ATE507456T1 - Formmessvorrichtungssonde und formmessvorrichtung - Google Patents

Formmessvorrichtungssonde und formmessvorrichtung

Info

Publication number
ATE507456T1
ATE507456T1 AT10155699T AT10155699T ATE507456T1 AT E507456 T1 ATE507456 T1 AT E507456T1 AT 10155699 T AT10155699 T AT 10155699T AT 10155699 T AT10155699 T AT 10155699T AT E507456 T1 ATE507456 T1 AT E507456T1
Authority
AT
Austria
Prior art keywords
movement portion
swing
linear movement
shape measurement
vertical direction
Prior art date
Application number
AT10155699T
Other languages
English (en)
Inventor
Kenichiro Hatta
Takanori Funabashi
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Application granted granted Critical
Publication of ATE507456T1 publication Critical patent/ATE507456T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G01B7/012—Contact-making feeler heads therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
AT10155699T 2009-03-12 2010-03-05 Formmessvorrichtungssonde und formmessvorrichtung ATE507456T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009059470A JP4850265B2 (ja) 2009-03-12 2009-03-12 形状測定装置用プローブ及び形状測定装置

Publications (1)

Publication Number Publication Date
ATE507456T1 true ATE507456T1 (de) 2011-05-15

Family

ID=42288604

Family Applications (1)

Application Number Title Priority Date Filing Date
AT10155699T ATE507456T1 (de) 2009-03-12 2010-03-05 Formmessvorrichtungssonde und formmessvorrichtung

Country Status (7)

Country Link
EP (1) EP2228620B1 (de)
JP (1) JP4850265B2 (de)
KR (1) KR101140496B1 (de)
CN (1) CN101839682B (de)
AT (1) ATE507456T1 (de)
DE (1) DE602010000028D1 (de)
TW (1) TWI438395B (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5838370B2 (ja) * 2013-01-18 2016-01-06 パナソニックＩｐマネジメント株式会社 三次元形状測定装置用プローブ
JP5946884B2 (ja) * 2014-10-24 2016-07-06 ファナック株式会社 対象物の位置を検出する位置検出システム
JP5846462B1 (ja) * 2014-10-28 2016-01-20 株式会社東京精密 形状測定装置
JP6799815B2 (ja) * 2018-05-21 2020-12-16 パナソニックＩｐマネジメント株式会社 形状測定用プローブ
CN109631968B (zh) * 2018-12-05 2020-05-19 西安交通大学 一种磁浮气浮综合作用二维扫描测头
CN110440698B (zh) * 2019-08-14 2020-12-11 大连理工大学 一种测量任意表面形位误差的激光测量测头装置
CN112781495B (zh) * 2020-12-31 2022-07-12 合肥工业大学 一种基于悬浮激光结构的三维接触触发式测量探头
JP7763680B2 (ja) * 2022-02-17 2025-11-04 株式会社東京精密 タッチプローブ、及び、接触検知方法
WO2025104383A1 (fr) 2023-11-15 2025-05-22 Fogale Optique Procede de moulage d'un element optique par controle de parametres de moulage
CN118896563B (zh) * 2024-07-15 2025-09-05 深圳市中图仪器股份有限公司 用于获取被测物的表面形貌的探测组件的探针安装结构

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3715698A1 (de) * 1987-05-12 1988-12-01 Stiefelmayer Kg C Tastkopf
JPH01170243A (ja) 1987-12-25 1989-07-05 Hitachi Cable Ltd ローカルエリアネットワークの障害監視方式
GB9114945D0 (en) 1991-07-11 1991-08-28 Renishaw Metrology Ltd Touch probe
JPH10170243A (ja) 1996-12-11 1998-06-26 Matsushita Electric Ind Co Ltd 形状測定装置及び方法
JP4557657B2 (ja) * 2004-09-28 2010-10-06 キヤノン株式会社 接触式プローブおよび形状測定装置
JP4663378B2 (ja) * 2005-04-01 2011-04-06 パナソニック株式会社 形状測定装置及び方法
JP4933775B2 (ja) * 2005-12-02 2012-05-16 独立行政法人理化学研究所 微小表面形状測定プローブ
WO2007135857A1 (ja) * 2006-05-18 2007-11-29 Panasonic Corporation 形状測定装置用プローブ及び形状測定装置
JP5171108B2 (ja) * 2007-05-23 2013-03-27 パナソニック株式会社 三次元形状測定装置

Also Published As

Publication number Publication date
CN101839682B (zh) 2012-04-18
EP2228620A1 (de) 2010-09-15
JP2010210567A (ja) 2010-09-24
KR20100103394A (ko) 2010-09-27
DE602010000028D1 (de) 2011-06-09
JP4850265B2 (ja) 2012-01-11
EP2228620B1 (de) 2011-04-27
TWI438395B (zh) 2014-05-21
KR101140496B1 (ko) 2012-05-07
TW201102614A (en) 2011-01-16
CN101839682A (zh) 2010-09-22

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Legal Events

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