ATE519119T1 - Elektrisches rückkopplungs-detektionssystem für mehrpunktsonden - Google Patents

Elektrisches rückkopplungs-detektionssystem für mehrpunktsonden

Info

Publication number
ATE519119T1
ATE519119T1 AT03704319T AT03704319T ATE519119T1 AT E519119 T1 ATE519119 T1 AT E519119T1 AT 03704319 T AT03704319 T AT 03704319T AT 03704319 T AT03704319 T AT 03704319T AT E519119 T1 ATE519119 T1 AT E519119T1
Authority
AT
Austria
Prior art keywords
electrical
point probe
detection system
test sample
sample surface
Prior art date
Application number
AT03704319T
Other languages
English (en)
Inventor
Christian Petersen
Peter Folmer Nielsen
Original Assignee
Capres As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8160957&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE519119(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Capres As filed Critical Capres As
Application granted granted Critical
Publication of ATE519119T1 publication Critical patent/ATE519119T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/30—Scanning potential microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analytical Chemistry (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Measuring Leads Or Probes (AREA)
  • Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AT03704319T 2002-01-07 2003-01-07 Elektrisches rückkopplungs-detektionssystem für mehrpunktsonden ATE519119T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DKPA200200020 2002-01-07
PCT/DK2003/000006 WO2003058260A1 (en) 2002-01-07 2003-01-07 Electrical feedback detection system for multi-point probes

Publications (1)

Publication Number Publication Date
ATE519119T1 true ATE519119T1 (de) 2011-08-15

Family

ID=8160957

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03704319T ATE519119T1 (de) 2002-01-07 2003-01-07 Elektrisches rückkopplungs-detektionssystem für mehrpunktsonden

Country Status (9)

Country Link
US (2) US7135876B2 (de)
EP (1) EP1466182B1 (de)
JP (1) JP4500546B2 (de)
KR (1) KR100978699B1 (de)
CN (1) CN1628251B (de)
AT (1) ATE519119T1 (de)
AU (1) AU2003206667A1 (de)
IL (1) IL162847A0 (de)
WO (1) WO2003058260A1 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003058260A1 (en) 2002-01-07 2003-07-17 Capres A/S Electrical feedback detection system for multi-point probes
JP5192232B2 (ja) * 2004-06-21 2013-05-08 カプレス・アクティーゼルスカブ プローブの位置合せを行なう方法
US7541219B2 (en) * 2004-07-02 2009-06-02 Seagate Technology Llc Integrated metallic contact probe storage device
JP4665704B2 (ja) * 2005-10-17 2011-04-06 セイコーインスツル株式会社 計測プローブ及び表面特性計測装置並びに表面特性計測方法
US7268571B1 (en) * 2006-03-20 2007-09-11 Texas Instruments Incorporated Method for validating and monitoring automatic test equipment contactor
CN101467057B (zh) * 2006-04-24 2013-07-17 卡普雷斯股份有限公司 用于测量浅层半导体注入物的片电阻和漏电流密度的方法
KR100868071B1 (ko) * 2006-09-27 2008-11-10 연세대학교 산학협력단 차동 전극 임피던스의 상대적인 측정을 이용한 전극의 접촉모니터링 방법
US8113038B2 (en) * 2006-12-20 2012-02-14 International Business Machines Corporation Systems and methods for detecting a coating on an item such as a magnetic head
EP1970714A1 (de) * 2007-03-12 2008-09-17 Capres Aps Vorrichtung mit Kontaktdetektor
EP2237052A1 (de) 2009-03-31 2010-10-06 Capres A/S Automatisierte Mehrpunktsondenmanipulation
CN102436334A (zh) * 2011-10-27 2012-05-02 苏州瀚瑞微电子有限公司 电容触摸屏系统测试机
EP2677324A1 (de) * 2012-06-20 2013-12-25 Capres A/S Tiefgeätzte Mehrpunktsonde
US9194888B2 (en) 2012-10-11 2015-11-24 Tektronix, Inc. Automatic probe ground connection checking techniques
US9170273B2 (en) * 2013-12-09 2015-10-27 Globalfoundries U.S. 2 Llc High frequency capacitance-voltage nanoprobing characterization
CN105445557A (zh) * 2015-01-04 2016-03-30 宁波英飞迈材料科技有限公司 一种高通量电阻率测试装置
CN116893283A (zh) * 2015-02-26 2023-10-17 沙朗特有限责任公司 多集成尖端扫描探针显微镜
DE102015105075A1 (de) * 2015-04-01 2016-10-06 Infineon Technologies Ag Stromsensor
EP3411880A4 (de) * 2016-02-01 2019-10-09 Bio-Rad Laboratories, Inc. Direktkontakt-kalibrierungssystem für ein instrument
CN107656146B (zh) * 2016-07-25 2019-10-18 中核建中核燃料元件有限公司 一种预防测头触碰格架的测量装置的测量方法
CN111316110B (zh) * 2017-11-15 2023-07-14 卡普雷斯股份有限公司 用于测试测试样品电气性能的探针和相关的接近探测器
CN108982950B (zh) * 2018-07-02 2021-10-22 东北大学 测试ybco膜超导环流电压信号的传感器及其制作方法
CN110850126B (zh) * 2018-08-03 2022-12-27 均豪精密工业股份有限公司 检测系统、探针装置及面板检测方法
TWI827809B (zh) * 2019-04-04 2024-01-01 丹麥商卡普雷斯股份有限公司 測量測試樣本之電性的方法，以及多層測試樣本
KR102512651B1 (ko) * 2021-03-25 2023-03-23 연세대학교 산학협력단 주사탐침 현미경용 프로브 및 이를 포함하는 이진 상태 주사탐침 현미경
EP4332558A1 (de) * 2022-09-05 2024-03-06 Stichting IMEC Nederland Verfahren und vorrichtungen zur messung der flüssigkeitsimpedanz mit einer vier-elektroden-vorrichtung

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US3611125A (en) * 1969-06-04 1971-10-05 Sylvania Electric Prod Apparatus for measuring electrical resistance
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US3995213A (en) * 1975-10-02 1976-11-30 The United States Of America As Represented By The Secretary Of The Air Force Surface impedance tester
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JPS59103288U (ja) * 1982-12-27 1984-07-11 富士通株式会社 抵抗測定回路
JPS59119276A (ja) * 1982-12-27 1984-07-10 Hitachi Ltd 絶縁抵抗測定装置
IT1206837B (it) * 1987-01-09 1989-05-11 Fiat Auto Spa Procedimento e dispositivo per il controllo non distruttivo di puntidi saldatura di lamiera realizzati mediante saldatura elettrica
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US5627522A (en) * 1992-03-27 1997-05-06 Abbott Laboratories Automated liquid level sensing system
US5691648A (en) * 1992-11-10 1997-11-25 Cheng; David Method and apparatus for measuring sheet resistance and thickness of thin films and substrates
WO1994011745A1 (en) 1992-11-10 1994-05-26 David Cheng Method and apparatus for measuring film thickness
DE69434641T2 (de) * 1993-04-13 2006-12-14 Agilent Technologies, Inc., Palo Alto Elektrooptisches Messinstrument
KR0138618B1 (ko) * 1993-08-04 1998-06-15 이노우에 아끼라 프로브카드, 프로브카드용 동축 프로브빔 및 그 제조방법
US6091248A (en) * 1994-08-29 2000-07-18 Imec Vzw Method for measuring the electrical potential in a semiconductor element
JP3577839B2 (ja) * 1996-06-04 2004-10-20 株式会社日立製作所 不良検査方法および装置
EP0974845A1 (de) 1998-07-08 2000-01-26 Christian Leth Petersen Vorrichtung zum Testen elektrischer Eigenschaften mittels eines Mehrspitzenfühlers
WO2000003252A2 (en) 1998-07-08 2000-01-20 Capres Aps Multi-point probe
JP2000214181A (ja) * 1999-01-21 2000-08-04 Hioki Ee Corp コンタクトプロ―ブおよび回路基板検査装置
DE69931778T2 (de) * 1999-09-15 2007-06-14 Capres A/S Mehrpunktesonde
CA2309412A1 (en) 2000-05-24 2001-11-24 Michael Thompson Scanning of biochemical microassays by kelvin microprobe
JP3638865B2 (ja) * 2000-07-13 2005-04-13 喜萬 中山 ナノチューブ端子を用いた四端子測定装置
WO2003058260A1 (en) 2002-01-07 2003-07-17 Capres A/S Electrical feedback detection system for multi-point probes

Also Published As

Publication number Publication date
WO2003058260A1 (en) 2003-07-17
US7307436B2 (en) 2007-12-11
US7135876B2 (en) 2006-11-14
EP1466182B1 (de) 2011-08-03
IL162847A0 (en) 2005-11-20
US20050127929A1 (en) 2005-06-16
KR100978699B1 (ko) 2010-08-30
CN1628251B (zh) 2010-08-18
KR20040085146A (ko) 2004-10-07
US20070024301A1 (en) 2007-02-01
JP4500546B2 (ja) 2010-07-14
EP1466182A1 (de) 2004-10-13
AU2003206667A1 (en) 2003-07-24
JP2005514625A (ja) 2005-05-19
CN1628251A (zh) 2005-06-15

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