ATE517365T1 - Ausrichtungssystem für spektroskopische analysen - Google Patents

Ausrichtungssystem für spektroskopische analysen

Info

Publication number
ATE517365T1
ATE517365T1 AT05776153T AT05776153T ATE517365T1 AT E517365 T1 ATE517365 T1 AT E517365T1 AT 05776153 T AT05776153 T AT 05776153T AT 05776153 T AT05776153 T AT 05776153T AT E517365 T1 ATE517365 T1 AT E517365T1
Authority
AT
Austria
Prior art keywords
spectroscopic system
spectroscopic
autonomous
misalignment
spectroscopic analysis
Prior art date
Application number
AT05776153T
Other languages
English (en)
Inventor
Bernardus Bakker
Beek Michael Van
Gerald Lucassen
Der Voort Marjolein Van
Wouter Rensen
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE517365T1 publication Critical patent/ATE517365T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4228—Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
AT05776153T 2004-08-27 2005-08-24 Ausrichtungssystem für spektroskopische analysen ATE517365T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04104124 2004-08-27
PCT/IB2005/052767 WO2006021929A1 (en) 2004-08-27 2005-08-24 Alignment system for spectroscopic analysis

Publications (1)

Publication Number Publication Date
ATE517365T1 true ATE517365T1 (de) 2011-08-15

Family

ID=35285427

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05776153T ATE517365T1 (de) 2004-08-27 2005-08-24 Ausrichtungssystem für spektroskopische analysen

Country Status (6)

Country Link
US (1) US7817268B2 (de)
EP (1) EP1784680B1 (de)
JP (1) JP4977025B2 (de)
CN (1) CN100485455C (de)
AT (1) ATE517365T1 (de)
WO (1) WO2006021929A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5017079B2 (ja) 2007-01-26 2012-09-05 株式会社トプコン 光画像計測装置
EP1950526B1 (de) * 2007-01-26 2010-03-10 Kabushiki Kaisha TOPCON Optisches Bildmessgerät
DE102007046504A1 (de) 2007-09-28 2009-04-02 Carl Zeiss Meditec Ag Spektrometer
GB201005075D0 (en) * 2010-03-25 2010-05-12 Avalon Instr Ltd Alignment methods and systems and devices using them
JP5541972B2 (ja) * 2010-06-09 2014-07-09 オリンパス株式会社 走査型共焦点顕微鏡
DE102011115944B4 (de) * 2011-10-08 2013-06-06 Jenlab Gmbh Flexibles nichtlineares Laserscanning-Mikroskop zur nicht-invasiven dreidimensionalen Detektion
JP2013150205A (ja) * 2012-01-20 2013-08-01 Seiko Epson Corp 印刷装置の製造方法、測色装置、測色方法
BE1020754A3 (fr) * 2012-06-14 2014-04-01 Centre Rech Metallurgique Dispositif de focalisation et de centrage d'un faisceau lumineux destine a l'optimisation de systemes spectrometriques.
EP3193195B1 (de) * 2016-01-18 2018-07-25 SICK Engineering GmbH Optischer sensor
US10779720B2 (en) * 2016-03-26 2020-09-22 Yuscan Usa, Llc Device for noninvasive determination of pathophysiological conditions
US11092494B1 (en) * 2016-05-31 2021-08-17 MKS Technology Spectrometer
US11906435B2 (en) 2020-09-11 2024-02-20 Atonarp Inc. System including auto-alignment
GB2632850A (en) * 2023-08-24 2025-02-26 Renishaw Plc Spectrometer, module and method
US20250164408A1 (en) * 2023-11-21 2025-05-22 Kla Corporation Position feedback sensor using out-of-band wavelengths

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3762821A (en) * 1971-01-25 1973-10-02 Bell Telephone Labor Inc Lens assembly
JPS5557126A (en) * 1978-10-24 1980-04-26 Tokyo Optical Co Ltd Alignment detector for slit projection device
US4480913A (en) * 1980-01-17 1984-11-06 Hewlett-Packard Company Fine positioning beam director system
JPH03277932A (ja) 1990-03-28 1991-12-09 Hitachi Ltd 応力測定法
JPH0424538A (ja) 1990-05-18 1992-01-28 Shimadzu Corp 分光装置における被測定体位置決め装置
JPH0436642A (ja) 1990-06-01 1992-02-06 Hitachi Ltd ラマン分光光度計
US5373359A (en) * 1992-09-18 1994-12-13 J. A. Woollam Co. Ellipsometer
JP3384072B2 (ja) * 1993-12-27 2003-03-10 株式会社ニコン コンフォーカル顕微鏡
DE69712115T2 (de) * 1997-11-28 2002-09-26 Hamamatsu Photonics K.K., Hamamatsu Festkörperbildaufnahmevorrichtung für analysevorrichtung
JPH11248534A (ja) * 1998-03-03 1999-09-17 Dainippon Screen Mfg Co Ltd 分光反射光量計測装置
US6352502B1 (en) * 1998-12-03 2002-03-05 Lightouch Medical, Inc. Methods for obtaining enhanced spectroscopic information from living tissue, noninvasive assessment of skin condition and detection of skin abnormalities
US6982792B1 (en) * 2000-03-21 2006-01-03 J.A. Woollam Co. Inc Spectrophotometer, ellipsometer, polarimeter and the like systems
US6661509B2 (en) * 2001-02-07 2003-12-09 Thermo Electron Scientific Instruments Corporation Method and apparatus for alignment of multiple beam paths in spectroscopy
US6609015B2 (en) 2001-01-18 2003-08-19 Koninklijke Philips Electronics N.V. Analysis of a composition

Also Published As

Publication number Publication date
US7817268B2 (en) 2010-10-19
WO2006021929A1 (en) 2006-03-02
US20080129991A1 (en) 2008-06-05
EP1784680A1 (de) 2007-05-16
CN101010615A (zh) 2007-08-01
JP2008510986A (ja) 2008-04-10
CN100485455C (zh) 2009-05-06
JP4977025B2 (ja) 2012-07-18
EP1784680B1 (de) 2011-07-20

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