ATE532836T1 - Druckempfindliche haftklebefolie für die laserverarbeitung und verfahren zur laserverarbeitung - Google Patents
Druckempfindliche haftklebefolie für die laserverarbeitung und verfahren zur laserverarbeitungInfo
- Publication number
- ATE532836T1 ATE532836T1 AT09171810T AT09171810T ATE532836T1 AT E532836 T1 ATE532836 T1 AT E532836T1 AT 09171810 T AT09171810 T AT 09171810T AT 09171810 T AT09171810 T AT 09171810T AT E532836 T1 ATE532836 T1 AT E532836T1
- Authority
- AT
- Austria
- Prior art keywords
- pressure
- sensitive adhesive
- laser processing
- light
- wavelength
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7402—Wafer tapes, e.g. grinding or dicing support tapes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/09—Severing cooled glass by thermal shock
- C03B33/091—Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/0008—Organic ingredients according to more than one of the "one dot" groups of C08K5/01 - C08K5/59
- C08K5/0025—Crosslinking or vulcanising agents; including accelerators
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/16—Nitrogen-containing compounds
- C08K5/17—Amines; Quaternary ammonium compounds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
- C09J7/381—Pressure-sensitive adhesives [PSA] based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
- C09J7/385—Acrylic polymers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P54/00—Cutting or separating of wafers, substrates or parts of devices
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/04—Oxygen-containing compounds
- C08K5/07—Aldehydes; Ketones
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/49—Phosphorus-containing compounds
- C08K5/51—Phosphorus bound to oxygen
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/49—Phosphorus-containing compounds
- C08K5/51—Phosphorus bound to oxygen
- C08K5/53—Phosphorus bound to oxygen bound to oxygen and to carbon only
- C08K5/5397—Phosphine oxides
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/40—Additional features of adhesives in the form of films or foils characterized by the presence of essential components
- C09J2301/408—Additional features of adhesives in the form of films or foils characterized by the presence of essential components additives as essential feature of the adhesive layer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7416—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2809—Web or sheet containing structurally defined element or component and having an adhesive outermost layer including irradiated or wave energy treated component
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Adhesive Tapes (AREA)
- Dicing (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008255896A JP5537789B2 (ja) | 2008-10-01 | 2008-10-01 | レーザー加工用粘着シート及びレーザー加工方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE532836T1 true ATE532836T1 (de) | 2011-11-15 |
Family
ID=41491556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT09171810T ATE532836T1 (de) | 2008-10-01 | 2009-09-30 | Druckempfindliche haftklebefolie für die laserverarbeitung und verfahren zur laserverarbeitung |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20100080989A1 (de) |
| EP (1) | EP2172526B1 (de) |
| JP (1) | JP5537789B2 (de) |
| KR (1) | KR101259224B1 (de) |
| CN (1) | CN101712852B (de) |
| AT (1) | ATE532836T1 (de) |
| TW (1) | TWI448344B (de) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4107417B2 (ja) * | 2002-10-15 | 2008-06-25 | 日東電工株式会社 | チップ状ワークの固定方法 |
| USD621803S1 (en) * | 2008-07-16 | 2010-08-17 | The Furukawa Electric Co., Ltd. | Semiconductor wafer processing tape |
| USD628170S1 (en) * | 2008-07-16 | 2010-11-30 | The Furukawa Electric Company | Semiconductor wafer processing tape |
| JP2011146552A (ja) * | 2010-01-15 | 2011-07-28 | Toshiba Corp | 半導体装置の製造方法及び半導体装置 |
| USD804435S1 (en) | 2010-10-15 | 2017-12-05 | Hitachi Chemical Company, Ltd. | Flap in an adhesive tape for semiconductor manufacturing |
| USD664511S1 (en) | 2010-10-15 | 2012-07-31 | Hitachi Chemical Company, Ltd. | Adhesive tape for semiconductor manufacturing |
| USD664512S1 (en) | 2010-10-15 | 2012-07-31 | Hitachi Chemical Comapany, Ltd. | Adhesive tape for semiconductor manufacturing |
| USD656909S1 (en) | 2010-10-15 | 2012-04-03 | Hitachi Chemical Company, Ltd. | Adhesive tape for semiconductor manufacturing |
| KR101849430B1 (ko) * | 2010-12-06 | 2018-04-16 | 키모토 컴파니 리미티드 | 레이저 다이싱용 보조 시트 |
| JP5761596B2 (ja) * | 2011-03-30 | 2015-08-12 | 住友ベークライト株式会社 | 半導体ウエハ加工用粘着テープ |
| JP5990910B2 (ja) * | 2012-01-11 | 2016-09-14 | 住友ベークライト株式会社 | 半導体ウエハ等加工用粘着テープ |
| JP2013021105A (ja) * | 2011-07-11 | 2013-01-31 | Nitto Denko Corp | ダイシング用粘着シート、及び、ダイシング用粘着シートを用いた半導体装置の製造方法 |
| EP2810539B1 (de) * | 2012-02-03 | 2018-03-28 | Avery Dennison Corporation | Laserstrukturierung von fotovoltaischen rückseitenfolien |
| CN108671267B (zh) * | 2012-11-30 | 2022-02-18 | H·戴维·迪恩 | 用于高精度医学植入物的吸收剂和反射性生物相容性染料 |
| KR101600654B1 (ko) * | 2012-12-28 | 2016-03-07 | 제일모직주식회사 | 편광판용 점착 필름, 이를 위한 점착제 조성물, 이를 포함하는 편광판 및 이를 포함하는 광학표시장치 |
| WO2014142085A1 (ja) * | 2013-03-11 | 2014-09-18 | リンテック株式会社 | 粘着シートおよび加工されたデバイス関連部材の製造方法 |
| CN103170751A (zh) * | 2013-04-18 | 2013-06-26 | 苏州光韵达光电科技有限公司 | 一种光纤激光切割陶瓷的方法 |
| JP6331312B2 (ja) * | 2013-09-30 | 2018-05-30 | 大日本印刷株式会社 | 蒸着マスクの製造方法、及び蒸着マスク準備体 |
| US9919945B2 (en) * | 2013-11-14 | 2018-03-20 | Mitsubishi Electric Corporation | Laser processing method and laser processing apparatus |
| US20150143849A1 (en) * | 2013-11-26 | 2015-05-28 | Corning Incorporated | Method and system of laser cutting a sheet material |
| WO2016007695A1 (en) * | 2014-07-09 | 2016-01-14 | Corning Incorporated | Methods for separating a glass sheet |
| CN105489472B (zh) * | 2014-09-16 | 2019-03-15 | 长春石油化学股份有限公司 | 前切割保护液及使用此保护液的晶片加工方法 |
| WO2017116941A1 (en) * | 2015-12-30 | 2017-07-06 | 3M Innovative Properties Company | Infrared absorbing adhesive films and related methods |
| JP6088701B1 (ja) * | 2016-10-06 | 2017-03-01 | 株式会社きもと | レーザーダイシング用補助シート |
| CN108235574A (zh) * | 2016-12-15 | 2018-06-29 | 吴勇杰 | 电路板及其制作方法 |
| JP6718174B2 (ja) * | 2017-07-03 | 2020-07-08 | 日化精工株式会社 | レーザー加工用保護膜剤 |
| CN111655810B (zh) * | 2018-02-01 | 2022-05-27 | 昭和电工材料株式会社 | 构件连接方法和粘接带 |
| USD962882S1 (en) * | 2019-11-14 | 2022-09-06 | Showa Denko Materials Co., Ltd. | Temporary protective film for manufacturing semiconductor devices |
| US20240002701A1 (en) * | 2020-01-30 | 2024-01-04 | Nitto Denko Corporation | Pressure-sensitive adhesive composition, pressure-sensitive adhesive layer, and pressure-sensitive adhesive sheet |
| JP7584906B2 (ja) * | 2020-05-01 | 2024-11-18 | 日東電工株式会社 | 粘着シート |
| JP7509571B2 (ja) * | 2020-05-01 | 2024-07-02 | 日東電工株式会社 | 粘着シート |
| JP1685752S (de) * | 2020-11-02 | 2021-05-24 | ||
| USD962883S1 (en) | 2020-11-02 | 2022-09-06 | Showa Denko Materials Co., Ltd. | Temporary protective film for manufacturing semiconductor devices |
| JP7547498B2 (ja) * | 2020-11-09 | 2024-09-09 | デンカ株式会社 | 粘着テープ及び加工方法 |
| KR20230114922A (ko) * | 2022-01-26 | 2023-08-02 | 주식회사 엘지화학 | 반도체 공정용 점착 조성물, 이를 포함하는 반도체 공정용 필름 및 이를 이용한 반도체 패키지 제조 방법 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1061108B1 (de) | 1999-06-10 | 2003-10-22 | Nitto Denko Corporation | Verschmutzungsarme Klebefolien und Verfahren zur Entfernung von Resistmaterial |
| JP4354066B2 (ja) | 2000-01-28 | 2009-10-28 | リンテック株式会社 | 剥離シート及びその製造方法 |
| JP2001240842A (ja) * | 2000-02-28 | 2001-09-04 | Nitto Denko Corp | 紫外線硬化型粘着剤組成物とその粘着シ―ト類 |
| JP4886937B2 (ja) | 2001-05-17 | 2012-02-29 | リンテック株式会社 | ダイシングシート及びダイシング方法 |
| US7005031B2 (en) * | 2002-01-16 | 2006-02-28 | 3M Innovative Properties Company | Pressure sensitive adhesives having quaternary ammonium functionality, articles, and methods |
| JP4676711B2 (ja) * | 2004-03-29 | 2011-04-27 | 日東電工株式会社 | レーザー加工品の製造方法、およびそれに用いるレーザー加工用粘着シート |
| US20060246279A1 (en) * | 2003-04-25 | 2006-11-02 | Masakatsu Urairi | Method of producing laser-processed product and adhesive sheet, for laser processing used therefor |
| JP4767144B2 (ja) * | 2006-10-04 | 2011-09-07 | 日東電工株式会社 | レーザ加工用粘着シート |
| JP4493643B2 (ja) * | 2006-12-06 | 2010-06-30 | 日東電工株式会社 | 再剥離型粘着剤組成物、及び粘着テープ又はシート |
| JP2008163276A (ja) | 2007-01-05 | 2008-07-17 | Nitto Denko Corp | 半導体基板加工用粘着シート |
| JP2009297734A (ja) | 2008-06-11 | 2009-12-24 | Nitto Denko Corp | レーザー加工用粘着シート及びレーザー加工方法 |
-
2008
- 2008-10-01 JP JP2008255896A patent/JP5537789B2/ja not_active Expired - Fee Related
-
2009
- 2009-09-30 CN CN2009101741560A patent/CN101712852B/zh not_active Expired - Fee Related
- 2009-09-30 EP EP09171810A patent/EP2172526B1/de active Active
- 2009-09-30 AT AT09171810T patent/ATE532836T1/de active
- 2009-10-01 KR KR1020090093975A patent/KR101259224B1/ko not_active Expired - Fee Related
- 2009-10-01 US US12/571,618 patent/US20100080989A1/en not_active Abandoned
- 2009-10-01 TW TW098133427A patent/TWI448344B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20100037570A (ko) | 2010-04-09 |
| JP2010084047A (ja) | 2010-04-15 |
| JP5537789B2 (ja) | 2014-07-02 |
| CN101712852B (zh) | 2013-11-06 |
| TW201021953A (en) | 2010-06-16 |
| EP2172526B1 (de) | 2011-11-09 |
| KR101259224B1 (ko) | 2013-04-29 |
| US20100080989A1 (en) | 2010-04-01 |
| EP2172526A1 (de) | 2010-04-07 |
| TWI448344B (zh) | 2014-08-11 |
| CN101712852A (zh) | 2010-05-26 |
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