ATE511320T1 - Verfahren zur herstellung und akustischen verbindung von strukturen auf einem substrat - Google Patents

Verfahren zur herstellung und akustischen verbindung von strukturen auf einem substrat

Info

Publication number
ATE511320T1
ATE511320T1 AT04380017T AT04380017T ATE511320T1 AT E511320 T1 ATE511320 T1 AT E511320T1 AT 04380017 T AT04380017 T AT 04380017T AT 04380017 T AT04380017 T AT 04380017T AT E511320 T1 ATE511320 T1 AT E511320T1
Authority
AT
Austria
Prior art keywords
chamber
processes
substrate
cavity
mesh
Prior art date
Application number
AT04380017T
Other languages
English (en)
Inventor
Kaigham J Gabriel
Xu Zhu
Original Assignee
Akustica Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akustica Inc filed Critical Akustica Inc
Application granted granted Critical
Publication of ATE511320T1 publication Critical patent/ATE511320T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K8/00—Cosmetics or similar toiletry preparations
    • A61K8/02—Cosmetics or similar toiletry preparations characterised by special physical form
    • A61K8/0208—Tissues; Wipes; Patches
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K2800/00—Properties of cosmetic compositions or active ingredients thereof or formulation aids used therein and process related aspects
    • A61K2800/20—Chemical, physico-chemical or functional or structural properties of the composition as a whole
    • A61K2800/30—Characterized by the absence of a particular group of ingredients
    • A61K2800/33—Free of surfactant
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K2800/00—Properties of cosmetic compositions or active ingredients thereof or formulation aids used therein and process related aspects
    • A61K2800/40—Chemical, physico-chemical or functional or structural properties of particular ingredients
    • A61K2800/58—Metal complex; Coordination compounds
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K2800/00—Properties of cosmetic compositions or active ingredients thereof or formulation aids used therein and process related aspects
    • A61K2800/70—Biological properties of the composition as a whole
    • A61K2800/72—Hypo-allergenic
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K2800/00—Properties of cosmetic compositions or active ingredients thereof or formulation aids used therein and process related aspects
    • A61K2800/74—Biological properties of particular ingredients
    • A61K2800/75—Anti-irritant
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K2800/00—Properties of cosmetic compositions or active ingredients thereof or formulation aids used therein and process related aspects
    • A61K2800/80—Process related aspects concerning the preparation of the cosmetic composition or the storage or application thereof
    • A61K2800/94—Involves covalent bonding to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biomedical Technology (AREA)
  • Birds (AREA)
  • Epidemiology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Micromachines (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
AT04380017T 2003-01-23 2004-01-22 Verfahren zur herstellung und akustischen verbindung von strukturen auf einem substrat ATE511320T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/349,618 US7049051B2 (en) 2003-01-23 2003-01-23 Process for forming and acoustically connecting structures on a substrate

Publications (1)

Publication Number Publication Date
ATE511320T1 true ATE511320T1 (de) 2011-06-15

Family

ID=32594932

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04380017T ATE511320T1 (de) 2003-01-23 2004-01-22 Verfahren zur herstellung und akustischen verbindung von strukturen auf einem substrat

Country Status (4)

Country Link
US (1) US7049051B2 (de)
EP (1) EP1441561B1 (de)
JP (1) JP4672984B2 (de)
AT (1) ATE511320T1 (de)

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US7358151B2 (en) 2004-12-21 2008-04-15 Sony Corporation Microelectromechanical system microphone fabrication including signal processing circuitry on common substrate
DE102005007540A1 (de) 2005-02-18 2006-08-31 Robert Bosch Gmbh Mikromechanischer Membransensor mit Doppelmembran
US7439093B2 (en) 2005-09-16 2008-10-21 Dalsa Semiconductor Inc. Method of making a MEMS device containing a cavity with isotropic etch followed by anisotropic etch
US8043950B2 (en) * 2005-10-26 2011-10-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
DE102006002106B4 (de) * 2006-01-17 2016-03-03 Robert Bosch Gmbh Mikromechanischer Sensor mit perforationsoptimierter Membran sowie ein geeignetes Hestellungsverfahren
DE102006022378A1 (de) 2006-05-12 2007-11-22 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Bauelements und mikromechanisches Bauelement
KR20080005854A (ko) 2006-07-10 2008-01-15 야마하 가부시키가이샤 압력 센서 및 그의 제조 방법
DE102007019647A1 (de) * 2007-04-26 2008-10-30 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Bauelements mit Auffüllschicht und Maskenschicht
TW200919593A (en) * 2007-10-18 2009-05-01 Asia Pacific Microsystems Inc Elements and modules with micro caps and wafer level packaging method thereof
WO2009073692A1 (en) * 2007-12-03 2009-06-11 Kolo Technologies, Inc. Packaging and connecting electrostatic transducer arrays
CN101874287B (zh) * 2007-12-03 2012-08-29 科隆科技公司 静电换能器及阵列中的贯穿晶片互连
US7795063B2 (en) * 2007-12-31 2010-09-14 Solid State System Co., Ltd. Micro-electro-mechanical systems (MEMS) device and process for fabricating the same
US8258591B2 (en) * 2008-01-16 2012-09-04 Solid State System Co., Ltd. Micro-electro-mechanical systems (MEMS) device
US8173471B2 (en) * 2008-04-29 2012-05-08 Solid State System Co., Ltd. Method for fabricating micro-electro-mechanical system (MEMS) device
TWI380456B (en) 2008-04-30 2012-12-21 Pixart Imaging Inc Micro-electro-mechanical device and method for making same
CN101580222B (zh) * 2008-05-15 2011-11-16 原相科技股份有限公司 微机电元件与制作方法
US8144906B2 (en) * 2008-05-21 2012-03-27 Akustica, Inc. Wind immune microphone
US8345895B2 (en) 2008-07-25 2013-01-01 United Microelectronics Corp. Diaphragm of MEMS electroacoustic transducer
US8280097B2 (en) * 2008-08-21 2012-10-02 United Microelectronics Corp. Microelectromechanical system diaphragm and fabricating method thereof
US7951636B2 (en) * 2008-09-22 2011-05-31 Solid State System Co. Ltd. Method for fabricating micro-electro-mechanical system (MEMS) device
US20100173437A1 (en) * 2008-10-21 2010-07-08 Wygant Ira O Method of fabricating CMUTs that generate low-frequency and high-intensity ultrasound
TWI484594B (zh) * 2009-10-07 2015-05-11 United Microelectronics Corp 具有微機電系統元件之積體電路及其製造方法
US8445324B2 (en) * 2009-12-16 2013-05-21 Oakland University Method of wafer-level fabrication of MEMS devices
US8030112B2 (en) * 2010-01-22 2011-10-04 Solid State System Co., Ltd. Method for fabricating MEMS device
US8865500B2 (en) * 2010-02-03 2014-10-21 United Microelectronics Corp. Method of fabricating a MEMS microphone with trenches serving as vent pattern
TWI430424B (zh) * 2011-03-18 2014-03-11 Pixart Imaging Inc 微機電系統聲壓感測元件及其製作方法
CN102752699B (zh) * 2011-04-19 2014-09-17 原相科技股份有限公司 微机电系统麦克风装置及其制作方法
US8643140B2 (en) 2011-07-11 2014-02-04 United Microelectronics Corp. Suspended beam for use in MEMS device
US8525354B2 (en) 2011-10-13 2013-09-03 United Microelectronics Corporation Bond pad structure and fabricating method thereof
WO2013097135A1 (en) * 2011-12-29 2013-07-04 Goertek Inc. A silicon based mems microphone, a system and a package with the same
US9402138B2 (en) 2012-10-12 2016-07-26 Infineon Technologies Ag MEMS device and method of manufacturing a MEMS device
WO2014092541A1 (en) * 2012-12-10 2014-06-19 Mimos Berhad A method for releasing mems device
US8981501B2 (en) 2013-04-25 2015-03-17 United Microelectronics Corp. Semiconductor device and method of forming the same
KR102126714B1 (ko) * 2013-09-03 2020-06-26 삼성디스플레이 주식회사 표시 패널 및 이를 포함하는 유기 발광 표시 장치
US9219185B2 (en) 2013-12-19 2015-12-22 Excelitas Technologies Singapore Pte. Ltd CMOS integrated method for the fabrication of thermopile pixel with umbrella absorber on semiconductor substrate
US9373772B2 (en) * 2014-01-15 2016-06-21 Excelitas Technologies Singapore Pte. Ltd. CMOS integrated method for the release of thermopile pixel on a substrate by using anisotropic and isotropic etching
CN106865485B (zh) * 2015-12-10 2021-09-21 联华电子股份有限公司 微机电结构及其制作方法
CN111741423B (zh) * 2020-08-21 2020-11-20 中芯集成电路制造(绍兴)有限公司 Mems麦克风的制造方法

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Also Published As

Publication number Publication date
US20040146810A1 (en) 2004-07-29
EP1441561B1 (de) 2011-05-25
US7049051B2 (en) 2006-05-23
EP1441561A3 (de) 2009-06-03
JP4672984B2 (ja) 2011-04-20
JP2004223710A (ja) 2004-08-12
EP1441561A2 (de) 2004-07-28

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