ATE513194T1 - Drucksensor zur erfassung von kleinen druckdifferenzen und niedrigen druckwerten - Google Patents

Drucksensor zur erfassung von kleinen druckdifferenzen und niedrigen druckwerten

Info

Publication number
ATE513194T1
ATE513194T1 AT98964670T AT98964670T ATE513194T1 AT E513194 T1 ATE513194 T1 AT E513194T1 AT 98964670 T AT98964670 T AT 98964670T AT 98964670 T AT98964670 T AT 98964670T AT E513194 T1 ATE513194 T1 AT E513194T1
Authority
AT
Austria
Prior art keywords
diaphragm
pressure
base plate
thickness
plate
Prior art date
Application number
AT98964670T
Other languages
English (en)
Inventor
Staffan Jonsson
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Application granted granted Critical
Publication of ATE513194T1 publication Critical patent/ATE513194T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
AT98964670T 1997-12-22 1998-12-22 Drucksensor zur erfassung von kleinen druckdifferenzen und niedrigen druckwerten ATE513194T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9704840A SE9704840D0 (sv) 1997-12-22 1997-12-22 Tryckgivare för detektering av små tryckdifferenser och låga tryck
PCT/SE1998/002441 WO1999032866A2 (en) 1997-12-22 1998-12-22 A pressure sensor and a method of manufacturing a pressure sensor

Publications (1)

Publication Number Publication Date
ATE513194T1 true ATE513194T1 (de) 2011-07-15

Family

ID=20409543

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98964670T ATE513194T1 (de) 1997-12-22 1998-12-22 Drucksensor zur erfassung von kleinen druckdifferenzen und niedrigen druckwerten

Country Status (5)

Country Link
EP (1) EP1060374B1 (de)
AT (1) ATE513194T1 (de)
AU (1) AU1994299A (de)
SE (1) SE9704840D0 (de)
WO (1) WO1999032866A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
EP1128172B1 (de) * 2000-02-22 2011-04-06 Endress + Hauser GmbH + Co. KG Drucksensor
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
EP2018533B1 (de) * 2006-04-25 2018-10-03 Rosemount, Inc. Drucksensor mit gesinterter keramik mit near-net-form
CN114720048B (zh) * 2022-06-09 2022-09-02 季华实验室 一种电容薄膜真空计及neg薄膜制备方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4425799A (en) * 1982-06-03 1984-01-17 Kavlico Corporation Liquid capacitance pressure transducer technique
US4587851A (en) * 1985-02-26 1986-05-13 Edward Mortberg High vacuum capacitance manometer having Px side open housing
JPS63149531A (ja) * 1986-12-12 1988-06-22 Fuji Electric Co Ltd 静電容量式圧力センサ
FI84401C (fi) * 1987-05-08 1991-11-25 Vaisala Oy Kapacitiv tryckgivarkonstruktion.
DE4129414A1 (de) * 1990-11-13 1993-03-11 Endress Hauser Gmbh Co Verwendung eines speziellen tiegels beim melt-spinning einer aktivlot-legierung
US5499158A (en) * 1994-11-14 1996-03-12 Texas Instruments Incorporated Pressure transducer apparatus with monolithic body of ceramic material
US5485345A (en) * 1994-11-14 1996-01-16 Texas Instruments Incorporated Pressure transducer apparatus

Also Published As

Publication number Publication date
AU1994299A (en) 1999-07-12
SE9704840D0 (sv) 1997-12-22
EP1060374B1 (de) 2011-06-15
EP1060374A2 (de) 2000-12-20
WO1999032866A3 (en) 1999-08-26
WO1999032866A2 (en) 1999-07-01

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties