ATE513362T1 - Resonator - Google Patents

Resonator

Info

Publication number
ATE513362T1
ATE513362T1 AT08852915T AT08852915T ATE513362T1 AT E513362 T1 ATE513362 T1 AT E513362T1 AT 08852915 T AT08852915 T AT 08852915T AT 08852915 T AT08852915 T AT 08852915T AT E513362 T1 ATE513362 T1 AT E513362T1
Authority
AT
Austria
Prior art keywords
mass
resonator
connectors
connector
fixed mounting
Prior art date
Application number
AT08852915T
Other languages
English (en)
Inventor
Le Kim Phan
Beek Jozef Van
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE513362T1 publication Critical patent/ATE513362T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/48—Coupling means therefor
    • H03H9/50—Mechanical coupling means
    • H03H9/505—Mechanical coupling means for microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H2009/2442—Square resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Micromachines (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
AT08852915T 2007-11-19 2008-11-12 Resonator ATE513362T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP07121035 2007-11-19
PCT/IB2008/054733 WO2009066203A1 (en) 2007-11-19 2008-11-12 Resonator

Publications (1)

Publication Number Publication Date
ATE513362T1 true ATE513362T1 (de) 2011-07-15

Family

ID=40291208

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08852915T ATE513362T1 (de) 2007-11-19 2008-11-12 Resonator

Country Status (5)

Country Link
US (1) US8269578B2 (de)
EP (1) EP2212995B1 (de)
CN (1) CN101861700B (de)
AT (1) ATE513362T1 (de)
WO (1) WO2009066203A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102037644B (zh) * 2008-05-19 2014-12-31 Nxp股份有限公司 改进mems谐振器
US8624137B2 (en) * 2008-09-23 2014-01-07 Nxp, B.V. Device with a micro electromechanical structure
WO2010041209A1 (en) * 2008-10-08 2010-04-15 Nxp B.V. Oscillator device
GB2466269A (en) * 2008-12-19 2010-06-23 Ge Infrastructure Sensing Inc System and method for remote reading of resonant sensors
EP2282404A1 (de) * 2009-08-03 2011-02-09 Nxp B.V. Frequenzauswahl- und Verstärkungsvorrichtung
EP2395660B1 (de) * 2010-06-10 2013-08-14 Nxp B.V. MEMS-Resonatoren
EP2416495B1 (de) * 2010-08-05 2014-05-07 Nxp B.V. MEMS-Oszillator
FR2964651B1 (fr) 2010-09-13 2015-05-15 Commissariat Energie Atomique Dispositif a poutre suspendue et moyens de detection piezoresistive du deplacement de celle-ci, et procede de fabrication du dispositif
FR2964652B1 (fr) 2010-09-13 2015-05-15 Commissariat Energie Atomique Dispositif resonant, a detection piezoresistive et a resonateur relie de facon elastique au support du dispositif, et procede de fabrication de celui-ci
CN102122935B (zh) * 2011-03-11 2013-12-25 中国科学院上海微系统与信息技术研究所 一种具有亚微米间隙微机械谐振器及制作方法
EP2506430B1 (de) * 2011-03-28 2017-11-22 Nxp B.V. Resonator und Steuerungsverfahren dafür
EP2515436A1 (de) * 2011-04-18 2012-10-24 Nxp B.V. MEMS Resonator und Steuerungsverfahren dafür
TWI519066B (zh) * 2012-06-28 2016-01-21 清華大學 微機電共振器及其訊號處理方法以及製造方法
US9209778B2 (en) * 2013-03-15 2015-12-08 Infineon Technologies Dresden Gmbh Microelectromechanical resonators
CN104218916B (zh) * 2014-08-29 2017-05-31 电子科技大学 具有lc串联谐振电路的mems谐振器
CN104333344B (zh) * 2014-10-09 2018-07-27 深迪半导体(上海)有限公司 微机械谐振器的振动控制方法及微机械谐振器
WO2020252250A2 (en) 2019-06-13 2020-12-17 Massachusetts Institute Of Technology Dc-dc converter based on piezoelectric resonator
KR102446105B1 (ko) * 2020-05-27 2022-09-23 한국교통대학교 산학협력단 양방향 정전기력을 이용한 액추에이터
US12126324B2 (en) 2021-05-07 2024-10-22 Massachusetts Institute Of Technology Piezoelectric resonators for power conversion
US20240372470A1 (en) * 2021-10-05 2024-11-07 Massachusetts Institute Of Technology Composite multi-material electromechanical energy storage component for power conversion
CN115603698B (zh) * 2022-11-28 2023-05-05 电子科技大学 一种基于弹性软化效应的可调谐薄膜体声波谐振器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US6940370B2 (en) * 2002-05-06 2005-09-06 The Regents Of The University Of California MEMS resonator and method of making same
WO2004059836A2 (en) * 2002-08-06 2004-07-15 Charles Stark Draper Laboratory Inc. Piezoelectric mems resonator
US6930569B2 (en) * 2003-07-31 2005-08-16 Discera Micromechanical resonator having short support beams
US20050073078A1 (en) * 2003-10-03 2005-04-07 Markus Lutz Frequency compensated oscillator design for process tolerances
JP3797355B2 (ja) * 2003-10-22 2006-07-19 セイコーエプソン株式会社 圧電振動子の製造方法
KR100629488B1 (ko) * 2005-02-28 2006-09-28 삼성전자주식회사 공진기
US7436271B2 (en) * 2005-11-04 2008-10-14 Cornell Research Foundation, Inc. Dielectrically transduced single-ended to differential MEMS filter

Also Published As

Publication number Publication date
EP2212995B1 (de) 2011-06-15
US8269578B2 (en) 2012-09-18
EP2212995A1 (de) 2010-08-04
CN101861700B (zh) 2013-01-02
US20100277262A1 (en) 2010-11-04
WO2009066203A1 (en) 2009-05-28
CN101861700A (zh) 2010-10-13

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Legal Events

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