ATE537457T1 - Beschleunigungsmesser - Google Patents

Beschleunigungsmesser

Info

Publication number
ATE537457T1
ATE537457T1 AT05782315T AT05782315T ATE537457T1 AT E537457 T1 ATE537457 T1 AT E537457T1 AT 05782315 T AT05782315 T AT 05782315T AT 05782315 T AT05782315 T AT 05782315T AT E537457 T1 ATE537457 T1 AT E537457T1
Authority
AT
Austria
Prior art keywords
axis direction
acceleration
displacement
base
bending deformation
Prior art date
Application number
AT05782315T
Other languages
English (en)
Inventor
Yoichi Mochida
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Application granted granted Critical
Publication of ATE537457T1 publication Critical patent/ATE537457T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Air Bags (AREA)
  • Vehicle Body Suspensions (AREA)
  • Measuring Fluid Pressure (AREA)
AT05782315T 2005-04-06 2005-09-08 Beschleunigungsmesser ATE537457T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2005/006783 WO2006114832A1 (ja) 2005-04-06 2005-04-06 加速度センサ
PCT/JP2005/016542 WO2006112051A1 (ja) 2005-04-06 2005-09-08 加速度センサ

Publications (1)

Publication Number Publication Date
ATE537457T1 true ATE537457T1 (de) 2011-12-15

Family

ID=37114800

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05782315T ATE537457T1 (de) 2005-04-06 2005-09-08 Beschleunigungsmesser

Country Status (7)

Country Link
US (1) US7631559B2 (de)
EP (1) EP1868000B1 (de)
JP (1) JP3956999B2 (de)
KR (1) KR100867550B1 (de)
CN (1) CN100454022C (de)
AT (1) ATE537457T1 (de)
WO (2) WO2006114832A1 (de)

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JP5072555B2 (ja) * 2006-12-12 2012-11-14 パナソニック株式会社 電子素子パッケージ
JP4687736B2 (ja) * 2008-03-25 2011-05-25 株式会社村田製作所 外力検知装置の製造方法および外力検知装置
JP2010008128A (ja) * 2008-06-25 2010-01-14 Yamaha Corp Ｍｅｍｓ
CN102119318B (zh) * 2008-08-18 2013-10-30 株式会社日立制作所 微机电系统
US8386042B2 (en) * 2009-11-03 2013-02-26 Medtronic Minimed, Inc. Omnidirectional accelerometer device and medical device incorporating same
CN102918401B (zh) * 2010-06-15 2014-04-16 株式会社村田制作所 力学传感器
DE102011076006B3 (de) * 2011-05-17 2012-09-13 Siemens Aktiengesellschaft Kraftaufnehmer, insbesondere Wägezelle
DE102011112935B4 (de) * 2011-09-13 2015-02-12 Micronas Gmbh Kraftsensor
CN104797943A (zh) * 2012-11-19 2015-07-22 株式会社村田制作所 角加速度传感器
JP5930127B2 (ja) * 2013-06-04 2016-06-08 株式会社村田製作所 加速度センサ
JP6294463B2 (ja) * 2014-03-20 2018-03-14 京セラ株式会社 センサ
DE102015104410B4 (de) * 2015-03-24 2018-09-13 Tdk-Micronas Gmbh Drucksensor
TW201728905A (zh) * 2016-02-03 2017-08-16 智動全球股份有限公司 加速度計
US20240194729A1 (en) * 2022-12-13 2024-06-13 Psemi Corporation Three-Dimensional Integrated Circuit Resistors
CN117607489B (zh) * 2024-01-17 2024-04-09 中国工程物理研究院电子工程研究所 压阻式加速度传感器的敏感结构及加速度传感器

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JPH0450657A (ja) * 1990-06-13 1992-02-19 Ricoh Co Ltd 加速度センサ
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Also Published As

Publication number Publication date
WO2006114832A1 (ja) 2006-11-02
CN100454022C (zh) 2009-01-21
US7631559B2 (en) 2009-12-15
EP1868000A4 (de) 2010-10-06
WO2006112051A1 (ja) 2006-10-26
JP3956999B2 (ja) 2007-08-08
JPWO2006112051A1 (ja) 2008-11-27
EP1868000B1 (de) 2011-12-14
KR100867550B1 (ko) 2008-11-10
CN1981197A (zh) 2007-06-13
KR20070067073A (ko) 2007-06-27
US20090183571A1 (en) 2009-07-23
EP1868000A1 (de) 2007-12-19

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