ATE511909T1 - Vorrichtung und verfahren zum verhindern der zersetzung von monogerman - Google Patents

Vorrichtung und verfahren zum verhindern der zersetzung von monogerman

Info

Publication number
ATE511909T1
ATE511909T1 AT03777881T AT03777881T ATE511909T1 AT E511909 T1 ATE511909 T1 AT E511909T1 AT 03777881 T AT03777881 T AT 03777881T AT 03777881 T AT03777881 T AT 03777881T AT E511909 T1 ATE511909 T1 AT E511909T1
Authority
AT
Austria
Prior art keywords
deflagration
activated carbon
germane
gas
sorbent medium
Prior art date
Application number
AT03777881T
Other languages
English (en)
Inventor
Edward Sturm
Luping Wang
James Dietz
Original Assignee
Advanced Tech Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Tech Materials filed Critical Advanced Tech Materials
Application granted granted Critical
Publication of ATE511909T1 publication Critical patent/ATE511909T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D59/00—Separation of different isotopes of the same chemical element
    • B01D59/22—Separation by extracting
    • B01D59/26—Separation by extracting by sorption, i.e. absorption, adsorption, persorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40086—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40088—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S95/00—Gas separation: processes
    • Y10S95/90—Solid sorbent
    • Y10S95/901—Activated carbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Treating Waste Gases (AREA)
AT03777881T 2002-10-29 2003-10-27 Vorrichtung und verfahren zum verhindern der zersetzung von monogerman ATE511909T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/282,377 US6716271B1 (en) 2002-10-29 2002-10-29 Apparatus and method for inhibiting decomposition of germane
PCT/US2003/033836 WO2004039478A1 (en) 2002-10-29 2003-10-27 Apparatus and method for inhibiting decomposition of germane

Publications (1)

Publication Number Publication Date
ATE511909T1 true ATE511909T1 (de) 2011-06-15

Family

ID=32030425

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03777881T ATE511909T1 (de) 2002-10-29 2003-10-27 Vorrichtung und verfahren zum verhindern der zersetzung von monogerman

Country Status (9)

Country Link
US (1) US6716271B1 (de)
EP (1) EP1558363B1 (de)
JP (1) JP2006520443A (de)
KR (1) KR101097577B1 (de)
AT (1) ATE511909T1 (de)
AU (1) AU2003286671A1 (de)
MY (1) MY131132A (de)
TW (1) TWI305154B (de)
WO (1) WO2004039478A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7780747B2 (en) * 2003-10-14 2010-08-24 Advanced Technology Materials, Inc. Apparatus and method for hydrogen generation from gaseous hydride
US7087102B2 (en) * 2004-02-26 2006-08-08 Air Products And Chemicals, Inc. Process for purification of germane
US7955797B2 (en) * 2004-10-25 2011-06-07 Advanced Technology Materials, Inc. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
US7951225B2 (en) * 2005-05-03 2011-05-31 Advanced Technology Materials, Inc. Fluid storage and dispensing systems, and fluid supply processes comprising same
EP1928746A2 (de) * 2005-08-22 2008-06-11 Advanced Technology Materials, Inc. Materialeinschliessungssystem
EP1986763A4 (de) * 2006-01-30 2009-12-23 Advanced Tech Materials Nanoporöse kohlenstoffmaterialien sowie systeme und verfahren zu deren anwendung
EP2174076A4 (de) 2007-06-22 2011-04-13 Advanced Tech Materials Komponente für solar-adsorptionskälteanlage und verfahren zur herstellung solch einer komponente
CN102282107B (zh) * 2008-11-17 2014-07-23 伏太斯有限责任公司 锗烷纯化
WO2010065874A2 (en) 2008-12-05 2010-06-10 Atmi High concentration nitrogen-containing germanium telluride based memory devices and processes of making
WO2011002705A2 (en) * 2009-07-02 2011-01-06 Advanced Technology Materials, Inc. Hollow gst structure with dielectric fill
TW201132787A (en) 2010-03-26 2011-10-01 Advanced Tech Materials Germanium antimony telluride materials and devices incorporating same
WO2011146913A2 (en) 2010-05-21 2011-11-24 Advanced Technology Materials, Inc. Germanium antimony telluride materials and devices incorporating same
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
US20140020685A1 (en) * 2011-03-24 2014-01-23 Medclair AB System for collecting nitrous oxide in exhalation air
WO2014070682A1 (en) 2012-10-30 2014-05-08 Advaned Technology Materials, Inc. Double self-aligned phase change memory device structure
EP4150045A1 (de) 2020-05-12 2023-03-22 PBS Biotech, Inc. Materialübertragungsvorrichtungen sowie entsprechende systeme und verfahren
EP4409194A1 (de) * 2021-09-29 2024-08-07 Entegris, Inc. Lager- und abgabebehälter vom adsorptionsmitteltyp mit hochreiner gasabgabe und zugehörige verfahren

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6083298A (en) 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US6132492A (en) 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US5837027A (en) * 1996-05-20 1998-11-17 Advanced Technology Materials, Inc. Manufacturing process for gas source and dispensing systems
CN1128652C (zh) * 1996-05-20 2003-11-26 高级技术材料公司 包含高工作量的物理吸附剂的流体贮藏和分送系统
US5676735A (en) * 1996-10-31 1997-10-14 Advanced Technology Materials, Inc. Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas
JP3021412B2 (ja) * 1997-02-17 2000-03-15 高千穂化学工業株式会社 気体の貯蔵・送出方法及び気体の貯蔵・送出装置
US5980608A (en) 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
US6453924B1 (en) * 2000-07-24 2002-09-24 Advanced Technology Materials, Inc. Fluid distribution system and process, and semiconductor fabrication facility utilizing same
US6406519B1 (en) * 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US6101816A (en) 1998-04-28 2000-08-15 Advanced Technology Materials, Inc. Fluid storage and dispensing system
JP2001248794A (ja) * 2000-03-02 2001-09-14 Kansai Electric Power Co Inc:The オゾン貯蔵方法および装置
US6425946B1 (en) * 2000-12-26 2002-07-30 Matheson Tri-Gas, Inc. Method and apparatus for removing trace impurities from a gas using superactivated carbon material
US6547861B2 (en) * 2000-12-26 2003-04-15 Matheson Tri-Gas,, Inc. Method and materials for purifying reactive gases using preconditioned ultra-low emission carbon material
US6592653B2 (en) * 2001-11-12 2003-07-15 Advanced Technology Materials, Inc. Fluid storage and delivery system utilizing low heels carbon sorbent medium

Also Published As

Publication number Publication date
JP2006520443A (ja) 2006-09-07
WO2004039478B1 (en) 2006-03-23
EP1558363B1 (de) 2011-06-08
KR101097577B1 (ko) 2015-11-24
WO2004039478A1 (en) 2004-05-13
MY131132A (en) 2007-07-31
US6716271B1 (en) 2004-04-06
AU2003286671A1 (en) 2004-05-25
AU2003286671A8 (en) 2004-05-25
KR20050062780A (ko) 2005-06-27
EP1558363A4 (de) 2007-01-24
TWI305154B (en) 2009-01-11
TW200413080A (en) 2004-08-01
EP1558363A1 (de) 2005-08-03

Similar Documents

Publication Publication Date Title
AU2003286671A8 (en) Apparatus and method for inhibiting decomposition of germane
DE60328489D1 (de) Verfahren zur entfernung von quecksilber aus verbrennungsgasen
ATE549081T1 (de) Quecksilberadsorber, verfahren zu seiner herstellung und verfahren zur quecksilberentfernung durch adsorption
DE69405166D1 (de) Verfahren zur entfernung von chloramin durch katalytischen kohlenstoff
AU2003225306A1 (en) Removal of chloramines from drinking water with improved activated carbon
TW200700319A (en) Method for purifying hydrogen chloride
ATE523238T1 (de) Verfahren und vorrichtung zur sicheren lagerung und verwendung von flüchtigen ammoniaklagermaterialien
WO2008156084A1 (ja) Ｃｏ2又はｈ2ｓ除去システム、ｃｏ2又はｈ2ｓ除去方法
ATE539035T1 (de) Verfahren zur abtrennung von wasser aus gasförmigen halogenwasserstoffen
WO2005122054A3 (en) Apparatus and method of vessel emission management
WO2012088426A3 (en) Method and apparatus for measuring ash deposit levels in a particulate filter
DE59702540D1 (de) Verfahren zur entfernung von schwefelwasserstoff, ammoniak, phosphor- und arsenwasserstoff aus acetylen
ATE504147T1 (de) Verfahren und computerlesbares speichermedium zur bereitstellung eines sicheren zugangs zwischen geräten
ATE335705T1 (de) Verfahren und vorrichtung zum steuern des füllvorgangs einer flüssigkeit in einen behälter
WO2007073471A3 (en) A system and method for shipping a saturated luminescent dissolved oxygen sensor
ATE190590T1 (de) Vorrichtung zum trennen von flock
DE50015585D1 (de) Verwendung eines Adsorptionsmittel aus pulverförmigem Kautschuk zur Adsorption von organischen Verbindungen
ATE391667T1 (de) Verfahren und vorrichtung zum laden und entladen von komprimiertem erdgas
NZ707197A (en) Method and device for vacuum pressure swing adsorption with temporary storage
FR2893700B1 (fr) Dispositif et procede de protection d'un reservoir cryogenique et reservoir comportant un tel dispositif
DE502006005391D1 (de) Verfahren zum Reduzieren von übelriechenden Substanzen in Tankbehältern
JPS5316387A (en) Purifying method for hydrogen chloride containing organic compounds
KR102120872B1 (ko) 바이오가스 내 황화수소 및 실록산을 제거하는 바이오가스 정제 장치
JPS5387980A (en) Treating method for gas containing odor constituents and ozone
WO2005005605A3 (en) Methane cleansing by microbial removal of h2s

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties