ATE509427T1 - Lambwellenresonator - Google Patents

Lambwellenresonator

Info

Publication number
ATE509427T1
ATE509427T1 AT08842063T AT08842063T ATE509427T1 AT E509427 T1 ATE509427 T1 AT E509427T1 AT 08842063 T AT08842063 T AT 08842063T AT 08842063 T AT08842063 T AT 08842063T AT E509427 T1 ATE509427 T1 AT E509427T1
Authority
AT
Austria
Prior art keywords
wave resonator
fingers
piezoelectric layer
lamb wave
lamb
Prior art date
Application number
AT08842063T
Other languages
English (en)
Inventor
Didier Belot
Andreia Cathelin
Alexandre Shirakawa
Jean-Marie Pham
Pierre Jary
Eric Kerherve
Original Assignee
St Microelectronics Sa
Centre Nat Rech Scient
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Sa, Centre Nat Rech Scient filed Critical St Microelectronics Sa
Application granted granted Critical
Publication of ATE509427T1 publication Critical patent/ATE509427T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT08842063T 2007-10-22 2008-10-22 Lambwellenresonator ATE509427T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0758470A FR2922696B1 (fr) 2007-10-22 2007-10-22 Resonateur a ondes de lamb
PCT/EP2008/064303 WO2009053397A1 (fr) 2007-10-22 2008-10-22 Resonateur a ondes de lamb

Publications (1)

Publication Number Publication Date
ATE509427T1 true ATE509427T1 (de) 2011-05-15

Family

ID=39185941

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08842063T ATE509427T1 (de) 2007-10-22 2008-10-22 Lambwellenresonator

Country Status (7)

Country Link
US (1) US7868517B2 (de)
EP (1) EP2203976B1 (de)
JP (1) JP5461817B2 (de)
CN (1) CN101953072B (de)
AT (1) ATE509427T1 (de)
FR (1) FR2922696B1 (de)
WO (1) WO2009053397A1 (de)

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US8661899B2 (en) 2010-03-01 2014-03-04 Sand9, Inc. Microelectromechanical gyroscopes and related apparatus and methods
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WO2011133682A1 (en) 2010-04-20 2011-10-27 Guiti Zolfagharkhani Microelectromechanical gyroscopes and related apparatus and methods
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US10707905B2 (en) 2015-06-23 2020-07-07 Skyworks Solutions, Inc. Wideband multiplexer for radio-frequency applications
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US20180308661A1 (en) 2017-04-24 2018-10-25 Applied Materials, Inc. Plasma reactor with electrode filaments
US11114284B2 (en) 2017-06-22 2021-09-07 Applied Materials, Inc. Plasma reactor with electrode array in ceiling
US10510515B2 (en) 2017-06-22 2019-12-17 Applied Materials, Inc. Processing tool with electrically switched electrode assembly
US11355321B2 (en) 2017-06-22 2022-06-07 Applied Materials, Inc. Plasma reactor with electrode assembly for moving substrate
TWI788390B (zh) 2017-08-10 2023-01-01 美商應用材料股份有限公司 用於電漿處理的分佈式電極陣列
US10873313B2 (en) 2017-09-01 2020-12-22 Skyworks Solutions, Inc. Piston mode lamb wave resonators
CN109560785B (zh) * 2017-09-27 2021-09-24 中国科学院半导体研究所 兰姆波谐振器及其制备方法
TW201941464A (zh) 2018-03-02 2019-10-16 美商天工方案公司 用於聲波濾波器之藍姆波迴圈電路
FR3079668B1 (fr) * 2018-03-29 2020-03-27 Frec'n'sys Dispositif d'onde acoustique de surface sur substrat composite
CN111490740B (zh) * 2019-01-29 2023-01-10 中国科学院半导体研究所 阵列化的分布式兰姆模态射频微机电谐振器
CN110071702B (zh) * 2019-02-19 2023-04-07 天津大学 一种带通滤波器及双工器
CN110113026B (zh) * 2019-05-22 2021-04-02 武汉敏声新技术有限公司 一种二维兰姆波谐振器
CN110880924A (zh) * 2019-12-11 2020-03-13 武汉大学 一种可调谐的薄膜体声波谐振器
CN112332795A (zh) * 2020-11-17 2021-02-05 华中科技大学 一种表面开槽的兰姆波谐振器
CN116865701A (zh) * 2023-05-19 2023-10-10 南京大学 包含贯穿孔的兰姆波谐振器

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Also Published As

Publication number Publication date
CN101953072A (zh) 2011-01-19
EP2203976A1 (de) 2010-07-07
US20090102316A1 (en) 2009-04-23
EP2203976B1 (de) 2011-05-11
FR2922696A1 (fr) 2009-04-24
JP2009147917A (ja) 2009-07-02
JP5461817B2 (ja) 2014-04-02
US7868517B2 (en) 2011-01-11
FR2922696B1 (fr) 2010-03-12
WO2009053397A1 (fr) 2009-04-30
CN101953072B (zh) 2014-07-30

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