ATE501988T1 - Aluminiumoxidgesintertes produkt und herstellungsverfahren dafür - Google Patents

Aluminiumoxidgesintertes produkt und herstellungsverfahren dafür

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Publication number
ATE501988T1
ATE501988T1 AT09252108T AT09252108T ATE501988T1 AT E501988 T1 ATE501988 T1 AT E501988T1 AT 09252108 T AT09252108 T AT 09252108T AT 09252108 T AT09252108 T AT 09252108T AT E501988 T1 ATE501988 T1 AT E501988T1
Authority
AT
Austria
Prior art keywords
aluminum oxide
sintered product
oxide sintered
grains
rare
Prior art date
Application number
AT09252108T
Other languages
English (en)
Inventor
Naomi Teratani
Yuji Katsuda
Yoshimasa Kobayashi
Original Assignee
Ngk Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ngk Insulators Ltd filed Critical Ngk Insulators Ltd
Application granted granted Critical
Publication of ATE501988T1 publication Critical patent/ATE501988T1/de

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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
    • C04B35/62655—Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying
    • C—CHEMISTRY; METALLURGY
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C04B35/645—Pressure sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • H10P72/722—Details of electrostatic chucks
    • C—CHEMISTRY; METALLURGY
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
    • C04B2235/3206—Magnesium oxides or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • C04B2235/3222—Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3229—Cerium oxides or oxide-forming salts thereof
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
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    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/38—Non-oxide ceramic constituents or additives
    • C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
    • C04B2235/3865—Aluminium nitrides
    • C—CHEMISTRY; METALLURGY
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/44—Metal salt constituents or additives chosen for the nature of the anions, e.g. hydrides or acetylacetonate
    • C04B2235/444—Halide containing anions, e.g. bromide, iodate, chlorite
    • C04B2235/445—Fluoride containing anions, e.g. fluosilicate
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    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
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    • C04B2235/85—Intergranular or grain boundary phases
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AT09252108T 2008-09-01 2009-09-01 Aluminiumoxidgesintertes produkt und herstellungsverfahren dafür ATE501988T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008223910 2008-09-01
JP2009174334A JP5203313B2 (ja) 2008-09-01 2009-07-27 酸化アルミニウム焼結体及びその製法

Publications (1)

Publication Number Publication Date
ATE501988T1 true ATE501988T1 (de) 2011-04-15

Family

ID=41572561

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09252108T ATE501988T1 (de) 2008-09-01 2009-09-01 Aluminiumoxidgesintertes produkt und herstellungsverfahren dafür

Country Status (8)

Country Link
US (1) US8236722B2 (de)
EP (1) EP2163535B1 (de)
JP (1) JP5203313B2 (de)
KR (1) KR101563007B1 (de)
CN (1) CN104150884B (de)
AT (1) ATE501988T1 (de)
DE (1) DE602009000902D1 (de)
TW (1) TWI447088B (de)

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JP5501040B2 (ja) * 2009-03-26 2014-05-21 日本碍子株式会社 アルミナ焼結体、その製法及び半導体製造装置部材
JP6015012B2 (ja) * 2011-02-04 2016-10-26 住友大阪セメント株式会社 静電チャック部材
KR101722914B1 (ko) * 2011-03-11 2017-04-05 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 내화성 물체, 유리 오버플로우 형성 블록, 및 유리 물체의 제조 방법
CN103261118A (zh) 2011-03-30 2013-08-21 圣戈本陶瓷及塑料股份有限公司 耐火物体、玻璃溢流形成块、以及形成和使用该耐火物体的方法
WO2013106609A2 (en) 2012-01-11 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Refractory object and process of forming a glass sheet using the refractory object
JP5872998B2 (ja) * 2012-04-26 2016-03-01 日本特殊陶業株式会社 アルミナ焼結体、それを備える部材、および半導体製造装置
WO2016121286A1 (ja) * 2015-01-29 2016-08-04 京セラ株式会社 試料保持具
EP3262011A4 (de) 2015-02-24 2018-08-01 Saint-Gobain Ceramics&Plastics, Inc. Feuerfester artikel und verfahren zur herstellung
CN106892648B (zh) * 2015-12-21 2020-06-09 中国石油天然气股份有限公司 一种球形氧化铝的制备方法
JP7049108B2 (ja) * 2017-12-25 2022-04-06 日本特殊陶業株式会社 静電チャック
KR101965895B1 (ko) * 2018-11-08 2019-04-04 주식회사 케이에스엠컴포넌트 정전 척 및 그 제조 방법
US20240409468A1 (en) * 2021-10-18 2024-12-12 Niterra Co., Ltd. Alumina-based sintered body and electrostatic chuck

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EP0225781B1 (de) * 1985-12-06 1991-09-18 Hitachi, Ltd. Keramiksinter mit hohem Wärmeausdehnungskoeffizient und ein Verbundkörper aus demselben und Metall
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CN104150884A (zh) 2014-11-19
EP2163535A1 (de) 2010-03-17
KR101563007B1 (ko) 2015-10-23
DE602009000902D1 (de) 2011-04-28
KR20100027074A (ko) 2010-03-10
CN104150884B (zh) 2016-04-06
TWI447088B (zh) 2014-08-01
TW201012774A (en) 2010-04-01
EP2163535B1 (de) 2011-03-16
US20100056358A1 (en) 2010-03-04
JP2010077012A (ja) 2010-04-08
US8236722B2 (en) 2012-08-07
JP5203313B2 (ja) 2013-06-05

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