ATE533212T1 - Verstimmbarer laserdiode mit verteilter rückkopplung - Google Patents

Verstimmbarer laserdiode mit verteilter rückkopplung

Info

Publication number
ATE533212T1
ATE533212T1 AT01959685T AT01959685T ATE533212T1 AT E533212 T1 ATE533212 T1 AT E533212T1 AT 01959685 T AT01959685 T AT 01959685T AT 01959685 T AT01959685 T AT 01959685T AT E533212 T1 ATE533212 T1 AT E533212T1
Authority
AT
Austria
Prior art keywords
beams
light
mems
collimating lens
distributed feedback
Prior art date
Application number
AT01959685T
Other languages
English (en)
Inventor
Mark Missey
Bardia Pezeshki
Robert Lang
Original Assignee
Santur Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Santur Corp filed Critical Santur Corp
Application granted granted Critical
Publication of ATE533212T1 publication Critical patent/ATE533212T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031—Edge-emitting structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0875—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more refracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • G02B6/425—Optical features
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
    • G02B6/3526—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive the optical element being a lens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4207—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback
    • G02B6/4208—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback using non-reciprocal elements or birefringent plates, i.e. quasi-isolators
    • G02B6/4209—Optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/022—Mountings; Housings
    • H01S5/0225—Out-coupling of light
    • H01S5/02251—Out-coupling of light using optical fibres
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/0607—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
    • H01S5/0612—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature controlled by temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
    • H01S5/0687—Stabilising the frequency of the laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4087—Array arrangements, e.g. constituted by discrete laser diodes or laser bar emitting more than one wavelength

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Lasers (AREA)
AT01959685T 2000-08-09 2001-08-09 Verstimmbarer laserdiode mit verteilter rückkopplung ATE533212T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22438400P 2000-08-09 2000-08-09
US24469600P 2000-10-30 2000-10-30
PCT/US2001/024969 WO2002013343A2 (en) 2000-08-09 2001-08-09 Tunable distributed feedback laser

Publications (1)

Publication Number Publication Date
ATE533212T1 true ATE533212T1 (de) 2011-11-15

Family

ID=26918670

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01959685T ATE533212T1 (de) 2000-08-09 2001-08-09 Verstimmbarer laserdiode mit verteilter rückkopplung

Country Status (5)

Country Link
US (1) US6754243B2 (de)
EP (1) EP1346445B1 (de)
AT (1) ATE533212T1 (de)
AU (1) AU2001281213A1 (de)
WO (1) WO2002013343A2 (de)

Families Citing this family (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4514861B2 (ja) * 1999-11-29 2010-07-28 株式会社半導体エネルギー研究所 レーザ照射装置およびレーザ照射方法および半導体装置の作製方法
US7265439B1 (en) * 1999-11-30 2007-09-04 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Low cost, high speed, high efficiency infrared transceiver
JP2001188187A (ja) * 1999-12-28 2001-07-10 Sony Corp マイクロミラー装置及びこれを用いた光ディスク装置並びにマイクロミラー装置の製造方法
US7236709B1 (en) * 2000-10-20 2007-06-26 Avanex Corporation Multi-input wavelocker for controlling laser wavelengths of multiple lasers
WO2002037069A1 (en) 2000-10-30 2002-05-10 Santur Corporation Laser and fiber coupling control
WO2002037621A2 (en) * 2000-10-30 2002-05-10 Santur Corporation Tunable controlled laser array
JP2004518287A (ja) 2000-10-30 2004-06-17 サンター コーポレイション 熱によるレーザ素子のチューニング
US6791694B2 (en) 2001-01-16 2004-09-14 Santur Corporation Tunable optical device using a scanning MEMS mirror
US6775316B2 (en) * 2001-02-20 2004-08-10 Nortel Networks Ltd. Method and apparatus for integrating a vertical cavity surface emitting laser with a optical amplifier
WO2003096759A1 (en) * 2001-03-30 2003-11-20 Santur Corporation High speed modulation of arrayed lasers
US6813300B2 (en) * 2001-03-30 2004-11-02 Santur Corporation Alignment of an on chip modulator
WO2002084742A1 (en) 2001-03-30 2002-10-24 Santur Corporation Switched laser array modulation with integral electroabsorption modulator
US6781734B2 (en) 2001-03-30 2004-08-24 Santur Corporation Modulator alignment for laser
AU2002332452A1 (en) * 2001-08-02 2003-02-17 Santur Corporation Mems mirror
AU2002327432A1 (en) * 2001-08-08 2003-02-24 Santur Corporation Method and system for selecting an output of a vcsel array
AU2002331040A1 (en) * 2001-08-08 2003-02-24 Santur Corporation Method and system for selecting an output of a dbr array
US6577785B1 (en) * 2001-08-09 2003-06-10 Sandia Corporation Compound semiconductor optical waveguide switch
US7230959B2 (en) * 2002-02-22 2007-06-12 Intel Corporation Tunable laser with magnetically coupled filter
US6910780B2 (en) * 2002-04-01 2005-06-28 Santur Corporation Laser and laser signal combiner
US6980572B2 (en) 2002-05-28 2005-12-27 The Regents Of The University Of California Wavelength selectable light source
US6996313B1 (en) 2002-07-30 2006-02-07 Santur Corporation Laser component system assembly
KR100485212B1 (ko) * 2002-12-12 2005-04-25 한국전자통신연구원 파장가변 반도체 레이저 다이오드
US6961356B2 (en) * 2002-12-16 2005-11-01 Alcatel Integrated wavelength combiner/locker
FR2849218B1 (fr) * 2002-12-20 2005-03-04 Mauna Kea Technologies Tete optique confocale, notamment miniature, a balayage integre et systeme d'imagerie confocale mettant en oeuvre ladite tete
US6985651B2 (en) * 2003-08-05 2006-01-10 Xerox Corporation Thermal actuator with offset beam segment neutral axes and an optical waveguide switch including the same
US6985650B2 (en) * 2003-08-05 2006-01-10 Xerox Corporation Thermal actuator and an optical waveguide switch including the same
US6983088B2 (en) * 2003-08-05 2006-01-03 Xerox Corporation Thermal actuator and an optical waveguide switch including the same
DE102004037833A1 (de) * 2003-08-25 2005-03-31 Advanced Nano Systems Inc., San Jose Mems-Abtastspiegel mit verteilten Gelenken und mehreren Tragebefestigungen
US7014115B2 (en) * 2003-08-25 2006-03-21 Advanced Nano Systems, Inc. MEMS scanning mirror with distributed hinges and multiple support attachments
US20050276287A1 (en) * 2004-05-28 2005-12-15 Marc Epitaux Tunable laser light apparatus
US20060045158A1 (en) * 2004-08-30 2006-03-02 Chian Chiu Li Stack-type Wavelength-tunable Laser Source
US20060045425A1 (en) * 2004-09-02 2006-03-02 Tomohiko Kanie Wavelength-selectable device and optical communication system including the same
US20070002924A1 (en) * 2005-06-30 2007-01-04 Hutchinson John M Integrated monitoring and feedback designs for external cavity tunable lasers
DE102005033800B4 (de) * 2005-07-13 2016-09-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches optisches Element mit einer reflektierenden Fläche sowie dessen Verwendung
CN100430814C (zh) * 2006-03-24 2008-11-05 中兴通讯股份有限公司 一种可调谐激光器波长的控制系统及其方法
US20070268950A1 (en) * 2006-05-16 2007-11-22 Spinelli Luis A Low power Q-switched solid-state lasers
US8000368B2 (en) * 2006-07-26 2011-08-16 Santur Corporation Modulated semiconductor DFB laser array with a MEMS-based RF switch
US7773314B2 (en) * 2007-09-20 2010-08-10 Lexmark International, Inc. Laser diode/pre-scan assembly
CN101435907B (zh) * 2007-11-15 2011-12-21 鸿富锦精密工业（深圳）有限公司 镜片驱动装置及镜头模组
US8917963B2 (en) * 2010-05-21 2014-12-23 Kaiam Corp. MEMS-based levers and their use for alignment of optical elements
TWI584001B (zh) * 2011-09-28 2017-05-21 數位光學Ｍｅｍｓ有限公司 相機、致動器裝置及影像穩定化之方法
US8855476B2 (en) 2011-09-28 2014-10-07 DigitalOptics Corporation MEMS MEMS-based optical image stabilization
CN104466669A (zh) * 2013-09-23 2015-03-25 南京威宁锐克信息技术有限公司 可调谐激光器
WO2021154820A1 (en) * 2020-01-28 2021-08-05 Daylight Solutions, Inc. Laser assembly with active pointing compensation during wavelength tuning
WO2015131102A1 (en) * 2014-02-28 2015-09-03 The General Hospital Corporation System and method for processing radiation detectors using laser beams
US10305252B2 (en) 2014-10-15 2019-05-28 Lumentum Operations Llc Laser system and method of tuning the output power of the laser system
US12152858B2 (en) 2014-12-23 2024-11-26 Jm Acquisitions Inc Aiming device for a firearm
US20160231084A1 (en) * 2014-12-23 2016-08-11 Jm Acquisitions, Inc. Triple wavelength pointing device
CN104734002A (zh) * 2015-03-17 2015-06-24 无锡亮源激光技术有限公司 一种矩阵点光斑激光系统
CN105514781B (zh) * 2016-01-11 2019-09-10 深圳新飞通光电子技术有限公司 波长锁定装置
CN105470808A (zh) * 2016-01-11 2016-04-06 深圳新飞通光电子技术有限公司 一种多光路输出的可调谐激光器系统
DE102017206252A1 (de) 2017-04-11 2018-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Spiegelvorrichtung
JP7142227B2 (ja) * 2018-05-24 2022-09-27 パナソニックＩｐマネジメント株式会社 角度調節を有する交換可能レーザ共振器
CN110620325B (zh) * 2018-06-20 2022-02-11 华为技术有限公司 波长可调谐的激光器
WO2021076462A1 (en) * 2019-10-16 2021-04-22 Panasonic intellectual property Management co., Ltd Cold-start acceleration for wavelength-beam-combining laser resonators
CN112082586B (zh) * 2020-06-05 2022-09-16 哈尔滨工业大学 基于分布式反馈激光器阵列的光纤光栅阵列传感方法、装置及系统
GB2605801A (en) * 2021-04-13 2022-10-19 Disguise Tech Limited Light-emitting diodes
US12585106B2 (en) 2023-02-24 2026-03-24 Cisco Technology, Inc. MEMS mirror for coupling and compensating laser device to photonic integrated circuit

Family Cites Families (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4304460A (en) 1978-03-10 1981-12-08 Matsushita Electric Industrial Co., Ltd. Optical switching device
JPS5660088A (en) * 1979-10-22 1981-05-23 Nec Corp Multiwavelength light source
US4317611A (en) 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
US5289485A (en) * 1991-09-10 1994-02-22 Micracor, Inc. Multi-element optically pumped external cavity laser system
DE69312799T2 (de) 1992-05-18 1998-02-12 Philips Electronics Nv Optoelektronische Halbleiteranordnung
US5291502A (en) 1992-09-04 1994-03-01 The Board Of Trustees Of The Leland Stanford, Jr. University Electrostatically tunable optical device and optical interconnect for processors
JP3322712B2 (ja) 1993-01-14 2002-09-09 松下電器産業株式会社 光チューナの起動方法及び光チューナ
US5379310A (en) 1993-05-06 1995-01-03 Board Of Trustees Of The University Of Illinois External cavity, multiple wavelength laser transmitter
US5378330A (en) 1993-05-07 1995-01-03 Panasonic Technologies, Inc. Method for polishing micro-sized structures
US6044705A (en) * 1993-10-18 2000-04-04 Xros, Inc. Micromachined members coupled for relative rotation by torsion bars
WO1995013638A1 (en) * 1993-11-08 1995-05-18 International Business Machines Corporation Hybrid external coupled cavity semiconductor laser device
US5524076A (en) 1994-01-28 1996-06-04 Northern Telecom Limited Chirp control of a Mach-Zehnder optical modulator using non-equal power splitting
US5379318A (en) 1994-01-31 1995-01-03 Telefonaktiebolaget L M Ericsson Alternating grating tunable DBR laser
JP3611593B2 (ja) * 1994-02-14 2005-01-19 日本オプネクスト株式会社 半導体光素子の作製方法
KR0128528B1 (ko) 1994-03-22 1998-04-07 신재인 쐐기형 프리즘(wedge prism)을 이용한 단일종모드 파장가변 레이저의 정밀파장조정(wavelength tuning) 방법과 장치
US5612968A (en) 1995-04-20 1997-03-18 Bell Communications Research, Inc. Redundant multi-wavelength laser arrays
US5930045A (en) 1995-07-26 1999-07-27 Fujitsu, Ltd. Optical apparatus which uses a virtually imaged phased array to produce chromatic dispersion
AU6119396A (en) 1995-07-27 1997-02-26 Jds Fitel Inc. Method and device for wavelength locking
FR2737942B1 (fr) 1995-08-18 1997-11-07 Delorme Franck Composant d'emission laser accordable en longueur d'onde par variation d'absorption
US5771253A (en) 1995-10-13 1998-06-23 The Board Of Trustees Of The Leland Stanford Junior University High performance micromechanical tunable verticle cavity surface emitting laser
US5777763A (en) 1996-01-16 1998-07-07 Bell Communications Research, Inc. In-line optical wavelength reference and control module
US5882468A (en) 1996-02-23 1999-03-16 International Business Machines Corporation Thickness control of semiconductor device layers in reactive ion etch processes
JP2955986B2 (ja) 1996-05-22 1999-10-04 日本電気株式会社 半導体光変調器及びその製造方法
US5761234A (en) 1996-07-09 1998-06-02 Sdl, Inc. High power, reliable optical fiber pumping system with high redundancy for use in lightwave communication systems
US5825792A (en) 1996-07-11 1998-10-20 Northern Telecom Limited Wavelength monitoring and control assembly for WDM optical transmission systems
GB9615302D0 (en) 1996-07-20 1996-09-04 Northern Telecom Ltd Etalon arrangement
US5909323A (en) 1996-07-29 1999-06-01 Agfa Corporation Beam alignment correction element assembly
JPH10117040A (ja) 1996-10-08 1998-05-06 Nec Corp 半導体レーザ素子及びその製造方法
JPH10173291A (ja) 1996-12-11 1998-06-26 Mitsubishi Electric Corp 半導体レーザ装置
US5870417A (en) 1996-12-20 1999-02-09 Sdl, Inc. Thermal compensators for waveguide DBR laser sources
GB9701627D0 (en) 1997-01-27 1997-03-19 Plessey Telecomm Wavelength manager
US5999303A (en) 1997-03-24 1999-12-07 Seagate Technology Inc. Micro-machined mirror using tethered elements
US6201629B1 (en) 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
KR100269171B1 (ko) 1997-08-28 2000-10-16 윤종용 광선로의 광섬유 분산보상장치
JP3969807B2 (ja) 1997-10-20 2007-09-05 富士通株式会社 分散補償装置
US6212151B1 (en) 1997-11-12 2001-04-03 Iolon, Inc. Optical switch with coarse and fine deflectors
JP3119223B2 (ja) * 1997-12-18 2000-12-18 日本電気株式会社 外部鏡型波長可変レーザ
CA2228683C (en) 1998-02-20 2002-05-14 Ivan Avrutsky Superimposed grating wdm tunable lasers
US6075650A (en) 1998-04-06 2000-06-13 Rochester Photonics Corporation Beam shaping optics for diverging illumination, such as produced by laser diodes
US6133615A (en) 1998-04-13 2000-10-17 Wisconsin Alumni Research Foundation Photodiode arrays having minimized cross-talk between diodes
JPH11326707A (ja) * 1998-05-08 1999-11-26 Matsushita Electric Ind Co Ltd レーザー光結合装置とレーザー光結合の調整方法
US6256328B1 (en) 1998-05-15 2001-07-03 University Of Central Florida Multiwavelength modelocked semiconductor diode laser
US6091537A (en) 1998-12-11 2000-07-18 Xerox Corporation Electro-actuated microlens assemblies
US6272271B1 (en) 1999-04-29 2001-08-07 General Electric Company Alignment of optical interfaces for data communication
US6181717B1 (en) 1999-06-04 2001-01-30 Bandwidth 9 Tunable semiconductor laser system
US6847661B2 (en) 1999-09-20 2005-01-25 Iolon, Inc. Tunable laser with microactuator
US6804467B2 (en) 1999-11-05 2004-10-12 Jds Uniphase Inc. Chromatic dispersion compensation device
FR2805092A1 (fr) 2000-02-10 2001-08-17 Corning Inc Source laser susceptible d'etre selectionnee sous l'effet d'un mems
JP3910003B2 (ja) 2000-05-29 2007-04-25 富士通株式会社 光受信局、光通信システム及び分散制御方法
US6411424B1 (en) * 2000-09-18 2002-06-25 Intel Corporation Integrated laser array devices
JP2002246699A (ja) * 2001-02-19 2002-08-30 Hitachi Ltd レーザモジュールおよび光情報処理装置

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US20020064192A1 (en) 2002-05-30
US6754243B2 (en) 2004-06-22
WO2002013343A3 (en) 2003-07-31
EP1346445A2 (de) 2003-09-24
EP1346445B1 (de) 2011-11-09
WO2002013343A2 (en) 2002-02-14

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