO1998026263A1 (en) 1996-12-11 1997-12-05 Fluid pressure sensor with contaminant exclusion system

Publications (1)

Publication Number Publication Date
ATE498120T1 true ATE498120T1 (de) 2011-02-15

Family

ID=25066674

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97951558T ATE498120T1 (de) 1996-12-11 1997-12-05 Flüssigkeitsdrucksensor mit ein system zum fernhalten von verunreinigungen

Country Status (8)

Country Link
US (1) US5811685A (de)
EP (1) EP0944818B1 (de)
JP (1) JP3280989B2 (de)
KR (1) KR100363947B1 (de)
AT (1) ATE498120T1 (de)
DE (1) DE69740116D1 (de)
TW (1) TW409181B (de)
WO (1) WO1998026263A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6443015B1 (en) * 1999-09-10 2002-09-03 Mks Instruments, Inc. Baffle for a capacitive pressure sensor
US6782754B1 (en) 2000-07-07 2004-08-31 Rosemount, Inc. Pressure transmitter for clean environments
JP4717237B2 (ja) * 2001-03-26 2011-07-06 株式会社鷺宮製作所 圧力センサ用ダイヤフラム保護カバーおよび圧力センサ
US6901808B1 (en) 2002-02-12 2005-06-07 Lam Research Corporation Capacitive manometer having reduced process drift
US7252011B2 (en) * 2002-03-11 2007-08-07 Mks Instruments, Inc. Surface area deposition trap
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
US7240561B2 (en) * 2004-09-29 2007-07-10 Rosemount Inc. Process adapter
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
US7679033B2 (en) * 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
JP2007121196A (ja) * 2005-10-31 2007-05-17 Denso Corp 圧力センサ
US7779698B2 (en) * 2007-11-08 2010-08-24 Rosemount Inc. Pressure sensor
CN104145179B (zh) * 2011-10-11 2016-11-09 Mks仪器公司 压力传感器
JP5993312B2 (ja) * 2013-01-16 2016-09-14 東京エレクトロン株式会社 圧力測定器及びその圧力測定器を備える基板処理装置
US9459170B2 (en) * 2013-09-26 2016-10-04 Rosemount Inc. Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure
US10352796B2 (en) * 2014-07-28 2019-07-16 Ford Global Technologies, Llc Protective cover for pressure sensor nozzle
EP3109612A1 (de) 2015-06-26 2016-12-28 Nina Wojtas Mems-abscheidungsfalle für einen unterdruckumformerschutz
US9573544B1 (en) * 2015-08-24 2017-02-21 Ford Global Technologies, Llc Protective structures for air sensors in a vehicle body structure
US11686639B2 (en) * 2018-01-09 2023-06-27 Kistler Holding Ag Device for protecting a sensor's membrane from electromagnetic radiation
CN111801561A (zh) * 2018-03-02 2020-10-20 格兰富控股联合股份公司 压力传感器
CN114264403A (zh) * 2021-12-03 2022-04-01 北京晨晶精仪电子有限公司 真空规颗粒阻挡结构

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US533136A (en) * 1895-01-29 Water-filter
US1700449A (en) * 1925-06-05 1929-01-29 Frank C Reilly Pressure gauge
US3231091A (en) * 1962-10-29 1966-01-25 Pfaudler Permutit Inc Separator
US4177496A (en) * 1976-03-12 1979-12-04 Kavlico Corporation Capacitive pressure transducer
DE3580606D1 (de) * 1984-03-31 1991-01-03 Mitsubishi Motors Corp Regenerationssystem fuer eine diesel-partikel-oxydierungseinrichtung.
US4562742A (en) * 1984-08-07 1986-01-07 Bell Microcomponents, Inc. Capacitive pressure transducer
US4785669A (en) * 1987-05-18 1988-11-22 Mks Instruments, Inc. Absolute capacitance manometers
US5315877A (en) * 1993-02-19 1994-05-31 Kavlico Corporation Low cost versatile pressure transducer
US5515711A (en) * 1995-06-26 1996-05-14 Mks Instruments, Inc. Pressure measurement and calibration apparatus using gravity-induced diaphragm deflection

Also Published As

Publication number Publication date
EP0944818B1 (de) 2011-02-09
KR20000057436A (ko) 2000-09-15
DE69740116D1 (de) 2011-03-24
US5811685A (en) 1998-09-22
TW409181B (en) 2000-10-21
EP0944818A4 (de) 2000-06-14
JP2000512388A (ja) 2000-09-19
EP0944818A1 (de) 1999-09-29
JP3280989B2 (ja) 2002-05-13
WO1998026263A1 (en) 1998-06-18
KR100363947B1 (ko) 2002-12-11

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