ATE504825T1 - Gerichtete beleuchtung und verfahren zur erkennung dreidimensionaler information - Google Patents

Gerichtete beleuchtung und verfahren zur erkennung dreidimensionaler information

Info

Publication number
ATE504825T1
ATE504825T1 AT01973786T AT01973786T ATE504825T1 AT E504825 T1 ATE504825 T1 AT E504825T1 AT 01973786 T AT01973786 T AT 01973786T AT 01973786 T AT01973786 T AT 01973786T AT E504825 T1 ATE504825 T1 AT E504825T1
Authority
AT
Austria
Prior art keywords
images
image
detecting
dimensional information
evaluating
Prior art date
Application number
AT01973786T
Other languages
English (en)
Inventor
Kenneth Chapman
Sam Dahan
Original Assignee
Electro Scient Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scient Ind Inc filed Critical Electro Scient Ind Inc
Application granted granted Critical
Publication of ATE504825T1 publication Critical patent/ATE504825T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/55—Depth or shape recovery from multiple images
    • G06T7/586—Depth or shape recovery from multiple images from multiple light sources, e.g. photometric stereo
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/60—Analysis of geometric attributes
    • G06T7/62—Analysis of geometric attributes of area, perimeter, diameter or volume
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30141—Printed circuit board [PCB]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30164—Workpiece; Machine component

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Quality & Reliability (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Geometry (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
AT01973786T 2000-04-28 2001-04-26 Gerichtete beleuchtung und verfahren zur erkennung dreidimensionaler information ATE504825T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US20077600P 2000-04-28 2000-04-28
PCT/US2001/013477 WO2001084126A2 (en) 2000-04-28 2001-04-26 Directional lighting and method to distinguish three dimensional information

Publications (1)

Publication Number Publication Date
ATE504825T1 true ATE504825T1 (de) 2011-04-15

Family

ID=22743135

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01973786T ATE504825T1 (de) 2000-04-28 2001-04-26 Gerichtete beleuchtung und verfahren zur erkennung dreidimensionaler information

Country Status (6)

Country Link
US (1) US6901160B2 (de)
EP (1) EP1277042B1 (de)
AT (1) ATE504825T1 (de)
AU (1) AU2001295198A1 (de)
DE (1) DE60144371D1 (de)
WO (1) WO2001084126A2 (de)

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GB0202266D0 (en) * 2002-01-31 2002-03-20 Univ Aberdeen A method and device to ascertain physical characteristics of porous media
US6870949B2 (en) 2003-02-26 2005-03-22 Electro Scientific Industries Coaxial narrow angle dark field lighting
US7599576B2 (en) 2004-01-23 2009-10-06 Electro Scientific Industries, Inc. Image subtraction of illumination artifacts
JP4899560B2 (ja) * 2005-08-11 2012-03-21 富士通セミコンダクター株式会社 欠陥検査装置及びその感度校正方法、欠陥検出感度校正用基板及びその製造方法
US8331678B2 (en) * 2005-10-12 2012-12-11 Optopo Inc. Systems and methods for identifying a discontinuity in the boundary of an object in an image
NL1031853C2 (nl) * 2006-05-22 2007-11-23 Eagle Vision Systems B V Werkwijze en inrichting voor het detecteren van een ongewenst object of defect.
EP2057609B2 (de) † 2006-08-18 2013-11-27 De La Rue International Limited Verfahren und vorrichtung zur detektion von erhöhtem material
WO2009016614A2 (en) * 2007-08-02 2009-02-05 Emza Visual Sense Ltd. Universal counting and measurement system
US9508139B2 (en) * 2011-06-16 2016-11-29 Sikorsky Aircraft Corporation Apparatus and method to automatically distinguish between contamination and degradation of an article
US9924142B2 (en) * 2012-11-21 2018-03-20 Omnivision Technologies, Inc. Camera array systems including at least one bayer type camera and associated methods
DE102013108722B4 (de) * 2013-08-12 2022-10-06 Thyssenkrupp Steel Europe Ag Verfahren und Vorrichtung zum Erfassen von Defekten einer ebenen Oberfläche
WO2015058982A1 (en) * 2013-10-24 2015-04-30 Koninklijke Philips N.V. Defect inspection system and method
ES2942266T3 (es) 2013-12-27 2023-05-31 Jfe Steel Corp Método de detección de defectos de superficie y dispositivo de detección de defectos de superficie
KR102534392B1 (ko) 2014-12-22 2023-05-19 피렐리 타이어 소시에떼 퍼 아찌오니 생산라인에서 타이어를 제어하기 위한 기기
RU2696343C2 (ru) 2014-12-22 2019-08-01 Пирелли Тайр С.П.А. Способ и устройство для контроля шин на производственной линии
WO2017222365A1 (en) * 2016-06-22 2017-12-28 Thomas Buitelaar Method for testing banknote quality and device for testing banknote quality
JP6973205B2 (ja) * 2018-03-15 2021-11-24 オムロン株式会社 画像処理システム、画像処理装置、画像処理プログラム
US12260602B2 (en) * 2019-12-09 2025-03-25 Ars Techne Corporation Image processing method, program, and image processing device
PT3869176T (pt) * 2020-02-21 2025-08-04 Continental Reifen Deutschland Gmbh Metodo de teste de pneus
CN112326673B (zh) * 2020-11-13 2022-06-07 南京航空航天大学 基于机器视觉的注塑件表面缺陷检测方法和装置
US12602808B2 (en) 2021-07-13 2026-04-14 General Electric Company Method for inspecting an object
US12586226B2 (en) 2021-07-13 2026-03-24 General Electric Company Method for inspecting an object
US12610116B2 (en) 2022-11-11 2026-04-21 General Electric Company Inspection systems and methods employing directional light for enhanced imaging
US12596076B2 (en) 2022-11-11 2026-04-07 General Electric Company Inspection systems and methods employing different wavelength directional light for enhanced imaging
US12495214B2 (en) 2023-03-15 2025-12-09 General Electric Company Pulse illumination imaging of a target element
US12593131B2 (en) 2023-09-05 2026-03-31 General Electric Company Velocity matching imaging of a target element

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JPS63215952A (ja) * 1987-03-05 1988-09-08 Mazda Motor Corp 表面性状の検査方法
JPH04279848A (ja) * 1991-03-08 1992-10-05 Kawasaki Steel Corp 熱間圧延における鋼板表面状態観察装置及び観察方法
JPH06311307A (ja) * 1993-04-22 1994-11-04 Minolta Camera Co Ltd 画像形成装置
GB9418981D0 (en) * 1994-09-21 1994-11-09 Univ Glasgow Apparatus and method for carrying out analysis of samples
JP2999679B2 (ja) * 1994-11-30 2000-01-17 大日本スクリーン製造株式会社 パターン欠陥検査装置
DE19511534C2 (de) 1995-03-29 1998-01-22 Fraunhofer Ges Forschung Verfahren und Vorrichtung zur Erfassung von 3D-Fehlstellen bei der automatischen Inspektion von Oberflächen mit Hilfe farbtüchtiger Bildauswertungssysteme
US5949901A (en) * 1996-03-21 1999-09-07 Nichani; Sanjay Semiconductor device image inspection utilizing image subtraction and threshold imaging
JP3264634B2 (ja) * 1997-02-18 2002-03-11 松下電器産業株式会社 表面検査装置及び方法
US5943125A (en) * 1997-02-26 1999-08-24 Acuity Imaging, Llc Ring illumination apparatus for illuminating reflective elements on a generally planar surface
US5859698A (en) * 1997-05-07 1999-01-12 Nikon Corporation Method and apparatus for macro defect detection using scattered light
US6658144B1 (en) * 1997-05-23 2003-12-02 Micron Technology, Inc. Diffraction tomography for monitoring latent image formation
EP0898163B1 (de) 1997-08-22 2000-11-08 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Verfahren und Vorrichtung zur automatischen Prüfung bewegter Oberflächen
US6353222B1 (en) * 1998-09-03 2002-03-05 Applied Materials, Inc. Determining defect depth and contour information in wafer structures using multiple SEM images
US6177682B1 (en) * 1998-10-21 2001-01-23 Novacam Tyechnologies Inc. Inspection of ball grid arrays (BGA) by using shadow images of the solder balls
US6327374B1 (en) 1999-02-18 2001-12-04 Thermo Radiometrie Oy Arrangement and method for inspection of surface quality

Also Published As

Publication number Publication date
WO2001084126A3 (en) 2002-04-11
US6901160B2 (en) 2005-05-31
WO2001084126A2 (en) 2001-11-08
EP1277042A2 (de) 2003-01-22
AU2001295198A1 (en) 2001-11-12
US20020009218A1 (en) 2002-01-24
DE60144371D1 (de) 2011-05-19
EP1277042B1 (de) 2011-04-06

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