ATE510416T1 - Mems-mikrofon - Google Patents

Mems-mikrofon

Info

Publication number
ATE510416T1
ATE510416T1 AT08862615T AT08862615T ATE510416T1 AT E510416 T1 ATE510416 T1 AT E510416T1 AT 08862615 T AT08862615 T AT 08862615T AT 08862615 T AT08862615 T AT 08862615T AT E510416 T1 ATE510416 T1 AT E510416T1
Authority
AT
Austria
Prior art keywords
mems microphone
substrate
membrane
electrode
attached
Prior art date
Application number
AT08862615T
Other languages
English (en)
Inventor
Heinz Renner
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE510416T1 publication Critical patent/ATE510416T1/de

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Micromachines (AREA)
AT08862615T 2007-12-17 2008-12-09 Mems-mikrofon ATE510416T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07123378 2007-12-17
PCT/IB2008/055158 WO2009077917A2 (en) 2007-12-17 2008-12-09 Mems microphone

Publications (1)

Publication Number Publication Date
ATE510416T1 true ATE510416T1 (de) 2011-06-15

Family

ID=40795951

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08862615T ATE510416T1 (de) 2007-12-17 2008-12-09 Mems-mikrofon

Country Status (5)

Country Link
US (1) US20100270631A1 (de)
EP (1) EP2223534B1 (de)
KR (1) KR20100092517A (de)
AT (1) ATE510416T1 (de)
WO (1) WO2009077917A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2320678B1 (de) 2009-10-23 2013-08-14 Nxp B.V. Mikrofonvorrichtung mit Beschleunigungssensor zum Schwingungsausgleich
US9344805B2 (en) * 2009-11-24 2016-05-17 Nxp B.V. Micro-electromechanical system microphone
US9181086B1 (en) 2012-10-01 2015-11-10 The Research Foundation For The State University Of New York Hinged MEMS diaphragm and method of manufacture therof
US9743191B2 (en) 2014-10-13 2017-08-22 Knowles Electronics, Llc Acoustic apparatus with diaphragm supported at a discrete number of locations
US9872116B2 (en) 2014-11-24 2018-01-16 Knowles Electronics, Llc Apparatus and method for detecting earphone removal and insertion
US9401158B1 (en) 2015-09-14 2016-07-26 Knowles Electronics, Llc Microphone signal fusion
US9779716B2 (en) 2015-12-30 2017-10-03 Knowles Electronics, Llc Occlusion reduction and active noise reduction based on seal quality
US9830930B2 (en) 2015-12-30 2017-11-28 Knowles Electronics, Llc Voice-enhanced awareness mode
US9812149B2 (en) 2016-01-28 2017-11-07 Knowles Electronics, Llc Methods and systems for providing consistency in noise reduction during speech and non-speech periods

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3173225B2 (ja) * 1993-05-26 2001-06-04 ソニー株式会社 非水電解液二次電池
US7146016B2 (en) * 2001-11-27 2006-12-05 Center For National Research Initiatives Miniature condenser microphone and fabrication method therefor
EP1722595A4 (de) * 2004-03-05 2010-07-28 Panasonic Corp Elektret-kondenser
KR100599115B1 (ko) * 2004-07-20 2006-07-12 삼성전자주식회사 진동형 멤스 스위치 및 그 제조방법
US8076033B2 (en) * 2004-10-19 2011-12-13 Mitsubishi Chemical Corporation Method for producing difluorophosphate, nonaqueous electrolyte solution for secondary battery and nonaqueous electrolyte secondary battery
KR101285000B1 (ko) * 2005-06-20 2013-07-10 미쓰비시 가가꾸 가부시키가이샤 디플루오로인산염의 제조 방법, 2 차 전지용 비수계 전해액및 비수계 전해액 2 차 전지
US9112236B2 (en) * 2005-10-20 2015-08-18 Mitsubishi Chemical Corporation Lithium secondary batteries and nonaqueous electrolyte for use in the same
JP2008053211A (ja) * 2006-07-24 2008-03-06 Bridgestone Corp 電池用非水電解液及びそれを備えた非水電解液電池
JP2008053212A (ja) * 2006-07-24 2008-03-06 Bridgestone Corp 電池用非水電解液及びそれを備えた非水電解液電池
KR101495012B1 (ko) * 2006-08-22 2015-02-24 미쓰비시 가가꾸 가부시키가이샤 2 불화 인산 리튬, 2 불화 인산 리튬 함유 전해액, 2 불화 인산 리튬의 제조 방법, 비수계 전해액의 제조 방법, 비수계 전해액 및 그것을 사용한 비수계 전해액 2 차 전지
JP5277550B2 (ja) * 2007-03-12 2013-08-28 セントラル硝子株式会社 ジフルオロリン酸リチウムの製造方法及びこれを用いた非水電解液電池
US9048508B2 (en) * 2007-04-20 2015-06-02 Mitsubishi Chemical Corporation Nonaqueous electrolytes and nonaqueous-electrolyte secondary batteries employing the same

Also Published As

Publication number Publication date
US20100270631A1 (en) 2010-10-28
KR20100092517A (ko) 2010-08-20
EP2223534B1 (de) 2011-05-18
WO2009077917A2 (en) 2009-06-25
EP2223534A2 (de) 2010-09-01
WO2009077917A3 (en) 2009-11-12

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Legal Events

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