ATE522920T1 - Röntgenanode mit verbesserter wärmeableitung - Google Patents

Röntgenanode mit verbesserter wärmeableitung

Info

Publication number
ATE522920T1
ATE522920T1 AT08799932T AT08799932T ATE522920T1 AT E522920 T1 ATE522920 T1 AT E522920T1 AT 08799932 T AT08799932 T AT 08799932T AT 08799932 T AT08799932 T AT 08799932T AT E522920 T1 ATE522920 T1 AT E522920T1
Authority
AT
Austria
Prior art keywords
heat dissipation
improved heat
ray anode
anode
ray
Prior art date
Application number
AT08799932T
Other languages
English (en)
Inventor
Peter Roedhammer
Wolfgang Glatz
Bernhard Tabernig
Hannes Wagner
Original Assignee
Plansee Se
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plansee Se filed Critical Plansee Se
Application granted granted Critical
Publication of ATE522920T1 publication Critical patent/ATE522920T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C26/00—Alloys containing diamond or cubic or wurtzitic boron nitride, fullerenes or carbon nanotubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1204—Cooling of the anode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1291—Thermal conductivity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1291—Thermal conductivity
    • H01J2235/1295—Contact between conducting bodies

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • X-Ray Techniques (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT08799932T 2007-09-28 2008-09-25 Röntgenanode mit verbesserter wärmeableitung ATE522920T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT0058307U AT10598U1 (de) 2007-09-28 2007-09-28 Ríntgenanode mit verbesserter warmeableitung
PCT/AT2008/000343 WO2009039545A1 (de) 2007-09-28 2008-09-25 Röntgenanode mit verbesserter wärmeableitung

Publications (1)

Publication Number Publication Date
ATE522920T1 true ATE522920T1 (de) 2011-09-15

Family

ID=40282468

Family Applications (2)

Application Number Title Priority Date Filing Date
AT0058307U AT10598U1 (de) 2007-09-28 2007-09-28 Ríntgenanode mit verbesserter warmeableitung
AT08799932T ATE522920T1 (de) 2007-09-28 2008-09-25 Röntgenanode mit verbesserter wärmeableitung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT0058307U AT10598U1 (de) 2007-09-28 2007-09-28 Ríntgenanode mit verbesserter warmeableitung

Country Status (5)

Country Link
US (1) US8243884B2 (de)
EP (1) EP2193538B1 (de)
JP (1) JP5450421B2 (de)
AT (2) AT10598U1 (de)
WO (1) WO2009039545A1 (de)

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JP5648055B2 (ja) * 2009-08-11 2015-01-07 プランゼー エスエー 回転陽極ｘ線管のための回転陽極および回転陽極の製造方法
DE102011079878A1 (de) * 2011-07-27 2013-01-31 Siemens Aktiengesellschaft Röntgenröhre und Verfahren zu deren Herstellung
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
KR102123785B1 (ko) * 2012-08-17 2020-06-18 누베라 퓨엘 셀스, 엘엘씨 전기화학 전지에 사용하기 위한 양극판의 디자인
US9449782B2 (en) * 2012-08-22 2016-09-20 General Electric Company X-ray tube target having enhanced thermal performance and method of making same
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US10416099B2 (en) 2013-09-19 2019-09-17 Sigray, Inc. Method of performing X-ray spectroscopy and X-ray absorption spectrometer system
US9390881B2 (en) 2013-09-19 2016-07-12 Sigray, Inc. X-ray sources using linear accumulation
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9992917B2 (en) 2014-03-10 2018-06-05 Vulcan GMS 3-D printing method for producing tungsten-based shielding parts
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
JP6429602B2 (ja) * 2014-11-12 2018-11-28 キヤノン株式会社 陽極及びこれを用いたｘ線発生管、ｘ線発生装置、ｘ線撮影システム
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
US10847336B2 (en) * 2017-08-17 2020-11-24 Bruker AXS, GmbH Analytical X-ray tube with high thermal performance
US10748736B2 (en) 2017-10-18 2020-08-18 Kla-Tencor Corporation Liquid metal rotating anode X-ray source for semiconductor metrology
US10734186B2 (en) * 2017-12-19 2020-08-04 General Electric Company System and method for improving x-ray production in an x-ray device
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
DE112019002822T5 (de) 2018-06-04 2021-02-18 Sigray, Inc. Wellenlängendispersives röntgenspektrometer
US10658145B2 (en) 2018-07-26 2020-05-19 Sigray, Inc. High brightness x-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
US10962491B2 (en) 2018-09-04 2021-03-30 Sigray, Inc. System and method for x-ray fluorescence with filtering
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
EP3653744A1 (de) * 2018-11-16 2020-05-20 The Swatch Group Research and Development Ltd Verbundmaterial mit metallmatrix, und herstellungsverfahren eines solchen materials
US11152183B2 (en) 2019-07-15 2021-10-19 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
US11719652B2 (en) 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
WO2023137334A1 (en) 2022-01-13 2023-07-20 Sigray, Inc. Microfocus x-ray source for generating high flux low energy x-rays
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
CN114899068A (zh) * 2022-06-23 2022-08-12 四川华束科技有限公司 一种反射式x射线靶基体、制备方法及x射线管
US11955308B1 (en) 2022-09-22 2024-04-09 Kla Corporation Water cooled, air bearing based rotating anode x-ray illumination source
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources

Family Cites Families (9)

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Publication number Priority date Publication date Assignee Title
JPH0294344A (ja) * 1988-09-30 1990-04-05 Shimadzu Corp Ｘ線管用回転陽極ターゲットおよびその製造方法
US4972449A (en) * 1990-03-19 1990-11-20 General Electric Company X-ray tube target
AT1984U1 (de) * 1997-04-22 1998-02-25 Plansee Ag Verfahren zur herstellung einer anode für röntgenröhren
JP3893681B2 (ja) 1997-08-19 2007-03-14 住友電気工業株式会社 半導体用ヒートシンクおよびその製造方法
JP2000260369A (ja) * 1999-03-09 2000-09-22 Toshiba Corp Ｘ線管用ターゲットおよびそれを用いたｘ線管
FR2810395B1 (fr) 2000-06-16 2002-09-06 Thomson Tubes Electroniques Dissipateur thermique a performances thermiques accrues et procede de fabrication
JP3731136B2 (ja) 2000-09-14 2006-01-05 株式会社リガク Ｘ線管ターゲットおよびその製造方法
DE102004003370B4 (de) 2004-01-22 2015-04-02 Siemens Aktiengesellschaft Hochleistungsanodenteller für eine direkt gekühlte Drehkolbenröhre
DE102005039188B4 (de) * 2005-08-18 2007-06-21 Siemens Ag Röntgenröhre

Also Published As

Publication number Publication date
US20100316193A1 (en) 2010-12-16
WO2009039545A1 (de) 2009-04-02
US8243884B2 (en) 2012-08-14
AT10598U1 (de) 2009-06-15
JP2010541134A (ja) 2010-12-24
EP2193538A1 (de) 2010-06-09
EP2193538B1 (de) 2011-08-31
JP5450421B2 (ja) 2014-03-26

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