ATE510416T1 - Mems-mikrofon - Google Patents

Mems-mikrofon

Info

Publication number: ATE510416T1
Authority: AT; Austria
Prior art keywords: mems microphone; substrate; membrane; electrode; attached
Prior art date: 2007-12-17

Application number

AT08862615T

Other languages

English (en)

Inventor

Heinz Renner

Original Assignee

Nxp Bv

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-12-17

Filing date

2008-12-09

Publication date

2011-06-15

2008-12-09 Application filed by Nxp Bv filed Critical Nxp Bv

2011-06-15 Application granted granted Critical

2011-06-15 Publication of ATE510416T1 publication Critical patent/ATE510416T1/de

Links

Classifications

- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
- H04R31/006—Interconnection of transducer parts
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0257—Microphones or microspeakers
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/01—Electrostatic transducers characterised by the use of electrets
- H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
- H04R2201/003—Mems transducers or their use

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Acoustics & Sound (AREA)
Signal Processing (AREA)
Mechanical Engineering (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Manufacturing & Machinery (AREA)
Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Pressure Sensors (AREA)
Piezo-Electric Transducers For Audible Bands (AREA)
Micromachines (AREA)

AT08862615T 2007-12-17 2008-12-09 Mems-mikrofon ATE510416T1 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
EP07123378		2007-12-17
PCT/IB2008/055158 WO2009077917A2 (en)	2007-12-17	2008-12-09	Mems microphone

Publications (1)

Publication Number	Publication Date
ATE510416T1 true ATE510416T1 (de)	2011-06-15

Family

ID=40795951

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT08862615T ATE510416T1 (de)	2007-12-17	2008-12-09	Mems-mikrofon

Country Status (5)

Country	Link
US (1)	US20100270631A1 (de)
EP (1)	EP2223534B1 (de)
KR (1)	KR20100092517A (de)
AT (1)	ATE510416T1 (de)
WO (1)	WO2009077917A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP2320678B1 (de)	2009-10-23	2013-08-14	Nxp B.V.	Mikrofonvorrichtung mit Beschleunigungssensor zum Schwingungsausgleich
US9344805B2 (en)	2009-11-24	2016-05-17	Nxp B.V.	Micro-electromechanical system microphone
US9181086B1 (en)	2012-10-01	2015-11-10	The Research Foundation For The State University Of New York	Hinged MEMS diaphragm and method of manufacture therof
US9743191B2 (en)	2014-10-13	2017-08-22	Knowles Electronics, Llc	Acoustic apparatus with diaphragm supported at a discrete number of locations
US9872116B2 (en)	2014-11-24	2018-01-16	Knowles Electronics, Llc	Apparatus and method for detecting earphone removal and insertion
US9401158B1 (en)	2015-09-14	2016-07-26	Knowles Electronics, Llc	Microphone signal fusion
US9830930B2 (en)	2015-12-30	2017-11-28	Knowles Electronics, Llc	Voice-enhanced awareness mode
US9779716B2 (en)	2015-12-30	2017-10-03	Knowles Electronics, Llc	Occlusion reduction and active noise reduction based on seal quality
US9812149B2 (en)	2016-01-28	2017-11-07	Knowles Electronics, Llc	Methods and systems for providing consistency in noise reduction during speech and non-speech periods

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3173225B2 (ja) *	1993-05-26	2001-06-04	ソニー株式会社	非水電解液二次電池
US7146016B2 (en) *	2001-11-27	2006-12-05	Center For National Research Initiatives	Miniature condenser microphone and fabrication method therefor
US7853027B2 (en) *	2004-03-05	2010-12-14	Panasonic Corporation	Electret condenser
KR100599115B1 (ko) *	2004-07-20	2006-07-12	삼성전자주식회사	진동형 멤스 스위치 및 그 제조방법
KR101227445B1 (ko) *	2004-10-19	2013-01-29	미쓰비시 가가꾸 가부시키가이샤	디플루오로인산염의 제조 방법, 이차전지용 비수계 전해질용액 및 비수계 전해질 이차전지
EP2647599B1 (de) *	2005-06-20	2018-05-23	Mitsubishi Chemical Corporation	Nichtwässriger Elektrolyt umfassend Hexafluorphosphat und Difluorphosphat
KR20250004383A (ko) *	2005-10-20	2025-01-07	미쯔비시 케미컬 주식회사	리튬 2 차 전지 및 그것에 사용하는 비수계 전해액
JP2008053212A (ja) *	2006-07-24	2008-03-06	Bridgestone Corp	電池用非水電解液及びそれを備えた非水電解液電池
JP2008053211A (ja) *	2006-07-24	2008-03-06	Bridgestone Corp	電池用非水電解液及びそれを備えた非水電解液電池
KR101539780B1 (ko) *	2006-08-22	2015-07-27	미쓰비시 가가꾸 가부시키가이샤	2 불화 인산 리튬, 2 불화 인산 리튬 함유 전해액, 2 불화 인산 리튬의 제조 방법, 비수계 전해액의 제조 방법, 비수계 전해액 및 그것을 사용한 비수계 전해액 2 차 전지
JP5277550B2 (ja) *	2007-03-12	2013-08-28	セントラル硝子株式会社	ジフルオロリン酸リチウムの製造方法及びこれを用いた非水電解液電池
US9048508B2 (en) *	2007-04-20	2015-06-02	Mitsubishi Chemical Corporation	Nonaqueous electrolytes and nonaqueous-electrolyte secondary batteries employing the same

2008
- 2008-12-09 AT AT08862615T patent/ATE510416T1/de not_active IP Right Cessation
- 2008-12-09 KR KR1020107015879A patent/KR20100092517A/ko not_active Ceased
- 2008-12-09 EP EP08862615A patent/EP2223534B1/de not_active Not-in-force
- 2008-12-09 US US12/808,241 patent/US20100270631A1/en not_active Abandoned
- 2008-12-09 WO PCT/IB2008/055158 patent/WO2009077917A2/en not_active Ceased

Also Published As

Publication number	Publication date
WO2009077917A3 (en)	2009-11-12
EP2223534A2 (de)	2010-09-01
WO2009077917A2 (en)	2009-06-25
KR20100092517A (ko)	2010-08-20
EP2223534B1 (de)	2011-05-18
US20100270631A1 (en)	2010-10-28

Legal Events

Date	Code	Title	Description
2011-11-15	RER	Ceased as to paragraph 5 lit. 3 law introducing patent treaties

Publication	Publication Date	Title
WO2009077917A3 (en)	2009-11-12	Mems microphone
EA200901109A1 (ru)	2010-02-26	Применение n-фениламидинов в качестве гербицидов
FR2892886B1 (fr)	2008-01-25	Transducteur electrodynamique, applications aux haut-parleurs et geophones
SG10201810091WA (en)	2018-12-28	Mems loudspeaker having an actuator structure and a diaphragm spaced apart therefrom
MX2014005795A (es)	2014-05-30	Celda transductora micro-torneada capacitiva pre-colapsada con region colapsada en forma anular.
WO2012053939A3 (en)	2012-10-26	Mobile device
WO2010011407A3 (en)	2010-03-18	Methods of generating patterned soft substrates and uses thereof
DK1871141T3 (da)	2012-10-01	Høreapparat med to lydgivere som hver især forstærker et forskelligt frekvensområde
WO2012164168A3 (en)	2013-01-24	An acoustic transducer apparatus
DK1907484T3 (da)	2011-01-17	Naphtalen-amidin-imider
EP2039213A4 (de)	2011-06-29	Hochfrequenzmembran- und schwingspulenbaugruppe
EP2150075A3 (de)	2010-04-14	Elektronische Vorrichtung und elektroakustischer Wandler
DE112005001826T5 (de)	2007-05-16	Randgeschützte katalysatorbeschichtete Membranelektrodenanordnungen
EP1722595A4 (de)	2010-07-28	Elektret-kondenser
FI20115485A0 (fi)	2011-05-19	Akustiikkalevy
CO6251376A2 (es)	2011-02-21	Triazolilpiridina cetonas herbicidas
WO2007115992A3 (en)	2008-02-28	Piezoelectric loudspeaker
DE502006005053D1 (de)	2009-11-19	Spritzbare akustikmassen
EP1775992A4 (de)	2010-08-18	Thermostabiles elektret-kondensatormikrophon
CY1116501T1 (el)	2017-03-15	Μεγαφωνο
FI20050594A7 (fi)	2006-12-04	Vesitiivis mikrofonikalvo
ITRA20040004A1 (it)	2004-04-21	Corpo membranale e relativo metodo di produzione
ATE550077T1 (de)	2012-04-15	Armaturendruckplattenset sowie armaturendruckplatte
GB2461106A (en)	2009-12-23	Method of manufacturing electrically powered surgical instruments,and electrically powered surgical instruments manufactured thereby
EP1730404A4 (de)	2011-03-09	Membranpumpe