ATE521580T1 - Verfahren zum formen von quarzglas - Google Patents

Verfahren zum formen von quarzglas

Info

Publication number
ATE521580T1
ATE521580T1 AT05765431T AT05765431T ATE521580T1 AT E521580 T1 ATE521580 T1 AT E521580T1 AT 05765431 T AT05765431 T AT 05765431T AT 05765431 T AT05765431 T AT 05765431T AT E521580 T1 ATE521580 T1 AT E521580T1
Authority
AT
Austria
Prior art keywords
silica glass
quartz glass
ppm
molding
same
Prior art date
Application number
AT05765431T
Other languages
English (en)
Inventor
Tetsuya Abe
Shouji Yajima
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of ATE521580T1 publication Critical patent/ATE521580T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/16—Gearing or controlling mechanisms specially adapted for glass presses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
    • C03B32/005—Hot-pressing vitrified, non-porous, shaped glass products
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/07—Impurity concentration specified
    • C03B2201/075—Hydroxyl ion (OH)
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/66—Means for providing special atmospheres, e.g. reduced pressure, inert gas, reducing gas, clean room

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
AT05765431T 2004-07-02 2005-06-29 Verfahren zum formen von quarzglas ATE521580T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004197289 2004-07-02
PCT/JP2005/011909 WO2006003912A1 (ja) 2004-07-02 2005-06-29 石英ガラスの成形方法

Publications (1)

Publication Number Publication Date
ATE521580T1 true ATE521580T1 (de) 2011-09-15

Family

ID=35782720

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05765431T ATE521580T1 (de) 2004-07-02 2005-06-29 Verfahren zum formen von quarzglas

Country Status (8)

Country Link
US (1) US20070271958A1 (de)
EP (1) EP1783103B1 (de)
JP (1) JP4835998B2 (de)
KR (1) KR101146551B1 (de)
CN (1) CN1964923B (de)
AT (1) ATE521580T1 (de)
MX (1) MX2007000362A (de)
WO (1) WO2006003912A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4826118B2 (ja) * 2005-03-29 2011-11-30 旭硝子株式会社 合成石英ガラスの製造方法及び光学部材用合成石英ガラス
JP5453886B2 (ja) * 2009-04-02 2014-03-26 住友電気工業株式会社 シリカガラスの加熱成形方法
JP5812005B2 (ja) * 2010-09-21 2015-11-11 株式会社ニコン ガラス成形用の成形型、ガラス成形装置、ガラス成形方法及びフォトマスク基板の製造方法
US9027365B2 (en) 2013-01-08 2015-05-12 Heraeus Quartz America Llc System and method for forming fused quartz glass
TWI529059B (zh) * 2013-11-29 2016-04-11 Taiwan Green Point Entpr Co Injection molding machine and the use of the tablet press detection system and detection methods

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4778505A (en) * 1985-06-27 1988-10-18 Hoya Corporation Method of molding glass body
JPH0274331A (ja) * 1988-09-10 1990-03-14 Nkk Corp 樹脂ラミネート鋼板
JPH08338Y2 (ja) * 1988-11-28 1996-01-10 信越石英株式会社 石英ガラスの成型装置
JPH08151220A (ja) * 1994-11-28 1996-06-11 Nippon Sekiei Glass Kk 石英ガラスの成形方法
JP3064857B2 (ja) * 1995-03-28 2000-07-12 株式会社ニコン 光リソグラフィー用光学部材および合成石英ガラスの製造方法
JP2000219523A (ja) * 1999-01-28 2000-08-08 Nikon Corp 石英ガラスの成形方法、成形装置、及びそれにより得られた石英ガラス
JP4485031B2 (ja) * 2000-08-08 2010-06-16 株式会社オハラ 紫外線用石英ガラスおよびその製造方法
JP2002220240A (ja) * 2001-01-22 2002-08-09 Sumitomo Metal Ind Ltd 石英ガラスの熱間形成方法
ATE324355T1 (de) * 2001-08-15 2006-05-15 Schott Ag Quarzglasplatte sowie verfahren und vorrichtung zur herstellung von optischen bauteilen
US6928838B2 (en) * 2001-09-27 2005-08-16 Toshiba Machine Co., Ltd. Apparatus and method for forming silica glass elements
JP4341277B2 (ja) * 2003-04-07 2009-10-07 株式会社ニコン 石英ガラスの成形方法

Also Published As

Publication number Publication date
CN1964923B (zh) 2010-12-22
KR101146551B1 (ko) 2012-05-25
EP1783103A4 (de) 2010-07-21
MX2007000362A (es) 2007-03-26
EP1783103A1 (de) 2007-05-09
JP4835998B2 (ja) 2011-12-14
WO2006003912A1 (ja) 2006-01-12
US20070271958A1 (en) 2007-11-29
EP1783103B1 (de) 2011-08-24
JPWO2006003912A1 (ja) 2008-04-17
CN1964923A (zh) 2007-05-16
KR20070020305A (ko) 2007-02-20
HK1100000A1 (en) 2007-08-31

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Legal Events

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