ATE526293T1 - Verfahren zur herstellung eines quarzglastiegels - Google Patents

Verfahren zur herstellung eines quarzglastiegels

Info

Publication number
ATE526293T1
ATE526293T1 AT08012145T AT08012145T ATE526293T1 AT E526293 T1 ATE526293 T1 AT E526293T1 AT 08012145 T AT08012145 T AT 08012145T AT 08012145 T AT08012145 T AT 08012145T AT E526293 T1 ATE526293 T1 AT E526293T1
Authority
AT
Austria
Prior art keywords
arc melting
producing
crucial
quartz glass
vitreous silica
Prior art date
Application number
AT08012145T
Other languages
English (en)
Inventor
Hiroshi Kishi
Minoru Kanda
Original Assignee
Japan Super Quartz Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=39829687&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE526293(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Japan Super Quartz Corp filed Critical Japan Super Quartz Corp
Application granted granted Critical
Publication of ATE526293T1 publication Critical patent/ATE526293T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/002—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/14—Crucibles or vessels
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
AT08012145T 2008-07-04 2008-07-04 Verfahren zur herstellung eines quarzglastiegels ATE526293T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP08012145A EP2141130B1 (de) 2008-07-04 2008-07-04 Verfahren zur Herstellung eines Quarzglastiegels

Publications (1)

Publication Number Publication Date
ATE526293T1 true ATE526293T1 (de) 2011-10-15

Family

ID=39829687

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08012145T ATE526293T1 (de) 2008-07-04 2008-07-04 Verfahren zur herstellung eines quarzglastiegels

Country Status (2)

Country Link
EP (1) EP2141130B1 (de)
AT (1) ATE526293T1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5714476B2 (ja) * 2010-12-31 2015-05-07 株式会社Sumco シリカガラスルツボの製造方法
JP5749147B2 (ja) * 2010-12-31 2015-07-15 株式会社Sumco シリカガラスルツボの製造方法
JP5777881B2 (ja) 2010-12-31 2015-09-09 株式会社Sumco シリカガラスルツボの製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3141919C2 (de) * 1981-10-22 1984-05-17 Heraeus Quarzschmelze Gmbh, 6450 Hanau Verfahren zur Herstellung eines rohrförmigen Verbundkörpers
US4935046A (en) * 1987-12-03 1990-06-19 Shin-Etsu Handotai Company, Limited Manufacture of a quartz glass vessel for the growth of single crystal semiconductor
JP2789804B2 (ja) * 1990-09-11 1998-08-27 三菱マテリアル株式会社 シリコン単結晶引上げ用石英ルツボとその製造方法
JP2923720B2 (ja) 1992-12-26 1999-07-26 三菱マテリアルクォーツ株式会社 シリコン単結晶引上げ用石英ルツボ
JP3798849B2 (ja) 1996-07-09 2006-07-19 信越石英株式会社 石英ルツボの製造装置及び方法
DE10033632C1 (de) * 2000-07-11 2002-01-03 Heraeus Quarzglas Vorrichtung zur Herstellung rotationssymmetrischer Quarzglastiegel

Also Published As

Publication number Publication date
EP2141130B1 (de) 2011-09-28
EP2141130A1 (de) 2010-01-06

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