ATE517352T1 - Nanoantrieb für hochauflösende positionierung und zur positionierung einer mehrpunktsonde - Google Patents

Nanoantrieb für hochauflösende positionierung und zur positionierung einer mehrpunktsonde

Info

Publication number
ATE517352T1
ATE517352T1 AT06009611T AT06009611T ATE517352T1 AT E517352 T1 ATE517352 T1 AT E517352T1 AT 06009611 T AT06009611 T AT 06009611T AT 06009611 T AT06009611 T AT 06009611T AT E517352 T1 ATE517352 T1 AT E517352T1
Authority
AT
Austria
Prior art keywords
conductive
probe
multitude
probe arms
point
Prior art date
Application number
AT06009611T
Other languages
English (en)
Inventor
Christian Leth Petersen
Peter Folmer Nielsen
Peter Boggild
Ulrich Quaade
Francois Grey
Original Assignee
Capres As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8242558&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE517352(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Capres As filed Critical Capres As
Application granted granted Critical
Publication of ATE517352T1 publication Critical patent/ATE517352T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
AT06009611T 1999-09-15 1999-09-15 Nanoantrieb für hochauflösende positionierung und zur positionierung einer mehrpunktsonde ATE517352T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99610052A EP1085327B1 (de) 1999-09-15 1999-09-15 Mehrpunktesonde

Publications (1)

Publication Number Publication Date
ATE517352T1 true ATE517352T1 (de) 2011-08-15

Family

ID=8242558

Family Applications (2)

Application Number Title Priority Date Filing Date
AT06009611T ATE517352T1 (de) 1999-09-15 1999-09-15 Nanoantrieb für hochauflösende positionierung und zur positionierung einer mehrpunktsonde
AT99610052T ATE329272T1 (de) 1999-09-15 1999-09-15 Mehrpunktesonde

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT99610052T ATE329272T1 (de) 1999-09-15 1999-09-15 Mehrpunktesonde

Country Status (7)

Country Link
EP (2) EP1698905B9 (de)
JP (1) JP4685309B2 (de)
AT (2) ATE517352T1 (de)
CA (1) CA2381803A1 (de)
DE (1) DE69931778T2 (de)
DK (1) DK1085327T3 (de)
WO (1) WO2001020347A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1525459B1 (de) * 2001-02-06 2008-10-01 Parallel Synthesis Technologies, Inc Durch mikrofabrikation hergestellte betupfungsvorrichtung zur herstellung von mikromatrizen
EP1466182B1 (de) 2002-01-07 2011-08-03 Capres A/S Elektrisches rückkopplungs-detektionssystem für mehrpunktsonden
US6924653B2 (en) 2002-08-26 2005-08-02 Micron Technology, Inc. Selectively configurable microelectronic probes
EP1780550A1 (de) * 2005-10-31 2007-05-02 Capres A/S Sonde zum Testen elektrischer Eigenschaften von Testproben
US7511510B2 (en) * 2005-11-30 2009-03-31 International Business Machines Corporation Nanoscale fault isolation and measurement system
JP5030624B2 (ja) * 2007-03-13 2012-09-19 株式会社ヒューモラボラトリー 回転式電極子装置
US20100176396A1 (en) * 2007-07-03 2010-07-15 Advantest Corporation Probe, probe card, and method of production of probe
JP5100751B2 (ja) * 2007-07-03 2012-12-19 株式会社アドバンテスト プローブおよびプローブカード
EP2237052A1 (de) 2009-03-31 2010-10-06 Capres A/S Automatisierte Mehrpunktsondenmanipulation
TWI497084B (zh) * 2010-09-30 2015-08-21 Ismeca Semiconductor Holding 電性接點及測試平台
EP2677324A1 (de) 2012-06-20 2013-12-25 Capres A/S Tiefgeätzte Mehrpunktsonde
EP3262425B1 (de) 2015-02-26 2025-04-02 Xallent Inc. Nanoelektromechanischer sonden
KR20170132748A (ko) * 2015-02-26 2017-12-04 살렌트, 엘엘씨 다중 통합 팁들 스캐닝 프로브 현미경
US10866273B2 (en) 2016-03-09 2020-12-15 Xallent, LLC Functional prober chip
CN105785083B (zh) * 2016-04-12 2019-01-15 义乌臻格科技有限公司 一种耙状悬臂梁结构的微探针及其制备方法
US10784054B2 (en) 2017-04-06 2020-09-22 Kwame Amponsah Nanoelectromechanical devices with metal-to-metal contacts
US10663484B2 (en) 2018-02-14 2020-05-26 Xallent, LLC Multiple integrated tips scanning probe microscope with pre-alignment components
US20210333228A1 (en) * 2020-04-24 2021-10-28 Kla Corporation Micro-Four-Point Metrology of Joule-Heating-Induced Modulation of Test Sample Properties
US11740279B2 (en) 2020-04-24 2023-08-29 Kla Corporation Measuring temperature-modulated properties of a test sample
CN114387902B (zh) * 2022-01-05 2024-01-12 蚌埠高华电子股份有限公司 一种lcd电阻标识测试配合装置及使用方法
CN115015649B (zh) * 2022-05-27 2025-06-27 国网智能电网研究院有限公司 不规则电压激励下电场分布的计算方法、调控方法及设备

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0078339B1 (de) * 1981-10-30 1986-07-30 Ibm Deutschland Gmbh Tastkopfanordnung für Leiterzugüberprüfung mit mindestens einem, eine Vielzahl von federnden Kontakten aufweisenden Tastkopf
GB8511169D0 (en) * 1985-05-02 1985-06-12 Plessey Co Plc Probes
JPH0820246B2 (ja) * 1987-08-12 1996-03-04 オリンパス光学工業株式会社 走査型プローブ顕微鏡
JPH081382B2 (ja) * 1990-10-31 1996-01-10 インターナショナル・ビジネス・マシーンズ・コーポレイション ナノメートル・スケールのプローブ及びその製造方法
US5172050A (en) * 1991-02-15 1992-12-15 Motorola, Inc. Micromachined semiconductor probe card
US5347226A (en) * 1992-11-16 1994-09-13 National Semiconductor Corporation Array spreading resistance probe (ASRP) method for profile extraction from semiconductor chips of cellular construction
US5321977A (en) * 1992-12-31 1994-06-21 International Business Machines Corporation Integrated tip strain sensor for use in combination with a single axis atomic force microscope
JP2875128B2 (ja) * 1993-01-22 1999-03-24 シャープ株式会社 梁およびその製造方法
US5475318A (en) * 1993-10-29 1995-12-12 Robert B. Marcus Microprobe
JP2599895B2 (ja) * 1994-06-23 1997-04-16 山一電機株式会社 プローブユニットとその製法
DE9421715U1 (de) * 1994-11-15 1996-07-25 Kleindiek, Stephan, 52070 Aachen Elektromechanische Positioniereinheit
JPH08330369A (ja) * 1995-05-31 1996-12-13 Hewlett Packard Japan Ltd プローバ用インターフェースカード
KR100202998B1 (ko) * 1995-12-02 1999-06-15 남재우 마이크로 팁을 갖는 웨이퍼 프로브 카드 및 그 제조방법
JP3022312B2 (ja) * 1996-04-15 2000-03-21 日本電気株式会社 プローブカードの製造方法
JPH1019971A (ja) * 1996-07-04 1998-01-23 Mitsubishi Electric Corp ロードプル測定システム，ソースプル測定システム，及びインピーダンスチューナ

Also Published As

Publication number Publication date
EP1698905A2 (de) 2006-09-06
EP1698905A3 (de) 2007-07-18
EP1085327A1 (de) 2001-03-21
DE69931778D1 (de) 2006-07-20
EP1698905B1 (de) 2011-07-20
CA2381803A1 (en) 2001-03-22
JP2003509695A (ja) 2003-03-11
DE69931778T2 (de) 2007-06-14
EP1698905B9 (de) 2012-01-18
DK1085327T3 (da) 2006-10-09
EP1085327B1 (de) 2006-06-07
JP4685309B2 (ja) 2011-05-18
WO2001020347A1 (en) 2001-03-22
ATE329272T1 (de) 2006-06-15

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