ATE522925T1 - Chiptransferverfahren und vorrichtung - Google Patents

Chiptransferverfahren und vorrichtung

Info

Publication number
ATE522925T1
ATE522925T1 AT03815128T AT03815128T ATE522925T1 AT E522925 T1 ATE522925 T1 AT E522925T1 AT 03815128 T AT03815128 T AT 03815128T AT 03815128 T AT03815128 T AT 03815128T AT E522925 T1 ATE522925 T1 AT E522925T1
Authority
AT
Austria
Prior art keywords
chip
transfer
collet
wafer
lead frame
Prior art date
Application number
AT03815128T
Other languages
English (en)
Inventor
Johannes Bosch
Wilhelmus Derks
Antonius Kamphuis
Thomas Kampschreur
Joep Stokkermans
Leon Wetzels
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE522925T1 publication Critical patent/ATE522925T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0446—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/19—Delaminating means
    • Y10T156/1978—Delaminating bending means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49121—Beam lead frame or beam lead device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49133—Assembling to base an electrical component, e.g., capacitor, etc. with component orienting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble
    • Y10T29/5313—Means to assemble electrical device
    • Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/53—Means to assemble or disassemble
    • Y10T29/5313—Means to assemble electrical device
    • Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
    • Y10T29/53178—Chip component

Landscapes

  • Die Bonding (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
AT03815128T 2003-01-16 2003-12-11 Chiptransferverfahren und vorrichtung ATE522925T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03100077 2003-01-16
PCT/IB2003/006050 WO2004064124A1 (en) 2003-01-16 2003-12-11 Chip transfer method and apparatus

Publications (1)

Publication Number Publication Date
ATE522925T1 true ATE522925T1 (de) 2011-09-15

Family

ID=32695655

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03815128T ATE522925T1 (de) 2003-01-16 2003-12-11 Chiptransferverfahren und vorrichtung

Country Status (9)

Country Link
US (1) US7726011B2 (de)
EP (1) EP1588402B1 (de)
JP (1) JP2006513565A (de)
KR (1) KR20050092765A (de)
CN (1) CN1739186B (de)
AT (1) ATE522925T1 (de)
AU (1) AU2003303704A1 (de)
TW (1) TW200501200A (de)
WO (1) WO2004064124A1 (de)

Families Citing this family (30)

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US7303111B2 (en) * 2005-10-14 2007-12-04 Asm Technology Singapore Pte. Ltd. Lightweight bondhead assembly
US7569932B2 (en) 2005-11-18 2009-08-04 Checkpoint Systems, Inc. Rotary chip attach
JP2009526394A (ja) * 2006-02-10 2009-07-16 エヌエックスピー ビー ヴィ 光学装置を対象物と合わせるための器具を備える光学機器を持つ半導体処理システム
JP2008098320A (ja) * 2006-10-11 2008-04-24 Nidec Tosok Corp ボンディング装置
KR100787627B1 (ko) * 2007-02-01 2007-12-26 (주)큐엠씨 반도체 칩 분류장치
JP5074788B2 (ja) * 2007-03-06 2012-11-14 株式会社日立ハイテクインスツルメンツ チップ部品装着装置
JP2009105357A (ja) * 2007-10-23 2009-05-14 M Tec Kk チップの搬送方法及び装置
SG173943A1 (en) * 2010-03-04 2011-09-29 Ah Yoong Sim Rotary die bonding apparatus and methodology thereof
WO2013171863A1 (ja) * 2012-05-16 2013-11-21 上野精機株式会社 ダイボンダー装置
CN103975425B (zh) * 2012-12-04 2017-11-14 上野精机株式会社 粘片机装置
KR102231293B1 (ko) 2014-02-10 2021-03-23 삼성전자주식회사 다이 본딩 장치
US10199254B2 (en) * 2015-05-12 2019-02-05 Nexperia B.V. Method and system for transferring semiconductor devices from a wafer to a carrier structure
US10104784B2 (en) 2015-11-06 2018-10-16 Nxp B.V. Method for making an electronic product with flexible substrate
US9994407B2 (en) 2015-11-06 2018-06-12 Nxp B.V. System and method for processing a flexible substrate
CN109314069B (zh) * 2016-05-13 2022-08-12 Asml荷兰有限公司 用于部件堆叠和/或拾放过程的微型多拾取元件
US10192773B2 (en) 2016-06-20 2019-01-29 Nexperia B.V. Semiconductor device positioning system and method for semiconductor device positioning
KR101785388B1 (ko) 2016-07-11 2017-10-16 (주)쏠라딘 칩 이송 장치 및 이를 이용한 칩 이송 시스템
JP6889614B2 (ja) * 2017-05-31 2021-06-18 ファスフォードテクノロジ株式会社 半導体製造装置および半導体装置の製造方法
DE102017124582B4 (de) * 2017-10-20 2026-01-22 ASMPT GmbH & Co. KG Ergänzungswerkzeug für Chip-Transfervorrichtung mit Entnahmewerkzeug und Wendewerkzeug
EP3503172B1 (de) * 2017-12-20 2024-04-03 Nexperia B.V. Vorrichtung und system
EP3672040A1 (de) * 2018-12-17 2020-06-24 Nexperia B.V. Vorrichtung zur ermöglichung einer dreh- und translationsbewegung mittels eines einzigen motors; vorrichtung und system mit einer solchen vorrichtung
KR102172744B1 (ko) * 2019-01-28 2020-11-02 세메스 주식회사 다이 본딩 장치
EP3734649A1 (de) * 2019-05-03 2020-11-04 Nexperia B.V. Transfergerät für elektronische komponenten
DE102019125127A1 (de) 2019-09-18 2021-03-18 Mühlbauer Gmbh & Co. Kg Bauteilhandhabung, Bauteilinspektion
DE102019125134B4 (de) 2019-09-18 2025-12-18 Mühlbauer Gmbh & Co. Kg Vorrichtung und Verfahren zur Bauteilhandhabung
JP6842732B1 (ja) * 2020-09-24 2021-03-17 上野精機株式会社 電子部品の処理装置
US12506026B2 (en) * 2022-06-09 2025-12-23 Creeled, Inc. Mass transfer of semiconductor die using transfer elements
CN220253223U (zh) * 2023-07-13 2023-12-26 上海赢朔电子科技股份有限公司 一种连杆式转塔邦头模组机构
WO2026077612A1 (en) * 2024-10-10 2026-04-16 Asml Netherlands B.V. Stage for die placement
WO2026077613A1 (en) * 2024-10-10 2026-04-16 Asml Netherlands B.V. Bonding tool

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US4461610A (en) * 1980-06-02 1984-07-24 Tdk Corporation Apparatus for mounting chip type circuit elements on printed circuit boards
JPS6012799A (ja) * 1983-07-01 1985-01-23 三洋電機株式会社 チップ状電子部品の自動装着装置
CN1007692B (zh) * 1985-05-20 1990-04-18 Tdk株式会社 在印刷电路板上安装芯片型电路元件的方法及其所用装置
US4914808A (en) * 1987-10-16 1990-04-10 Sanyo Electric Co., Ltd Automatic electronic parts mounting apparatus for repeatedly mounting in forward and reverse sequences
CA1320005C (en) * 1988-06-16 1993-07-06 Kotaro Harigane Electronic component mounting apparatus
JPH0267739A (ja) * 1988-09-01 1990-03-07 Mitsubishi Electric Corp ダイボンディング方法とその装置
US6171049B1 (en) * 1996-02-29 2001-01-09 Alphasem Ag Method and device for receiving, orientating and assembling of components
JP4027042B2 (ja) * 1999-05-06 2007-12-26 松下電器産業株式会社 部品搭載装置及びその方法
KR100779771B1 (ko) * 2000-09-13 2007-11-27 언액시스 인터내셔널 트레이딩 엘티디 반도체 칩을 장착하는 장치

Also Published As

Publication number Publication date
EP1588402A1 (de) 2005-10-26
US20070137031A1 (en) 2007-06-21
CN1739186B (zh) 2010-10-13
CN1739186A (zh) 2006-02-22
WO2004064124A1 (en) 2004-07-29
KR20050092765A (ko) 2005-09-22
US7726011B2 (en) 2010-06-01
TW200501200A (en) 2005-01-01
AU2003303704A1 (en) 2004-08-10
EP1588402B1 (de) 2011-08-31
JP2006513565A (ja) 2006-04-20

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