ATE532116T1 - Drucksensor mit einer membran mit einem amorphen material - Google Patents

Drucksensor mit einer membran mit einem amorphen material

Info

Publication number
ATE532116T1
ATE532116T1 AT09738027T AT09738027T ATE532116T1 AT E532116 T1 ATE532116 T1 AT E532116T1 AT 09738027 T AT09738027 T AT 09738027T AT 09738027 T AT09738027 T AT 09738027T AT E532116 T1 ATE532116 T1 AT E532116T1
Authority
AT
Austria
Prior art keywords
membrane
sensor
pressure
pressure sensor
young
Prior art date
Application number
AT09738027T
Other languages
English (en)
Inventor
Yves Winkler
Frederic Meylan
Joachim Grupp
Original Assignee
Swatch Group Res & Dev Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Swatch Group Res & Dev Ltd filed Critical Swatch Group Res & Dev Ltd
Application granted granted Critical
Publication of ATE532116T1 publication Critical patent/ATE532116T1/de

Links

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04G—ELECTRONIC TIME-PIECES
    • G04G21/00—Input or output devices integrated in time-pieces
    • G04G21/02—Detectors of external physical values, e.g. temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B47/00—Time-pieces combined with other articles which do not interfere with the running or the time-keeping of the time-piece
    • G04B47/06—Time-pieces combined with other articles which do not interfere with the running or the time-keeping of the time-piece with attached measuring instruments, e.g. pedometer, barometer, thermometer or compass
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B47/00—Time-pieces combined with other articles which do not interfere with the running or the time-keeping of the time-piece
    • G04B47/06—Time-pieces combined with other articles which do not interfere with the running or the time-keeping of the time-piece with attached measuring instruments, e.g. pedometer, barometer, thermometer or compass
    • G04B47/066—Time-pieces combined with other articles which do not interfere with the running or the time-keeping of the time-piece with attached measuring instruments, e.g. pedometer, barometer, thermometer or compass with a pressure sensor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Electric Clocks (AREA)
  • Laminated Bodies (AREA)
  • Micromachines (AREA)
AT09738027T 2008-04-29 2009-04-20 Drucksensor mit einer membran mit einem amorphen material ATE532116T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP08155390A EP2113759A1 (de) 2008-04-29 2008-04-29 Drucksensor mit einer ein amorphes Material enthaltenden Membran
PCT/EP2009/054677 WO2009132983A1 (fr) 2008-04-29 2009-04-20 Capteur de pression ayant une membrane comprenant un materiau amorphe

Publications (1)

Publication Number Publication Date
ATE532116T1 true ATE532116T1 (de) 2011-11-15

Family

ID=39811516

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09738027T ATE532116T1 (de) 2008-04-29 2009-04-20 Drucksensor mit einer membran mit einem amorphen material

Country Status (8)

Country Link
US (1) US8640547B2 (de)
EP (2) EP2113759A1 (de)
JP (1) JP2011519042A (de)
KR (1) KR20100135860A (de)
CN (1) CN102084232B (de)
AT (1) ATE532116T1 (de)
TW (1) TWI486730B (de)
WO (1) WO2009132983A1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8672873B2 (en) 2009-08-18 2014-03-18 Cequr Sa Medicine delivery device having detachable pressure sensing unit
US8547239B2 (en) 2009-08-18 2013-10-01 Cequr Sa Methods for detecting failure states in a medicine delivery device
EP2367078B1 (de) 2010-03-16 2018-08-15 Montres Breguet SA Uhr mit Schlagwerk, das mit einer Schallmembran ausgestattet ist
EP2400353A1 (de) * 2010-06-22 2011-12-28 The Swatch Group Research and Development Ltd. Uhrenzeiger
EP2466394A1 (de) * 2010-12-17 2012-06-20 The Swatch Group Research and Development Ltd. Kapsel für wissenschaftliches Instrument
US8997547B2 (en) 2011-03-23 2015-04-07 Irwin Industrial Tool Company Gauge with visual calibration confirmation and related method
CN102937705B (zh) * 2012-11-20 2015-07-08 重庆大学 复合结构的直流磁传感器
US10124391B1 (en) 2013-04-18 2018-11-13 Yale University Property enabled feature integration strategies and their fabrication methods for metallic glasses
EP2863275B1 (de) * 2013-10-15 2019-07-24 The Swatch Group Research and Development Ltd. Drucksensor
AT515787B1 (de) * 2014-10-14 2015-12-15 Piezocryst Advanced Sensorics Drucksensor mit einer sensormembran
CN105004456B (zh) * 2015-08-18 2017-10-17 北京中航兴盛测控技术有限公司 基于非晶材料的高性能薄膜压力传感器
EP3379342B1 (de) * 2017-03-22 2022-07-20 Officine Panerai AG Vorrichtung, die eine schnelleinstellfeder für uhrwerke umfasst, die mit einer triebfeder zusammenwirkt
CN107242856B (zh) * 2017-06-07 2020-11-24 宋佳 基于非晶合金织物的柔性传感器
CN107168589B (zh) * 2017-07-20 2020-09-18 上海天马微电子有限公司 一种显示基板及其制作方法、显示面板和显示装置
EP3695920B1 (de) * 2019-02-13 2022-04-06 Heraeus Deutschland GmbH & Co. KG Robuster ingot für die herstellung von bauteilen aus metallischen massivgläsern
CA3160871A1 (en) 2019-11-12 2021-05-20 Fresenius Medical Care Deutschland Gmbh Blood treatment systems
EP4058094A1 (de) 2019-11-12 2022-09-21 Fresenius Medical Care Deutschland GmbH Blutbehandlungssysteme
CA3160952A1 (en) 2019-11-12 2021-05-20 Fresenius Medical Care Deutschland Gmbh Blood treatment systems
EP4058095B1 (de) 2019-11-12 2025-12-24 Fresenius Medical Care Deutschland GmbH Zentrifugalblutpumpe umfassend einen teil eines blutdialysators
CN114728159B (zh) 2019-11-12 2025-10-17 费森尤斯医疗护理德国有限责任公司 血液治疗系统
WO2021096706A1 (en) 2019-11-12 2021-05-20 Fresenius Medical Care Deutschland Gmbh Blood treatment systems
US12558468B2 (en) 2019-12-12 2026-02-24 Fresenius Medical Care Holdings, Inc. Blood treatment systems
CN115877964A (zh) * 2021-09-29 2023-03-31 深圳市铄成新材料科技有限公司 一种电子设备
DE102024103140A1 (de) * 2024-02-05 2025-08-07 Vega Grieshaber Kg Druckmesszelle mit amorphem metall

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3635089A (en) * 1969-12-02 1972-01-18 Carborundum Co Apparatus and process for the measurement of the pressure of corrosive material
JPS58210534A (ja) * 1982-06-01 1983-12-07 Citizen Watch Co Ltd 圧力検出装置
JPS6183930A (ja) * 1984-09-29 1986-04-28 Toshiba Corp 圧力・差圧伝送器
JPS6275222A (ja) * 1985-09-30 1987-04-07 Toshiba Corp 圧力・差圧伝送器
DE3638978C2 (de) * 1986-11-14 1996-04-25 Teves Gmbh Alfred Elektrohydraulische Vorrichtung zur kontinuierlichen Überwachung des Druckes in einer hydraulischen Kraftfahrzeug-Bremsanlage
JPH06100514B2 (ja) * 1990-05-25 1994-12-12 本田技研工業株式会社 圧力センサおよびその製造方法
US5600070A (en) * 1993-07-01 1997-02-04 Wlodarczyk; Marek Fiber optic combustion pressure sensor with improved long-term reliability
US5597957A (en) * 1993-12-23 1997-01-28 Heimann Optoelectronics Gmbh Microvacuum sensor having an expanded sensitivity range
US5705751A (en) * 1995-06-07 1998-01-06 Setra Systems, Inc. Magnetic diaphragm pressure transducer with magnetic field shield
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US7412848B2 (en) * 2002-11-22 2008-08-19 Johnson William L Jewelry made of precious a morphous metal and method of making such articles
EP1455165A1 (de) * 2003-03-07 2004-09-08 Intersema Sensoric SA Miniaturisierter Sensor
US7082834B2 (en) * 2003-06-18 2006-08-01 New Jersey Institute Of Technology Flexible thin film pressure sensor
JP5007410B2 (ja) * 2006-04-19 2012-08-22 旭化成メディカル株式会社 圧力センサ
EP1850194A1 (de) * 2006-04-25 2007-10-31 Piguet, Frédéric Taucheruhr
US7814798B2 (en) * 2008-09-17 2010-10-19 P I Components Corporation Diaphragm structure and method of manufacturing a diaphragm structure
US8141429B2 (en) * 2010-07-30 2012-03-27 Rosemount Aerospace Inc. High temperature capacitive static/dynamic pressure sensors and methods of making the same

Also Published As

Publication number Publication date
CN102084232A (zh) 2011-06-01
EP2113759A1 (de) 2009-11-04
JP2011519042A (ja) 2011-06-30
US8640547B2 (en) 2014-02-04
EP2271903A1 (de) 2011-01-12
CN102084232B (zh) 2013-02-06
KR20100135860A (ko) 2010-12-27
TW201007396A (en) 2010-02-16
EP2271903B1 (de) 2011-11-02
HK1153266A1 (en) 2012-03-23
TWI486730B (zh) 2015-06-01
WO2009132983A1 (fr) 2009-11-05
US20110056301A1 (en) 2011-03-10

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