ATE517522T1 - Kondensatormikrofon mit membran mit biegescharnier und herstellungsverfahren dafür - Google Patents

Kondensatormikrofon mit membran mit biegescharnier und herstellungsverfahren dafür

Info

Publication number
ATE517522T1
ATE517522T1 AT07118250T AT07118250T ATE517522T1 AT E517522 T1 ATE517522 T1 AT E517522T1 AT 07118250 T AT07118250 T AT 07118250T AT 07118250 T AT07118250 T AT 07118250T AT E517522 T1 ATE517522 T1 AT E517522T1
Authority
AT
Austria
Prior art keywords
layer
forming
silicon layer
diaphragm
upper silicon
Prior art date
Application number
AT07118250T
Other languages
English (en)
Inventor
Hye Jin Kim
Sung Q Lee
Kang Ho Park
Jong Dae Kim
Original Assignee
Korea Electronics Telecomm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Electronics Telecomm filed Critical Korea Electronics Telecomm
Application granted granted Critical
Publication of ATE517522T1 publication Critical patent/ATE517522T1/de

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
AT07118250T 2006-12-06 2007-10-10 Kondensatormikrofon mit membran mit biegescharnier und herstellungsverfahren dafür ATE517522T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20060122736 2006-12-06
KR1020070054259A KR100901777B1 (ko) 2006-12-06 2007-06-04 유연 스프링형 진동판을 갖는 콘덴서 마이크로폰 및 그제조방법

Publications (1)

Publication Number Publication Date
ATE517522T1 true ATE517522T1 (de) 2011-08-15

Family

ID=39807069

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07118250T ATE517522T1 (de) 2006-12-06 2007-10-10 Kondensatormikrofon mit membran mit biegescharnier und herstellungsverfahren dafür

Country Status (2)

Country Link
KR (1) KR100901777B1 (de)
AT (1) ATE517522T1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101065292B1 (ko) 2008-12-22 2011-09-19 한국전자통신연구원 멤스 마이크로폰 및 그 제조 방법
KR101096548B1 (ko) * 2009-11-06 2011-12-20 주식회사 비에스이 멤스 마이크로폰 및 그 제조방법
KR20140040997A (ko) 2012-09-27 2014-04-04 한국전자통신연구원 멤스 마이크로폰 및 그 제조방법
KR102212575B1 (ko) 2017-02-02 2021-02-04 현대자동차 주식회사 마이크로폰 및 그 제조 방법
KR101947094B1 (ko) 2017-03-16 2019-02-12 소스트 주식회사 요철구조체 진동판을 갖는 멤스 마이크로폰
KR20190016718A (ko) 2017-08-09 2019-02-19 주식회사 디비하이텍 멤스 마이크로폰 및 이의 제조 방법
KR102370648B1 (ko) 2017-08-09 2022-03-07 주식회사 디비하이텍 멤스 마이크로폰 및 이의 제조 방법
KR102370642B1 (ko) 2017-09-11 2022-03-07 주식회사 디비하이텍 멤스 마이크로폰 및 이의 제조 방법
KR102370645B1 (ko) 2017-09-11 2022-03-07 주식회사 디비하이텍 멤스 마이크로폰 및 이의 제조 방법
KR102424774B1 (ko) 2017-09-11 2022-07-25 주식회사 디비하이텍 멤스 마이크로폰 및 이의 제조 방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100409273B1 (ko) * 2001-07-07 2003-12-11 주식회사 비에스이 칩 마이크로폰
KR100619478B1 (ko) 2005-03-18 2006-09-06 한국과학기술원 원형 진동판을 갖는 마이크로 음향소자 및 그 제조 방법
KR100765149B1 (ko) 2005-10-05 2007-10-15 전자부품연구원 초소형 음향 감지 장치 및 그 제조 방법

Also Published As

Publication number Publication date
KR100901777B1 (ko) 2009-06-11
KR20080052222A (ko) 2008-06-11

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Legal Events

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