ATE516246T1 - Verfahren zur herstellung einer elektronischen baugruppe; elektronische baugruppe, abdeckung und substrat - Google Patents

Verfahren zur herstellung einer elektronischen baugruppe; elektronische baugruppe, abdeckung und substrat

Info

Publication number
ATE516246T1
ATE516246T1 AT07735462T AT07735462T ATE516246T1 AT E516246 T1 ATE516246 T1 AT E516246T1 AT 07735462 T AT07735462 T AT 07735462T AT 07735462 T AT07735462 T AT 07735462T AT E516246 T1 ATE516246 T1 AT E516246T1
Authority
AT
Austria
Prior art keywords
substrate
cover
pattern
electronic assembly
closed configuration
Prior art date
Application number
AT07735462T
Other languages
English (en)
Inventor
Johannes Weekamp
Cornelis Slob
Jacob Scheer
Straten Freerk Van
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE516246T1 publication Critical patent/ATE516246T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00777—Preserve existing structures from alteration, e.g. temporary protection during manufacturing
    • B81C1/00833—Methods for preserving structures not provided for in groups B81C1/00785 - B81C1/00825
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00269—Bonding of solid lids or wafers to the substrate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341—Surface mounted components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/033—Thermal bonding
    • B81C2203/035—Soldering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10227—Other objects, e.g. metallic pieces
    • H05K2201/10371—Shields or metal cases
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10431—Details of mounted components
    • H05K2201/10439—Position of a single component
    • H05K2201/10477—Inverted
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/11—Treatments characterised by their effect, e.g. heating, cooling, roughening
    • H05K2203/1147—Sealing or impregnating, e.g. of pores
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
AT07735462T 2006-04-13 2007-04-11 Verfahren zur herstellung einer elektronischen baugruppe; elektronische baugruppe, abdeckung und substrat ATE516246T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP06112653 2006-04-13
PCT/IB2007/051297 WO2007119206A2 (en) 2006-04-13 2007-04-11 A method for manufacturing an electronic assembly; an electronic assembly, a cover and a substrate

Publications (1)

Publication Number Publication Date
ATE516246T1 true ATE516246T1 (de) 2011-07-15

Family

ID=38573407

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07735462T ATE516246T1 (de) 2006-04-13 2007-04-11 Verfahren zur herstellung einer elektronischen baugruppe; elektronische baugruppe, abdeckung und substrat

Country Status (6)

Country Link
US (1) US7884289B2 (de)
EP (1) EP2010452B1 (de)
JP (1) JP2009533861A (de)
CN (1) CN101421178B (de)
AT (1) ATE516246T1 (de)
WO (1) WO2007119206A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101918304A (zh) * 2008-01-21 2010-12-15 Nxp股份有限公司 封装空腔的清洁和密封
US9343651B2 (en) * 2010-06-04 2016-05-17 Industrial Technology Research Institute Organic packaging carrier
CN101962166B (zh) * 2010-08-16 2012-07-25 苏州晶方半导体科技股份有限公司 封装结构以及封装方法
US9287188B2 (en) * 2013-02-05 2016-03-15 Taiwan Semiconductor Manufacturing Company, Ltd. Method and apparatus for a seal ring structure
DE102014202609B4 (de) 2014-02-13 2020-06-04 tooz technologies GmbH Aminkatalysierte Thiolhärtung von Epoxidharzen

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5317922A (en) 1992-04-30 1994-06-07 Ford Motor Company Capacitance transducer article and method of fabrication
EP0951069A1 (de) * 1998-04-17 1999-10-20 Interuniversitair Microelektronica Centrum Vzw Herstellungsverfahren für eine Mikrostruktur mit Innenraum
FR2780200B1 (fr) 1998-06-22 2003-09-05 Commissariat Energie Atomique Dispositif et procede de formation d'un dispositif presentant une cavite a atmosphere controlee
KR20030023613A (ko) 2000-02-02 2003-03-19 레이던 컴퍼니 집적회로 컴포넌트를 구비하는 마이크로전기기계 시스템의진공 패키징 방법 및 진공 패키지
US6392144B1 (en) * 2000-03-01 2002-05-21 Sandia Corporation Micromechanical die attachment surcharge
CN1211921C (zh) 2000-11-09 2005-07-20 皇家菲利浦电子有限公司 电子器件、包括这种器件的半导体器件和制造这种器件的方法
US6808955B2 (en) * 2001-11-02 2004-10-26 Intel Corporation Method of fabricating an integrated circuit that seals a MEMS device within a cavity
SG99386A1 (en) * 2002-01-29 2003-10-27 Sensfab Pte Ltd Method of manufacturing an accelerometer
US6852926B2 (en) * 2002-03-26 2005-02-08 Intel Corporation Packaging microelectromechanical structures
TW546794B (en) * 2002-05-17 2003-08-11 Advanced Semiconductor Eng Multichip wafer-level package and method for manufacturing the same
US6953985B2 (en) * 2002-06-12 2005-10-11 Freescale Semiconductor, Inc. Wafer level MEMS packaging
US20040016995A1 (en) * 2002-07-25 2004-01-29 Kuo Shun Meen MEMS control chip integration
SG114585A1 (en) * 2002-11-22 2005-09-28 Micron Technology Inc Packaged microelectronic component assemblies
EP2444368A3 (de) 2003-10-31 2012-07-25 Epcos AG Verfahren zur Herstellung einer elektronischen Vorrichtung und elektronische Vorrichtung
EP1861333B1 (de) * 2004-11-04 2018-12-26 Microchips Biotech, Inc. Druck- und kaltschweissdichtverfahren und -vorrichtungen
US7339275B2 (en) * 2004-11-22 2008-03-04 Freescale Semiconductor, Inc. Multi-chips semiconductor device assemblies and methods for fabricating the same
CN1295138C (zh) * 2004-12-17 2007-01-17 华中科技大学 一种薄膜微桥结构的制作方法

Also Published As

Publication number Publication date
CN101421178A (zh) 2009-04-29
WO2007119206A2 (en) 2007-10-25
US20090159331A1 (en) 2009-06-25
WO2007119206A3 (en) 2008-01-10
EP2010452A2 (de) 2009-01-07
US7884289B2 (en) 2011-02-08
JP2009533861A (ja) 2009-09-17
CN101421178B (zh) 2012-11-07
EP2010452B1 (de) 2011-07-13

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties