ATE512457T1 - Gleitlager zur verwendung mit einer eine vakuumkammer umfassenden vorrichtung - Google Patents

Gleitlager zur verwendung mit einer eine vakuumkammer umfassenden vorrichtung

Info

Publication number
ATE512457T1
ATE512457T1 AT07756002T AT07756002T ATE512457T1 AT E512457 T1 ATE512457 T1 AT E512457T1 AT 07756002 T AT07756002 T AT 07756002T AT 07756002 T AT07756002 T AT 07756002T AT E512457 T1 ATE512457 T1 AT E512457T1
Authority
AT
Austria
Prior art keywords
plate
base plate
flexible
vacuum chamber
contact
Prior art date
Application number
AT07756002T
Other languages
English (en)
Inventor
Johannes Persoon
Andreas Engelen
Siegfried Lichtenegger
Dooren Petrus Van
Original Assignee
Fei Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fei Co filed Critical Fei Co
Application granted granted Critical
Publication of ATE512457T1 publication Critical patent/ATE512457T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H01J37/185—Means for transferring objects between different enclosures of different pressure or atmosphere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H01J2237/166—Sealing means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/184—Vacuum locks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2005—Seal mechanisms
    • H01J2237/2006—Vacuum seals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/204—Means for introducing and/or outputting objects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sliding-Contact Bearings (AREA)
  • Sliding Valves (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT07756002T 2006-06-07 2007-04-26 Gleitlager zur verwendung mit einer eine vakuumkammer umfassenden vorrichtung ATE512457T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US81162106P 2006-06-07 2006-06-07
PCT/US2007/010006 WO2007145712A2 (en) 2006-06-07 2007-04-26 Slider bearing for use with an apparatus comprising a vacuum chamber

Publications (1)

Publication Number Publication Date
ATE512457T1 true ATE512457T1 (de) 2011-06-15

Family

ID=40343642

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07756002T ATE512457T1 (de) 2006-06-07 2007-04-26 Gleitlager zur verwendung mit einer eine vakuumkammer umfassenden vorrichtung

Country Status (5)

Country Link
US (1) US8598524B2 (de)
EP (1) EP2033206B1 (de)
JP (1) JP5033873B2 (de)
AT (1) ATE512457T1 (de)
WO (1) WO2007145712A2 (de)

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Also Published As

Publication number Publication date
EP2033206A2 (de) 2009-03-11
JP2009540499A (ja) 2009-11-19
JP5033873B2 (ja) 2012-09-26
US8598524B2 (en) 2013-12-03
EP2033206B1 (de) 2011-06-08
WO2007145712A2 (en) 2007-12-21
WO2007145712A3 (en) 2008-04-17
US20100276592A1 (en) 2010-11-04

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