ATE525628T1 - Sensor und verfahren zur druckbestimmung bei einer flüssigkeit - Google Patents

Sensor und verfahren zur druckbestimmung bei einer flüssigkeit

Info

Publication number
ATE525628T1
ATE525628T1 AT08872173T AT08872173T ATE525628T1 AT E525628 T1 ATE525628 T1 AT E525628T1 AT 08872173 T AT08872173 T AT 08872173T AT 08872173 T AT08872173 T AT 08872173T AT E525628 T1 ATE525628 T1 AT E525628T1
Authority
AT
Austria
Prior art keywords
membrane
probe
inner volume
contact area
fluid
Prior art date
Application number
AT08872173T
Other languages
English (en)
Inventor
Thomsen Knud
Original Assignee
Scherrer Inst Paul
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Scherrer Inst Paul filed Critical Scherrer Inst Paul
Application granted granted Critical
Publication of ATE525628T1 publication Critical patent/ATE525628T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/002—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by thermal means, e.g. hypsometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
AT08872173T 2008-02-08 2008-12-18 Sensor und verfahren zur druckbestimmung bei einer flüssigkeit ATE525628T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08002395A EP2088413A1 (de) 2008-02-08 2008-02-08 Sensor und Verfahren zur Druckbestimmung in einer Flüssigkeit
PCT/EP2008/067897 WO2009097940A1 (en) 2008-02-08 2008-12-18 Sensor and method for determining the pressure in a fluid

Publications (1)

Publication Number Publication Date
ATE525628T1 true ATE525628T1 (de) 2011-10-15

Family

ID=39586004

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08872173T ATE525628T1 (de) 2008-02-08 2008-12-18 Sensor und verfahren zur druckbestimmung bei einer flüssigkeit

Country Status (6)

Country Link
US (1) US8397576B2 (de)
EP (2) EP2088413A1 (de)
KR (1) KR20100124714A (de)
AT (1) ATE525628T1 (de)
ES (1) ES2374034T3 (de)
WO (1) WO2009097940A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106706170B (zh) * 2017-03-16 2023-01-10 慈溪欧卡特仪表科技有限公司 一种表盘大压力范围线性缩小的压力表

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5437189A (en) * 1994-05-03 1995-08-01 Motorola, Inc. Dual absolute pressure sensor and method thereof
US5557972A (en) * 1994-09-13 1996-09-24 Teledyne Industries, Inc. Miniature silicon based thermal vacuum sensor and method of measuring vacuum pressures
DE19711874C2 (de) * 1997-03-21 1999-08-12 Max Planck Gesellschaft Folienmanometer
WO1999034184A1 (de) * 1997-12-23 1999-07-08 Unaxis Trading Ag Kapazitive vakuummesszelle
US6860153B2 (en) * 2000-02-22 2005-03-01 Simon Fraser University Gas pressure sensor based on short-distance heat conduction and method for fabricating same
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
JP4683618B2 (ja) * 2005-02-10 2011-05-18 キヤノンアネルバ株式会社 隔膜型圧力センサ及びその製造方法
KR101292929B1 (ko) * 2005-08-12 2013-08-02 인피콘 게엠베하 광학 간섭계 압력 센서
WO2008154760A1 (de) * 2007-06-19 2008-12-24 Inficon Gmbh Vakuummesszellenanordnung mit heizung
US7707891B2 (en) * 2008-06-27 2010-05-04 Inficon Gmbh Optical interferometric pressure sensor

Also Published As

Publication number Publication date
EP2240752A1 (de) 2010-10-20
US20100319460A1 (en) 2010-12-23
KR20100124714A (ko) 2010-11-29
US8397576B2 (en) 2013-03-19
WO2009097940A1 (en) 2009-08-13
EP2088413A1 (de) 2009-08-12
ES2374034T3 (es) 2012-02-13
EP2240752B1 (de) 2011-09-21

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