ATE529877T1 - Mechanischer schalter mit gekrümmter doppelschicht - Google Patents

Mechanischer schalter mit gekrümmter doppelschicht

Info

Publication number
ATE529877T1
ATE529877T1 AT07837367T AT07837367T ATE529877T1 AT E529877 T1 ATE529877 T1 AT E529877T1 AT 07837367 T AT07837367 T AT 07837367T AT 07837367 T AT07837367 T AT 07837367T AT E529877 T1 ATE529877 T1 AT E529877T1
Authority
AT
Austria
Prior art keywords
mechanical switch
double layer
curved double
switch
bilayer
Prior art date
Application number
AT07837367T
Other languages
English (en)
Inventor
Vladimir Aksyuk
Omar Lopez
Flavio Pardo
Maria Simon
Original Assignee
Alcatel Lucent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent filed Critical Alcatel Lucent
Application granted granted Critical
Publication of ATE529877T1 publication Critical patent/ATE529877T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0027—Movable electrode connected to ground in the open position, for improving isolation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49105—Switch making

Landscapes

  • Micromachines (AREA)
  • Switches With Compound Operations (AREA)
AT07837367T 2006-09-12 2007-08-27 Mechanischer schalter mit gekrümmter doppelschicht ATE529877T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/519,623 US8063456B2 (en) 2006-09-12 2006-09-12 Mechanical switch with a curved bilayer
PCT/US2007/018812 WO2008033213A2 (en) 2006-09-12 2007-08-27 Mechanical switch with a curved bilayer

Publications (1)

Publication Number Publication Date
ATE529877T1 true ATE529877T1 (de) 2011-11-15

Family

ID=39092008

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07837367T ATE529877T1 (de) 2006-09-12 2007-08-27 Mechanischer schalter mit gekrümmter doppelschicht

Country Status (7)

Country Link
US (2) US8063456B2 (de)
EP (1) EP2067158B1 (de)
JP (2) JP2010503179A (de)
KR (1) KR101151976B1 (de)
CN (1) CN101512701B (de)
AT (1) ATE529877T1 (de)
WO (1) WO2008033213A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8063456B2 (en) 2006-09-12 2011-11-22 Alcatel Lucent Mechanical switch with a curved bilayer
US8063330B2 (en) * 2007-06-22 2011-11-22 Nokia Corporation Uniform threshold for capacitive sensing
KR101153671B1 (ko) * 2009-11-12 2012-06-18 중앙대학교 산학협력단 미케니컬 트랜지스터 하이브리드 스위치 및 이의 응용 장치
US9748048B2 (en) 2014-04-25 2017-08-29 Analog Devices Global MEMS switch
CN108352275B (zh) * 2015-11-16 2020-07-28 卡文迪什动力有限公司 高功率rf mems开关的热管理
EP3411894B1 (de) 2016-02-04 2023-06-14 Analog Devices International Unlimited Company Aktive öffnende mems-schalter-vorrichtung

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US304634A (en) * 1884-09-02 Snap-clasp
US885026A (en) * 1907-03-18 1908-04-21 Sidney P Dodge Hat hanger and marker.
US2166533A (en) * 1937-04-30 1939-07-18 Oettel Erwin Suspension device
FR1562207A (de) 1968-02-20 1969-04-04
US5233459A (en) 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
US5619061A (en) 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US5619177A (en) 1995-01-27 1997-04-08 Mjb Company Shape memory alloy microactuator having an electrostatic force and heating means
ATE294461T1 (de) 1996-02-10 2005-05-15 Fraunhofer Ges Forschung Bistabiler microantrieb mit gekoppelten membranen
US5994159A (en) 1997-12-22 1999-11-30 Lucent Technologies, Inc. Self-assemblying micro-mechanical device
US6396368B1 (en) * 1999-11-10 2002-05-28 Hrl Laboratories, Llc CMOS-compatible MEM switches and method of making
USD493013S1 (en) * 2001-04-13 2004-07-13 Barbara Stachowski Multi-layered hairclip device
US6646215B1 (en) * 2001-06-29 2003-11-11 Teravicin Technologies, Inc. Device adapted to pull a cantilever away from a contact structure
WO2003028059A1 (en) * 2001-09-21 2003-04-03 Hrl Laboratories, Llc Mems switches and methods of making same
US20030222740A1 (en) * 2002-03-18 2003-12-04 Microlab, Inc. Latching micro-magnetic switch with improved thermal reliability
JP2005536013A (ja) * 2002-08-08 2005-11-24 エックスコム ワイアレス インコーポレイテッド マルチモルフ・アクチュエータと静電ラッチメカニズムとを有するマイクロ・ファブリケーションされた双投リレー
JP4364565B2 (ja) * 2003-07-02 2009-11-18 シャープ株式会社 静電アクチュエーター，マイクロスイッチ，マイクロ光スイッチ，電子機器および静電アクチュエーターの製造方法
FR2858459B1 (fr) * 2003-08-01 2006-03-10 Commissariat Energie Atomique Commutateur micro-mecanique bistable, methode d'actionnement et procede de realisation correspondant
FR2865724A1 (fr) * 2004-02-04 2005-08-05 St Microelectronics Sa Microsysteme electromecanique pouvant basculer entre deux positions stables
WO2005117051A1 (ja) * 2004-05-31 2005-12-08 Yokohama Tlo Company Ltd. マイクロマシンスイッチ
US7268446B2 (en) * 2004-09-01 2007-09-11 Yazaki North America, Inc. Power control center with solid state device for controlling power transmission
US7280015B1 (en) * 2004-12-06 2007-10-09 Hrl Laboratories, Llc Metal contact RF MEMS single pole double throw latching switch
JP4377828B2 (ja) * 2005-02-01 2009-12-02 シャープ株式会社 マイクロ接点開閉器および無線通信機器
US8063456B2 (en) 2006-09-12 2011-11-22 Alcatel Lucent Mechanical switch with a curved bilayer

Also Published As

Publication number Publication date
CN101512701A (zh) 2009-08-19
JP2011146403A (ja) 2011-07-28
JP2010503179A (ja) 2010-01-28
JP5579118B2 (ja) 2014-08-27
US20120023738A1 (en) 2012-02-02
EP2067158A2 (de) 2009-06-10
KR20090051217A (ko) 2009-05-21
CN101512701B (zh) 2012-12-12
US8063456B2 (en) 2011-11-22
WO2008033213A3 (en) 2008-05-08
KR101151976B1 (ko) 2012-06-04
US8361825B2 (en) 2013-01-29
WO2008033213A2 (en) 2008-03-20
EP2067158B1 (de) 2011-10-19
US20080060920A1 (en) 2008-03-13

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Legal Events

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