ATE521009T1 - Interferometrischer fabry-perot-mems-modulator elektromagnetischer wellen mit einem elektrischen feld von null - Google Patents

Interferometrischer fabry-perot-mems-modulator elektromagnetischer wellen mit einem elektrischen feld von null

Info

Publication number
ATE521009T1
ATE521009T1 AT06826848T AT06826848T ATE521009T1 AT E521009 T1 ATE521009 T1 AT E521009T1 AT 06826848 T AT06826848 T AT 06826848T AT 06826848 T AT06826848 T AT 06826848T AT E521009 T1 ATE521009 T1 AT E521009T1
Authority
AT
Austria
Prior art keywords
fabry
plate
fpid
mems
plates
Prior art date
Application number
AT06826848T
Other languages
English (en)
Inventor
Kenneth Faase
James Mckinnell
Arthur Piehl
Murali Chaparala
James Przybyla
Bao Yeh
Adel Jilani
Eric Nikkel
Original Assignee
Hewlett Packard Development Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co filed Critical Hewlett Packard Development Co
Application granted granted Critical
Publication of ATE521009T1 publication Critical patent/ATE521009T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
AT06826848T 2005-10-31 2006-10-27 Interferometrischer fabry-perot-mems-modulator elektromagnetischer wellen mit einem elektrischen feld von null ATE521009T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/263,313 US7760197B2 (en) 2005-10-31 2005-10-31 Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field
PCT/US2006/041962 WO2007053438A1 (en) 2005-10-31 2006-10-27 Fabry-perot interferometric mems electromagnetic wave modulator with zero-electric field

Publications (1)

Publication Number Publication Date
ATE521009T1 true ATE521009T1 (de) 2011-09-15

Family

ID=37725478

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06826848T ATE521009T1 (de) 2005-10-31 2006-10-27 Interferometrischer fabry-perot-mems-modulator elektromagnetischer wellen mit einem elektrischen feld von null

Country Status (4)

Country Link
US (1) US7760197B2 (de)
EP (1) EP1946176B1 (de)
AT (1) ATE521009T1 (de)
WO (1) WO2007053438A1 (de)

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US8164821B2 (en) * 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
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US7612933B2 (en) 2008-03-27 2009-11-03 Qualcomm Mems Technologies, Inc. Microelectromechanical device with spacing layer
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US8358266B2 (en) 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
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CN102160196A (zh) * 2008-09-18 2011-08-17 高通Mems科技公司 增加太阳能收集器/集中器中的光收集角度范围
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US8102592B2 (en) 2010-03-24 2012-01-24 Unipel Technologies, LLC Reflective display using calibration data for electrostatically maintaining parallel relationship of adjustable-depth cavity component
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Also Published As

Publication number Publication date
WO2007053438A1 (en) 2007-05-10
EP1946176B1 (de) 2011-08-17
US7760197B2 (en) 2010-07-20
EP1946176A1 (de) 2008-07-23
US20070097694A1 (en) 2007-05-03

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