ATE516483T1 - Akustische oberflächenwellen-sensor mit einstellbarer vorspannung - Google Patents

Akustische oberflächenwellen-sensor mit einstellbarer vorspannung

Info

Publication number
ATE516483T1
ATE516483T1 AT09158530T AT09158530T ATE516483T1 AT E516483 T1 ATE516483 T1 AT E516483T1 AT 09158530 T AT09158530 T AT 09158530T AT 09158530 T AT09158530 T AT 09158530T AT E516483 T1 ATE516483 T1 AT E516483T1
Authority
AT
Austria
Prior art keywords
base
lid
substrate
acoustic wave
surface acoustic
Prior art date
Application number
AT09158530T
Other languages
English (en)
Inventor
Victor Kalinin
Raymond David Lohr
Arthur John Leigh
Original Assignee
Transense Technologies Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Transense Technologies Plc filed Critical Transense Technologies Plc
Application granted granted Critical
Publication of ATE516483T1 publication Critical patent/ATE516483T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G01D11/245—Housings for sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
AT09158530T 2008-07-25 2009-04-22 Akustische oberflächenwellen-sensor mit einstellbarer vorspannung ATE516483T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0813717.6A GB2462128B (en) 2008-07-25 2008-07-25 SAW sensor with adjustable preload

Publications (1)

Publication Number Publication Date
ATE516483T1 true ATE516483T1 (de) 2011-07-15

Family

ID=39746997

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09158530T ATE516483T1 (de) 2008-07-25 2009-04-22 Akustische oberflächenwellen-sensor mit einstellbarer vorspannung

Country Status (4)

Country Link
US (1) US20090001850A1 (de)
EP (1) EP2148180B1 (de)
AT (1) ATE516483T1 (de)
GB (1) GB2462128B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD611075S1 (en) * 2007-08-08 2010-03-02 Honeywell International Inc. Saw sensor button package
JP4605232B2 (ja) * 2008-02-21 2011-01-05 株式会社デンソー 荷重センサ及びその製造方法
JP4577585B2 (ja) * 2008-03-22 2010-11-10 株式会社デンソー 荷重センサの製造方法
JP4835700B2 (ja) * 2009-01-26 2011-12-14 株式会社デンソー 弾性表面波式圧力センサ
FR2979147B1 (fr) * 2011-08-17 2013-08-09 Senseor Procede d'interrogation d'un capteur differentiel de type acoustique a deux resonances et dispositif mettant en oeuvre le procede d'interrogation
US10281511B2 (en) * 2014-11-13 2019-05-07 The University Of Manitoba Passive wireless sensor for the measurement of AC electric field in the vicinity of high voltage apparatus

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3731527A (en) * 1970-11-27 1973-05-08 Umc Electronics Co Fuel injection transducer and timing system
JPH03148028A (ja) * 1989-11-02 1991-06-24 Matsushita Electric Ind Co Ltd 圧電型圧力センサ
JPH04131722A (ja) * 1990-09-21 1992-05-06 Toyota Motor Corp 圧力センサ及び圧力センサの製造方法
US5559280A (en) * 1994-11-14 1996-09-24 Eaton Corporation Combustion chamber pressure transducer and method of making same
FR2775525B1 (fr) * 1998-02-27 2000-05-19 Siemens Automotive Sa Capteur de cliquetis a faible dispersion de sensibilite
US7188785B2 (en) * 2001-04-24 2007-03-13 3M Innovative Properties Company Reservoir with refill inlet for hand-held spray guns
GB2379506B (en) 2001-09-11 2004-11-03 Transense Technologies Plc Vibratory gyroscope
EP1485692B1 (de) 2002-03-21 2007-03-14 Transense Technologies PLC Druckmonitor mit oberflächenwellenvorrichtung
GB0206705D0 (en) * 2002-03-21 2002-05-01 Transense Technologies Plc Pressure monitor incorporating saw device
US7082835B2 (en) * 2003-06-18 2006-08-01 Honeywell International Inc. Pressure sensor apparatus and method
US7047813B2 (en) * 2003-08-05 2006-05-23 Honeywell International Inc. Sensor slip fit apparatus and method
US6962084B2 (en) * 2003-08-06 2005-11-08 Honeywell International Inc. Sensor with molded sensor diaphragm cover
US7302855B2 (en) * 2004-10-28 2007-12-04 Denso Corporation Pressure detection device
GB2439344B (en) * 2006-06-23 2011-08-10 Transense Technologies Plc Post assembly automatic adjustment of tpms sensor preload
EP1892172B1 (de) * 2006-08-21 2009-09-16 JTEKT Corporation Lenkvorrichtung

Also Published As

Publication number Publication date
GB2462128B (en) 2012-05-02
EP2148180B1 (de) 2011-07-13
US20090001850A1 (en) 2009-01-01
EP2148180A2 (de) 2010-01-27
GB0813717D0 (en) 2008-09-03
EP2148180A3 (de) 2010-07-21
GB2462128A (en) 2010-01-27

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Legal Events

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