ATE498991T1 - Elektrode und vorrichtung zur erzeugung eines atmosphärendruck-plasmas - Google Patents

Elektrode und vorrichtung zur erzeugung eines atmosphärendruck-plasmas

Info

Publication number
ATE498991T1
ATE498991T1 AT08155096T AT08155096T ATE498991T1 AT E498991 T1 ATE498991 T1 AT E498991T1 AT 08155096 T AT08155096 T AT 08155096T AT 08155096 T AT08155096 T AT 08155096T AT E498991 T1 ATE498991 T1 AT E498991T1
Authority
AT
Austria
Prior art keywords
electrode
atmospheric pressure
generating
pressure plasma
plasma
Prior art date
Application number
AT08155096T
Other languages
English (en)
Inventor
Solitario Nesti
Leopoldo Corsi
Maurizio Poggiali
Marco Barbieri
Original Assignee
Next Technology Tecnotessile Societa Naz Di Ricerca R L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Next Technology Tecnotessile Societa Naz Di Ricerca R L filed Critical Next Technology Tecnotessile Societa Naz Di Ricerca R L
Application granted granted Critical
Publication of ATE498991T1 publication Critical patent/ATE498991T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32825—Working under atmospheric pressure or higher
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32366—Localised processing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
AT08155096T 2007-04-26 2008-04-24 Elektrode und vorrichtung zur erzeugung eines atmosphärendruck-plasmas ATE498991T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000306A ITBO20070306A1 (it) 2007-04-26 2007-04-26 Elettrodo e relativo apparato per la generazione di plasma a pressione atmosferica.

Publications (1)

Publication Number Publication Date
ATE498991T1 true ATE498991T1 (de) 2011-03-15

Family

ID=39590423

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08155096T ATE498991T1 (de) 2007-04-26 2008-04-24 Elektrode und vorrichtung zur erzeugung eines atmosphärendruck-plasmas

Country Status (4)

Country Link
EP (1) EP1993330B1 (de)
AT (1) ATE498991T1 (de)
DE (1) DE602008004943D1 (de)
IT (1) ITBO20070306A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111987390A (zh) * 2020-09-27 2020-11-24 陈玲玲 一种节能环保型多功能蓄电装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6118218A (en) 1999-02-01 2000-09-12 Sigma Technologies International, Inc. Steady-state glow-discharge plasma at atmospheric pressure
US6441553B1 (en) 1999-02-01 2002-08-27 Sigma Technologies International, Inc. Electrode for glow-discharge atmospheric-pressure plasma treatment
SE522898C2 (sv) * 2001-06-14 2004-03-16 Aluwave Ab Förfarande för att minska dimensionerna hos mekaniska komponenter avsedda för mikrovågstillämpningar genom användning av aluminium
US7220462B2 (en) * 2004-04-27 2007-05-22 Praxair Technology, Inc. Method and electrode assembly for non-equilibrium plasma treatment
JP4674512B2 (ja) * 2005-09-12 2011-04-20 パナソニック株式会社 プラズマ処理装置

Also Published As

Publication number Publication date
EP1993330A1 (de) 2008-11-19
EP1993330B1 (de) 2011-02-16
ITBO20070306A1 (it) 2008-10-27
DE602008004943D1 (de) 2011-03-31

Similar Documents

Publication Publication Date Title
EP2388526A3 (de) Elektrokamin
DE602006021190D1 (de) Behandlungsstation zur teilchenbombardierung eines patienten und teilchentherapieinstallation
CA125100S (en) Display for gas delivering apparatus
DE602007013942D1 (de) Vorrichtung zur energieversorgung eines objekts
DE602007014215D1 (de) Vorrichtung zur einführung zwischen anatomischen strukturen
EP1997398A3 (de) Bestrahlungsvorrichtung zum Aushärten von Fingernägel-Modellagemassen
ATE537916T1 (de) Vorrichtung zur reinigung von gegenständen
ATE429799T1 (de) Vorrichtung zur erzeugung eines plasma-jets
WO2009104918A3 (en) Apparatus and method for processing substrate
SG131897A1 (en) Gas shower, lithographic apparatus and use of a gas shower
TW200801224A (en) Apparatus and method for synthesizing carbon nanotube film
TW200706689A (en) Gas providing member and processing device
WO2008036415A3 (en) Compact e-beam source for generating x-rays
DE502004005576D1 (de) Vorrichtung zur Erzeugung eines Reduktionsmittel-Luft-Gemisches
TW200717864A (en) Semiconductor light emitting device and apparatus
DE602007014249D1 (en) Lung
DE602006011019D1 (de) Vorrichtung zur erzeugung eines interpolierten bildes
TW200742119A (en) Light emitting apparatus
WO2009000933A9 (de) Verfahren und vorrichtung zum behandeln eines halbleitersubstrats
CA119472S (en) Air freshener device
DE112006003558B8 (de) Vorrichtung zur Erzeugung eines Reifenluftdrucks
ATE529911T1 (de) Vorrichtung zum zuführen von luft zu einer brennstoffzelle
DE602008004943D1 (de) Elektrode und Vorrichtung zur Erzeugung eines Atmosphärendruck-Plasmas
WO2006138441A3 (en) Boost devices and methods of using them
DE502006004200D1 (de) Unterdrucksystem

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties